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    • 1. 发明申请
    • METHOD OF FABRICATING A P-I-N LIGHT EMITTING DIODE USING CU-DOPED P-TYPE ZNO
    • 使用Cu-DOPED P型ZNO制备P-I-N发光二极管的方法
    • WO2007024041A1
    • 2007-03-01
    • PCT/KR2005/004212
    • 2005-12-09
    • KOREA INSTITUTE OF SCIENCE AND TECHNOLOGYCHOI, Won-kookJUNG, Yeon-sik
    • CHOI, Won-kookJUNG, Yeon-sik
    • H01L33/00
    • H01L33/0087H01L33/0012H01L33/0095H01L33/285
    • Disclosed herein is a method of fabricating a p-i-n type light emitting diode using p-type ZnO, and particularly, a technique for fabricating a p-type ZnO thin film doped with copper, a light emitting diode manufactured using the same, and its application to electrical and magnetic devices. The method of fabricating a p-i-n type light emitting diode using p-type ZnO of the current invention includes depositing a low-temperature ZnO buffer layer on a sapphire single-crystal substrate, depositing an n-type gallium doped ZnO layer on the deposited low-temperature ZnO buffer layer, depositing an intrinsic ZnO thin film on the deposited n-type gallium doped ZnO layer, forming a p-type ZnO thin film layer on the deposited intrinsic ZnO thin film, forming a MESA structure on the p-type ZnO thin film layer through wet etching to obtain a diode structure, and subjecting the diode structure to post-heat treatment.
    • 本文公开了使用p型ZnO制造pin型发光二极管的方法,特别是制造掺杂有铜的p型ZnO薄膜的技术,使用其制造的发光二极管及其应用 电磁设备。 使用本发明的p型ZnO制造pin型发光二极管的方法包括在蓝宝石单晶衬底上沉积低温ZnO缓冲层,在沉积的低温ZnO上沉积n型掺杂镓的ZnO层, 温度ZnO缓冲层,在沉积的n型掺杂镓的ZnO层上沉积本征ZnO薄膜,在沉积的本征ZnO薄膜上形成p型ZnO薄膜层,在p型ZnO薄膜上形成MESA结构 膜层通过湿蚀刻获得二极管结构,并对二极管结构进行后热处理。