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1. 发明申请

WO1998006126A1 METHOD AND DEVICE FOR DRY ETCHING 审中-公开
标题翻译：用于干蚀刻的方法和装置
公开(公告)号：WO1998006126A1
公开(公告)日：1998-02-12
申请号：PCT/JP1996002227
申请日：1996-08-07
申请人： HITACHI, LTD. , IZAWA, Masaru , TACHI, Shinichi , TSUJIMOTO, Kazunori , KURE, Tokuo , KAWAHARA, Hironobu , HAMASAKI, Ryouji , KAWASAKI, Yoshinao
发明人： HITACHI, LTD.
IPC分类号： H01L21/302
CPC分类号： H01L21/76838 , C23F4/00 , H01L21/3065
摘要： A work is etched by supplying oxygen and carbon to the work such that the ratio of the number of oxygen atoms to the number of carbon atoms become 0.1 or less and controlling the deposition of a protective film and etching. This results in the reduction of side etching in a wiring process and enables a minuter wiring process with high dimension accuracy even if a resist selection rate is increased.
摘要翻译：通过向工件中供应氧和碳来蚀刻工件，使得氧原子数与碳原子数的比率变为0.1或更小，并且控制保护膜的沉积和蚀刻。这导致在布线处理中减少侧蚀刻，并且即使抗蚀剂选择率增加，也能够以高尺寸精度进行小型布线处理。

2. 发明申请

WO1998006128A1 DRY ETCHING METHOD AND DEVICE USED FOR THE SAME 审中-公开
标题翻译：干蚀刻方法和用于其的装置
公开(公告)号：WO1998006128A1
公开(公告)日：1998-02-12
申请号：PCT/JP1996003612
申请日：1996-12-11
申请人： HITACHI, LTD. , IZAWA, Masaru , TACHI, Shinichi , TSUJIMOTO, Kazunori , KURE, Tokuo , KAWAHARA, Hironobu , HAMASAKI, Ryouji , KAWASAKI, Yoshinao
发明人： HITACHI, LTD.
IPC分类号： H01L21/3065
CPC分类号： H01L21/76838 , C23F4/00 , H01L21/3065
摘要： An object is etched in an atmosphere in which the ratio of the number of oxygen atoms to that of carbon atoms is less than 10 while the deposition of a protective film and etching are controlled. Consequently, the side etching amount can be reduced at the time of forming wiring and finer wiring can be formed with higher dimensional accuracy even when the selection ratio to resist is raised.
摘要翻译：在其中氧原子与碳原子数之比小于10的气氛中蚀刻物体，同时控制保护膜的沉积和蚀刻。因此，即使形成布线时的侧面蚀刻量也能够降低，即使当抗蚀剂的选择比上升时，也可以以更高的尺寸精度形成更细的布线。

3. 发明申请

WO1997006900A1 METHOD AND ROLL FOR HOT ROLLING A STEEL MATERIAL 审中-公开
标题翻译：用于热轧钢材的方法和滚子
公开(公告)号：WO1997006900A1
公开(公告)日：1997-02-27
申请号：PCT/JP1996002287
申请日：1996-08-12
申请人： SUMITOMO METAL INDUSTRIES, LTD. , IZAWA, Masaru , KUSABA, Yoshiaki , TSUBOUCHI, Kenji
发明人： SUMITOMO METAL INDUSTRIES, LTD.
IPC分类号： B21B27/10
CPC分类号： B21B27/10 , B21B1/088
摘要： A method and a roll for hot rolling a steel material that are effective in preventing seizing between a roll and steel material being rolled, the wear of the roll and the rough surface of the roll and the steel material being rolled that are caused in hot rolling a steel material, particularly a stainless steel material. The method for hot rolling a steel material is a method for rolling while forming a coating of oxalate (iron oxalate, calcium oxalate and the like) in at least an area where the roll surface is in contact with the steel material being rolled. To be specific, for instance, a water solution containing oxalic acid or water-soluble oxalate and a water solution containing water-soluble calcium compound are used at least as a part of roll cooling fluid and rolling is performed while injecting the cooling fluid to the roll in hot rolling process from a nozzle of different system. Furthermore, the hot rolling method may be a method in which a coating of iron oxalate is formed on at least the surface of the roll in contact with the steel material being rolled by submerging the roll for hot rolling a steel material in the oxalic acid water solution or applying or spraying oxalic acid water solution to the roll for hot rolling a steel material and in which the roll for hot rolling a steel material on which the coating layer of iron oxalate is formed is used for rolling. The roll for hot rolling a steel material has the coating of oxalate formed on the area of the surface thereof in contact with the steel being rolled.
摘要翻译：一种用于热轧钢材的方法和轧辊，其有效地防止轧制和轧制的钢材之间的烧结，轧辊的磨损和轧制的粗糙表面和被轧制的钢材在热轧中引起钢材，特别是不锈钢材料。钢材的热轧方法是在辊表面与被轧钢材接触的区域中形成草酸盐（草酸铁，草酸钙等）的涂布的轧制方法。具体地说，例如，至少使用含有草酸或水溶性草酸的水溶液和含有水溶性钙化合物的水溶液作为辊冷却流体的至少一部分，并且在将冷却流体注入到从不同系统的喷嘴滚动热轧过程。此外，热轧方法可以是这样一种方法，其中至少在与被轧钢材相接触的辊的表面上形成草酸铁，该方法是将用于热轧钢材的辊浸没在草酸水中溶液或将草酸水溶液施加或喷洒到用于热轧钢材的辊中，并且其中用于轧制其上形成有草酸铁的涂层的钢材的辊用于轧制。用于热轧钢材的辊具有在与被轧制的钢接触的表面的区域上形成的草酸涂层。

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