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    • 2. 发明申请
    • Optical microscope system for detecting nanowires using polarizer and fast fourier transform
    • 用于使用偏振器和快速傅里叶变换检测纳米线的光学显微镜系统
    • US20090195869A1
    • 2009-08-06
    • US11940379
    • 2007-11-15
    • Eun Kyoung KimSeung Eon MoonHong Yeol LeeJong Hyurk ParkKang Ho ParkJong Dae KimGyu Tae KimDo Young JangEung Seok ParkHyun Jin Ji
    • Eun Kyoung KimSeung Eon MoonHong Yeol LeeJong Hyurk ParkKang Ho ParkJong Dae KimGyu Tae KimDo Young JangEung Seok ParkHyun Jin Ji
    • G02B21/06G06K9/00
    • G02B21/06G01N21/21G02B21/365G02B27/286Y10S977/881
    • Provided is an optical microscope system for detecting nanowires that is designed with a rotational polarizer and Fast Fourier Transform (FFT) to allow for use of an existing optical microscope in fabricating an electronic device having the nanowires. The optical microscope system includes: a light source for emitting light to provide the light to a nanowire sample; a rotational polarizer provided on a path of the light emitted from the light source for polarizing the light; an optical microscope for detecting a nanowire image using light that is polarized by the rotational polarizer and incident on the nanowire sample; a CCD camera provided in a region of the optical microscope for photographing and storing the nanowire image detected by the optical microscope; and a data processor for performing Fast Fourier Transform (FFT) on the nanowire image stored in the CCD camera. Intensity of reflected light varies, due to optical anisotropy of the nanowires, along a polarizing orientation of light incident on the nanowires. It is possible to obtain a distinct image of the nanowires having a nanometer line width by performing FFT on each pixel of reflected light images obtained at predetermined time intervals after light passing through the polarizer rotating in a predetermined period is incident on the nanowires.
    • 提供了一种用于检测纳米线的光学显微镜系统,其被设计为具有旋转偏振器和快速傅里叶变换(FFT),以允许使用现有的光学显微镜来制造具有纳米线的电子器件。 光学显微镜系统包括:用于发射光以向纳米线样品提供光的光源; 设置在从光源发射的光的路径上以使光偏振的旋转偏振器; 光学显微镜,用于使用被旋转偏振器偏振并入射在纳米线样品上的光检测纳米线图像; 设置在光学显微镜的区域中的CCD照相机,用于拍摄和存储由光学显微镜检测的纳米线图像; 以及用于在存储在CCD照相机中的纳米线图像上执行快速傅里叶变换(FFT)的数据处理器。 反射光的强度由于纳米线的光学各向异性而沿着入射在纳米线上的光的偏振方向而变化。 通过在经过预定时间内旋转的偏振片的光入射到纳米线上之后,以预定时间间隔获得的反射光图像的每个像素执行FFT,可以获得具有纳米线宽度的纳米线的不同图像。