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    • 6. 发明授权
    • Glass support system, method of supporting glass, and etching equipment using the same
    • 玻璃支撑系统,支撑玻璃的方法和使用其的蚀刻设备
    • US08361233B2
    • 2013-01-29
    • US11159804
    • 2005-06-23
    • Hyuk Min Kwon
    • Hyuk Min Kwon
    • C23F1/00B44C1/22
    • B65G49/065B65G2249/02
    • The present invention provides a glass support system, including methods and equipment for supporting a glass substrate on a column of air. The disclosed glass alignment equipment may be used to prevent or reduce defects or contamination on the surface of a glass substrate which may arise when the glass is aligned prior to etching. In particular, a support pin of the present invention may be used with an air circulation system to support or align glass over a column of air so as to reduce or prevent defects or contamination on the glass in dry etching processes used in the manufacturing of LCDs and other devices.
    • 本发明提供了一种玻璃支撑系统,包括用于将玻璃基板支撑在空气柱上的方法和设备。 所公开的玻璃对准设备可用于防止或减少在蚀刻之前对准玻璃时可能出现的玻璃基板表面上的缺陷或污染。 特别地,本发明的支撑销可以与空气循环系统一起使用,以在玻璃柱上支撑或对齐玻璃,以便在用于制造LCD的干式蚀刻工艺中减少或防止玻璃上的缺陷或污染 和其他设备。