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1. 发明申请

US20080129185A1 Low voltage microcavity plasma device and addressable arrays 有权
标题翻译：低电压微腔等离子体器件和可寻址阵列
公开(公告)号：US20080129185A1
公开(公告)日：2008-06-05
申请号：US11811892
申请日：2007-06-12
申请人： J.Gary Eden , Sung-Jin Park , Paul A. Tchertchian , Seung Hoon Sung
发明人： J.Gary Eden , Sung-Jin Park , Paul A. Tchertchian , Seung Hoon Sung
IPC分类号： H05H1/24
CPC分类号： H01J11/12
摘要： Microcavity plasma devices and arrays of microcavity plasma devices are provided that have a reduced excitation voltage. A trigger electrode disposed proximate to a microcavity reduce the excitation voltage required between first and second electrodes to ignite a plasma in the microcavity when gas(es) or vapor(s) (or combinations thereof) are contained within the microcavity. The invention also provides symmetrical microplasma devices and arrays of microcavity plasma devices for which current waveforms are the same for each half-cycle of the voltage driving waveform. Additionally, the invention also provides devices that have standoff portions and voids that can reduce cross talk. The devices are preferably also used with a trigger electrode.
摘要翻译：提供微腔等离子体器件和微腔等离子体器件的阵列，其具有降低的激发电压。在微腔内包含气体或蒸汽（或其组合）时，靠近微腔设置的触发电极减小了第一和第二电极之间所需的激发电压，以点燃微腔中的等离子体。本发明还提供对称的微等离子体装置和微腔等离子体装置的阵列，其电流波形对于电压驱动波形的每个半周期是相同的。此外，本发明还提供了具有能够减少串扰的间隔部分和空隙的装置。这些装置优选地也与触发电极一起使用。

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