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1. 发明申请

US20050244710A1 SEALING RING ASSEMBLY AND MOUNTING METHOD 失效
标题翻译：密封环组件和安装方法
公开(公告)号：US20050244710A1
公开(公告)日：2005-11-03
申请号：US10905717
申请日：2005-01-18
申请人： Ian Mayes , James Gough , Ian Gilbert , Harvey Podgorney
发明人： Ian Mayes , James Gough , Ian Gilbert , Harvey Podgorney
IPC分类号： H01L21/66 , H01M2/08 , F16J15/02
CPC分类号： H01L22/00
摘要： A sealing ring assembly and an improved method for mounting a sealing ring into an electrochemical cell used for Electrochemical Capacitance Voltage (ECV) profiling measurements. The ring is located in a holder having at least one secondary bore providing fluid communication between a forward face of the holder and the central bore of the ring, directed parallel to but tangentially offset relative to the inner wall of the central bore so as to impart a degree of rotational flow to electrolyte entering the sealing ring through the or each secondary bore which effectively removes gas bubbles and refreshes the electrolyte. The holder facilitates ring removal with a much reduced risk of damage to the delicate sealing surface.
摘要翻译：密封环组件和用于将密封环安装到用于电化学电容电压（ECV）分析测量的电化学电池中的改进方法。所述环位于具有至少一个次级孔的保持器中，所述至少一个次级孔在保持器的前表面和环的中心孔之间提供流体连通，其平行于中心孔的内壁平行但相切地偏移，以便赋予通过该孔或每个次级孔进入密封环的电解质的旋转流程，其有效地去除气泡并刷新电解质。保持架有助于清除环，从而减少对精密密封面的损坏风险。

2. 发明授权

US07713404B2 Monitoring apparatus and method for improving the accuracy and repeatability of electrochemical capacitance voltage (ECV) measurements 有权
标题翻译：用于提高电化学电容电压（ECV）测量精度和重复性的监测装置和方法
公开(公告)号：US07713404B2
公开(公告)日：2010-05-11
申请号：US10520439
申请日：2003-07-04
申请人： Ian Mayes , Michael Sweeney , Harvey Podgorney , Clive Meaton
发明人： Ian Mayes , Michael Sweeney , Harvey Podgorney , Clive Meaton
IPC分类号： G01N27/26
CPC分类号： G01B11/0683 , G01B11/22 , G01B11/28 , H01L22/14
摘要： An apparatus and method for improving the accuracy of Electrochemical Capacitance Voltage (ECV) profiling measurements by alerting the operator to the presence of surface films or gas bubbles during the etching process and by using this in-situ monitoring apparatus to determine the true measurement area at the end of the measurement cycle and using the new value to recalculate the data. By making the area measurement integral to the ECV tool, every sample measurement can be corrected for the true measurement area, leading to improved accuracy and eliminating a large source of error.
摘要翻译：提供电化学电容电压（ECV）分析测量精度的装置和方法，通过在操作过程中提醒操作者存在表面膜或气泡，并通过使用该原位监测装置来确定真实的测量面积测量周期结束并使用新值重新计算数据。通过使区域测量成为ECV工具的积分，可以对真实的测量区域进行每个采样测量，从而提高精度并消除大量的误差。

3. 发明授权

US07446868B1 Micro defects in semi-conductors 有权
标题翻译：半导体微缺陷
公开(公告)号：US07446868B1
公开(公告)日：2008-11-04
申请号：US11528723
申请日：2006-09-26
申请人： Victor Higgs , Ian Mayes , Freddie Yun Heng Chin , Michael Sweeney
发明人： Victor Higgs , Ian Mayes , Freddie Yun Heng Chin , Michael Sweeney
IPC分类号： G01J3/30 , G01J3/00 , H01L21/00
CPC分类号： G01N21/6489
摘要： The invention relates to a method and apparatus for detecting defects in a semiconductor or silicon structure at room temperature, and in an efficient time, using photoluminescence. The invention employs the use of a high intensity beam of light preferably having a spot size between 0.1 mm 0.5 microns and a peak or average power density of 104-109 w/cm2 with a view to generating a high concentration of charge carriers, which charge characters detect defects in a semiconductor by interacting with same. These defects are visible by producing a photoluminescence image of the semiconductor. Several wavelengths may be selected to identify defects at a selective depth as well as confocal optics may be used.
摘要翻译：本发明涉及一种用于在室温下和在有效时间内使用光致发光来检测半导体或硅结构中的缺陷的方法和装置。本发明采用高强度光束，其优选地具有0.1mm×0.5微米的光点尺寸和10-4V的峰值或平均功率密度以产生高浓度的电荷载体，这些电荷特性通过与半导体的相互作用来检测半导体中的缺陷。通过产生半导体的光致发光图像可以看到这些缺陷。可以选择几个波长来识别选择深度处的缺陷以及可以使用共焦光学器件。

4. 发明申请

US20060207887A1 Monitoring apparatus and method for improving the accuracy and repeatability of electrochemical capacitance voltage (ecv) measurements 有权
标题翻译：用于提高电化学电容电压（ecv）测量的精度和重复性的监测装置和方法
公开(公告)号：US20060207887A1
公开(公告)日：2006-09-21
申请号：US10520439
申请日：2003-07-04
申请人： Ian Mayes , Michael Sweeney , Harvey Podgorney , Clive Meaton
发明人： Ian Mayes , Michael Sweeney , Harvey Podgorney , Clive Meaton
IPC分类号： B23H3/02 , C25D21/12
CPC分类号： G01B11/0683 , G01B11/22 , G01B11/28 , H01L22/14
摘要： An apparatus and method for improving the accuracy of Electrochemical Capacitance Voltage (ECV) profiling measurements by alerting the operator to the presence of surface films or gas bubbles during the etching process and by using this in-situ monitoring apparatus to determine the true measurement area at the end of the measurement cycle and using the new value to recalculate the data. By making the area measurement integral to the ECV tool, every sample measurement can be corrected for the true measurement area, leading to improved accuracy and eliminating a large source of error.
摘要翻译：提供电化学电容电压（ECV）分析测量精度的装置和方法，通过在操作过程中提醒操作者存在表面膜或气泡，并通过使用该原位监测装置来确定真实的测量面积测量周期结束并使用新值重新计算数据。通过使区域测量成为ECV工具的积分，可以对真实的测量区域进行每个采样测量，从而提高精度并消除大量的误差。

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