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    • 4. 发明申请
    • IN-LINE SYSTEM AND METHOD FOR MANUFACTURING A SEMICONDUCTOR PACKAGE
    • 用于制造半导体封装的在线系统和方法
    • US20090028671A1
    • 2009-01-29
    • US11943046
    • 2007-11-20
    • Ho-Tae JinYoung-Seok JungBong-Su Cho
    • Ho-Tae JinYoung-Seok JungBong-Su Cho
    • H01L21/677H01L21/67
    • H01L21/67132H01L21/67069H01L21/67173H01L21/67207H01L21/67213H01L21/6723
    • An in-line system for manufacturing a semiconductor package according to principles of the present invention can prevent wafer warpage due to a back-lap process and die defects due to sticking of the die. In one embodiment, the in-line system adheres a semiconductor chip to a substrate by coating a liquid adhesive agent on a rear surface of the wafer. The processes of the in-line system are preferably performed in series. More particularly, the in-line system for manufacturing a semiconductor package can include a loading unit for loading a wafer into the system. A back-lap unit can include a grinder configured to back-grind a rear surface of the wafer received from the loading unit. A cleansing unit preferably comprises an air pressure plasma generating unit for cleansing the wafer using air pressure plasma. A coating unit can be configured to form an adhesive layer on a rear surface of the cleansed wafer by using a nozzle to coat a liquid adhesive agent onto the wafer. In the coating unit, the wafer can be rotated or not rotated depending on the desired characteristics of the adhesive layer. An attaching unit is preferably provided to attach a dicing tape on the adhesive layer formed. And an unloading unit unloads the wafer from the system. A transporting unit can be configured to transport the wafer sequentially between the loading unit, the back-lap unit, the cleansing unit, the coating unit, the attaching unit, and the unloading unit. One or more wafer chucks can be mounted to the wafer as the wafer is transported through the manufacturing processes.
    • 根据本发明的原理的用于制造半导体封装的在线系统可以防止由于模头的贴合而产生的由于搭接过程而造成的晶片翘曲和模具缺陷。 在一个实施例中,在线系统通过在晶片的后表面上涂覆液体粘合剂将半导体芯片粘附到基底上。 在线系统的处理优选串联进行。 更具体地,用于制造半导体封装的在线系统可以包括用于将晶片加载到系统中的加载单元。 背部搭载单元可以包括配置成后研磨从装载单元接收的晶片的后表面的研磨机。 清洁单元优选地包括用于使用空气压力等离子体清洁晶片的空气压力等离子体产生单元。 涂覆单元可以被配置为通过使用喷嘴将液体粘合剂涂覆到晶片上而在清洁的晶片的后表面上形成粘合剂层。 在涂布单元中,晶片可以根据粘合剂层的期望特性而旋转或不旋转。 优选地设置附接单元以将切割带附接到形成的粘合剂层上。 并且卸载单元从系统卸载晶片。 传送单元可以被配置为在加载单元,后座单元,清洁单元,涂布单元,附接单元和卸载单元之间顺序地传送晶片。 当晶片通过制造工艺传送时,可以将一个或多个晶片卡盘安装到晶片。