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    • 2. 发明授权
    • Apparatus for securing an automatically loaded wafer cassette on a wafer
processing equipment
    • 用于将自动加载的晶片盒固定在晶片加工设备上的装置
    • US5246218A
    • 1993-09-21
    • US951444
    • 1992-09-25
    • Hoon-Yeng YapCharles H. Babcock, III
    • Hoon-Yeng YapCharles H. Babcock, III
    • B23Q16/00H01L21/677
    • H01L21/67775B23Q16/00Y10S269/903Y10S414/137Y10S414/14
    • An apparatus for holding a wafer cassette on a platform of a wafer processing system is described. The apparatus includes a first guiding member and a second guiding member. The first guiding member is mounted on the platform of the wafer processing system. The second guiding member is mounted on the platform of the wafer processing system at a corresponding position of the first guiding member. The first and second guiding members define an interior boundary within which the wafer cassette is secured. The interior boundary matches an outline of a lower portion of the water cassette. The first and second guiding members together guide the water cassette to be precisely loaded into the interior boundary defined by the first and second guiding members. When the wafer cassette is located in the interior boundary defined by the first and second guiding members, the first and second guiding members prevent the wafer cassette from moving horizontally on the platform. The first and second guiding members automatically and precisely align the wafer cassette into the interior boundary when the first and second guiding members receive the wafer cassette.
    • 描述了用于将晶片盒保持在晶片处理系统的平台上的装置。 该装置包括第一引导构件和第二引导构件。 第一引导构件安装在晶片处理系统的平台上。 第二引导构件在第一引导构件的对应位置安装在晶片处理系统的平台上。 第一和第二引导构件限定了其中晶片盒被固定的内部边界。 内部边界与水盒的下部的轮廓相匹配。 第一和第二引导构件一起引导水盒被精确地装载到由第一和第二引导构件限定的内部边界中。 当晶片盒位于由第一和第二引导构件限定的内部边界中时,第一和第二引导构件防止晶片盒在平台上水平移动。 当第一和第二引导构件接收晶片盒时,第一和第二引导构件自动且精确地将晶片盒对准到内部边界。
    • 4. 发明授权
    • Method and apparatus for transferring wafer cassettes in microelectronic manufacturing environment
    • 在微电子制造环境中传送晶片盒的方法和装置
    • US06364331B1
    • 2002-04-02
    • US09410400
    • 1999-10-01
    • Hoon-Yeng Yap
    • Hoon-Yeng Yap
    • B62B304
    • H01L21/67775B62B3/10B62B2203/10B62B2203/20B62B2207/00
    • A wafer transport cart comprises a wheeled support structure and an upright member which is pivotably coupled to the support structure. The upright member has a handle which is pivotably coupled to a wafer cassette support, which comprises a pair of fork-like arms. Wafer production personnel can maneuver the cart adjacent a wafer manufacturing load port, and unload a wafer cassette from the cart to the load port or vice versa, by employing movements of the upright member and the handle. Shock-absorbing dampers are provided for the upright member and the handle. An inter-cart coupling mechanism enables a plurality of carts to be joined together for tandem transport within the manufacturing facility. The arms mate with mating regions on the wafer cassette and on the load port. An alignment notch mates with an alignment pin on the load port. Also described are methods of using the wafer transport cart to load and unload a wafer cassette.
    • 晶片运输车包括轮式支撑结构和可枢转地联接到支撑结构的直立构件。 直立构件具有可枢转地联接到晶片盒支架的手柄,该支架包括一对叉形臂。 晶片生产人员可以在晶片制造负载端口附近操纵车辆,并且通过采用直立部件和把手的运动将晶片盒从推车卸载到负载端口,反之亦然。 为直立构件和手柄提供减震阻尼器。 车间连接机构使得多个车可以连接在一起,用于制造设施内的串联运输。 双臂与晶圆盒上的配合区域和负载端口配合。 对准凹口与负载端口上的定位销配合。 还描述了使用晶片运输车来加载和卸载晶片盒的方法。