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1. 发明申请

WO2009155221A3 METHODS FOR CONTROLLING TIME SCALE OF GAS DELIVERY INTO A PROCESSING CHAMBER 审中-公开
标题翻译：用于控制气体输送到加工室的时间尺度的方法
公开(公告)号：WO2009155221A3
公开(公告)日：2010-03-25
申请号：PCT/US2009047279
申请日：2009-06-12
申请人： LAM RES CORP , YUN GUNSU , SHAREEF IQBAL A , JORGENSEN KURT , CHARATAN ROBERT
发明人： YUN GUNSU , SHAREEF IQBAL A , JORGENSEN KURT , CHARATAN ROBERT
IPC分类号： H01L21/00 , H01L21/02
CPC分类号： G05D7/0635 , Y10T137/7761
摘要： A method for establishing a mass flow controller (MFC) control scheme, which is configured for reducing a time scale for gas delivery into a processing chamber, for a recipe is provided. The method includes identifying a set of delayed gas species utilized during execution of the recipe with a set of delivery time slower than a target delivery time scale. The method also includes establishing an initial overshoot strength and an initial overshoot duration for each gas specie of the set of delayed gas species. The method further includes establishing MFC control scheme by adjusting an MFC hardware for each gas specie during the execution of the recipe. Adjusting the MFC hardware includes applying the initial overshoot strength for the initial overshoot duration to determine if the MFC control scheme provides for each gas specie a pressure profile within a target accuracy of an equilibrium pressure for the processing chamber.
摘要翻译：提供了一种用于建立质量流量控制器（MFC）控制方案，其被配置为用于减少用于配方的气体输送到处理室中的时间标度。该方法包括在具有比目标递送时间标度慢的一组递送时间的情况下识别在执行配方期间使用的一组延迟气体种类。该方法还包括为该组延迟气体种类的每种气体物质建立初始过冲强度和初始过冲持续时间。该方法还包括在执行配方期间通过调整每种气体样品的MFC硬件来建立MFC控制方案。调整MFC硬件包括对初始过冲持续时间应用初始过冲强度，以确定MFC控制方案是否为每种气体提供在处理室的平衡压力的目标精度内的压力分布。

2. 发明申请

WO2009155221A2 METHODS FOR CONTROLLING TIME SCALE OF GAS DELIVERY INTO A PROCESSING CHAMBER 审中-公开
标题翻译：用于控制气体输送到加工室的时间尺度的方法
公开(公告)号：WO2009155221A2
公开(公告)日：2009-12-23
申请号：PCT/US2009/047279
申请日：2009-06-12
申请人： LAM RESEARCH CORPORATION , YUN, Gunsu , SHAREEF, Iqbal, A. , JORGENSEN, Kurt , CHARATAN, Robert
发明人： YUN, Gunsu , SHAREEF, Iqbal, A. , JORGENSEN, Kurt , CHARATAN, Robert
IPC分类号： H01L21/00 , H01L21/02
CPC分类号： G05D7/0635 , Y10T137/7761
摘要： A method for establishing a mass flow controller (MFC) control scheme, which is configured for reducing a time scale for gas delivery into a processing chamber, for a recipe is provided. The method includes identifying a set of delayed gas species utilized during execution of the recipe with a set of delivery time slower than a target delivery time scale. The method also includes establishing an initial overshoot strength and an initial overshoot duration for each gas specie of the set of delayed gas species. The method further includes establishing MFC control scheme by adjusting an MFC hardware for each gas specie during the execution of the recipe. Adjusting the MFC hardware includes applying the initial overshoot strength for the initial overshoot duration to determine if the MFC control scheme provides for each gas specie a pressure profile within a target accuracy of an equilibrium pressure for the processing chamber.
摘要翻译：提供了一种用于建立质量流量控制器（MFC）控制方案，其被配置为用于减少用于配方的气体输送到处理室中的时间标度。该方法包括在具有比目标递送时间标度慢的一组递送时间的情况下识别在执行配方期间使用的一组延迟气体种类。该方法还包括为该组延迟气体种类的每种气体物质建立初始过冲强度和初始过冲持续时间。该方法还包括在执行配方期间通过调整每种气体样品的MFC硬件来建立MFC控制方案。调整MFC硬件包括对初始过冲持续时间应用初始过冲强度，以确定MFC控制方案是否为每种气体提供在处理室的平衡压力的目标精度内的压力分布。

3. 发明申请

WO1995035137A1 A TOY, PREFERABLY FOR ANIMALS 审中-公开
标题翻译：玩具，优选动物
公开(公告)号：WO1995035137A1
公开(公告)日：1995-12-28
申请号：PCT/DK1995000257
申请日：1995-06-20
申请人： JORGEN KRUUSE A/S , JORGENSEN, Kurt, Lind
发明人： JORGEN KRUUSE A/S
IPC分类号： A63F07/04
CPC分类号： A01K15/025 , A63F7/042 , A63F9/0078 , A63F9/0413 , A63F9/0415 , A63F9/0601
摘要： A toy, preferably for animals, is shaped as a hollow body with an inner labyrinth (9). An object such as a titbit, may be caused to move along the labyrinth, in that e.g. a dog manipulates the hollow body. The hollow body is preferably shaped as a cube (3) with bevelled edges, one side face of the cube being provided with an opening capable of receiving an insert member (2) and discharging the titbit after it has passed through the labyrinth (9). Accordingly, a toy is provided, preferably for dogs, capable of meeting the natural needs of a dog with respect to the use of brain and olfactory sense.
摘要翻译：优选用于动物的玩具被成形为具有内部迷宫（9）的中空体。可以使诸如滴定之类的物体沿着迷宫移动，例如，一只狗操纵中空体。中空体优选成形为具有倾斜边缘的立方体（3），该立方体的一个侧面设置有能够接收插入构件（2）的开口，并且在通过迷宫（9）之后排出滴定点，。因此，优选地为狗提供能够满足狗对于使用大脑和嗅觉的自然需要的玩具。

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