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    • 2. 发明申请
    • Cleaning member for semiconductor apparatus and process for producing the same
    • 半导体装置用清洁构件及其制造方法
    • US20070163621A1
    • 2007-07-19
    • US10591330
    • 2005-03-07
    • Hitoshi IshizakaDaisuke UendaDaisuke Hanai
    • Hitoshi IshizakaDaisuke UendaDaisuke Hanai
    • B08B9/00
    • H01L21/6715H01L21/6708
    • An object is to provide a cleaning member for semiconductor apparatus which can easily remove, without fail, foreign matters adherent to inner parts of a semiconductor apparatus, can bear a clearly readable mark for lot management, and can be prevented from generating particles upon contact with the holding part of a wafer case. A cleaning member for semiconductor apparatus, characterized in that the cleaning member comprises a wafer 1 and formed on at least one side thereof a cleaning layer 2 made of a heat-resistant resin formed by thermally curing a poly(amic acid), and that the cleaning layer 2 has a part 12 where a wafer surface is exposed; and in particular a cleaning member for semiconductor apparatus having the constitution described above wherein that part 12 in the cleaning layer 2 in which a wafer surface is exposed is a part where the cleaning layer has been removed throughout the whole circular area having a given width ranging from the peripheral edge of the wafer toward the center thereof.
    • 本发明的目的是提供一种用于半导体装置的清洁部件,其能够容易地去除附着于半导体装置的内部部件的异物,从而能够为批次管理提供清晰可读的标记,并且可以防止在接触时产生颗粒 晶片盒的保持部分。 一种用于半导体装置的清洁部件,其特征在于,所述清洁部件包括晶片1,并且在其至少一侧上形成由通过热固化聚(酰胺酸)形成的耐热树脂制成的清洁层2, 清洁层2具有暴露晶片表面的部分12; 特别是具有上述结构的半导体装置用清洁部件,其中,露出晶片表面的清洁层2中的部分12是在具有给定宽度范围的整个圆形区域中已经清除了清洁层的部分 从晶片的周缘朝向其中心。
    • 4. 发明授权
    • Method for removing residue and method for production of printed board having hole
    • 去除残留物的方法和生产具有孔的印刷板的方法
    • US06168910A
    • 2001-01-02
    • US09334643
    • 1999-06-17
    • Atsushi HinoHitoshi Ishizaka
    • Atsushi HinoHitoshi Ishizaka
    • G03F726
    • H05K3/0026B08B7/0042B23K26/066B23K26/067B23K26/0676H05K3/0035H05K2203/0557Y10S430/146Y10S438/94Y10S438/945
    • A method is disclosed for removing a decomposition residue and/or a processing residue, of a material of a resin layer, which is attached to the periphery and inside of holes formed in the resin layer of a printed board. The method provides shooting a laser beam having a wavelength for laser ablation at the holes to thereby remove the decomposition residue and/or the processing residue; reshaping the sectional shape perpendicular to the direction of advance of the laser beam by beam reshaping optics; and shooting the reshaped laser beam to shoot simultaneously all the holes formed in the resin layer and vicinity thereof, wherein the total irradiated area on the printed board is 200%-10,000% of the total sectional area of the holes formed in the printed board. Also disclosed is a method for producing a printed board having holes that provides for: forming holes in a resin layer of a printed board by laser processing and removing a decomposition residue and/or a processing residue, of a material of the resin layer, which is attached to the periphery and inside of the holes.
    • 公开了一种用于除去附着在形成在印刷电路板的树脂层中的孔的周边和内部的树脂层的材料的分解残渣和/或加工残留物的方法。 该方法提供了在孔处拍摄具有用于激光消融的波长的激光束,从而去除分解残余物和/或加工残留物; 通过光束整形光学器件重新形成垂直于激光束前进方向的截面形状; 并拍摄重新设置的激光束同时拍摄树脂层及其附近形成的所有孔,其中印刷电路板上的总照射面积为形成在印刷电路板上的孔的总截面积的200%-10,000%。 还公开了一种具有孔的印刷电路板的制造方法,所述印刷电路板具有:通过激光加工在印刷电路板的树脂层上形成孔,除去树脂层的材料的分解残渣和/或加工残渣, 附着在孔的周边和内部。
    • 5. 发明授权
    • Method for fabrication of probe structure and circuit substrate therefor
    • 探针结构及其电路基板的制造方法
    • US5691210A
    • 1997-11-25
    • US728076
    • 1996-10-09
    • Yoshihisa MoriAtsushi HinoHitoshi Ishizaka
    • Yoshihisa MoriAtsushi HinoHitoshi Ishizaka
    • G01R31/26G01R1/04G01R1/06G01R1/073H01L21/66
    • G01R1/07314G01R1/0483
    • A method for fabrication of a probe structure comprising a circuit substrate comprising a circuit pattern formed on one side or inside of an insulating substrate and a positioning member formed on either side of said insulating substrate, said positioning member being capable of positioning and retaining a test target at a testing position of the probe structure, and the circuit pattern and the positioning member being in a positional relationship which establishes a continuity between the circuit pattern and a bump contact, which method comprises determining, on the same side of the substrate on which the positioning member has been formed, the position of the bump contact according to the position of the positioning member as a reference position, and forming the bump contact capable of establishing continuity with the circuit pattern. According to the method of the present invention, a probe structure can be obtained which is capable of positioning bump contacts and test target highly accurately as compared to conventional methods. In addition, since conventional production method can be applied to the manufacture of positioning member and bump contacts, highly precise products can be produced economically. The circuit substrate of the present invention which comprises a positioning member can be beneficially used for the production of the probe structure of the present invention.
    • 一种用于制造探针结构的方法,其包括电路基板,该电路基板包括形成在绝缘基板的一侧或内侧上的电路图案和形成在所述绝缘基板两侧的定位部件,所述定位部件能够定位和保持测试 目标在探针结构的测试位置,并且电路图案和定位构件处于建立电路图案和凸块接触之间的连续性的位置关系,该方法包括在衬底的同一侧上确定 已经形成了定位构件,根据定位构件的位置作为基准位置的凸起接触的位置,并且形成能够与电路图案建立连续性的凸点接触。 根据本发明的方法,与传统方法相比,可以获得能够高度准确地定位凸块接触和测试目标的探针结构。 此外,由于可以将传统的制造方法应用于定位构件和凸起接触的制造,因此可以经济地制造高精度的产品。 包括定位构件的本发明的电路基板可有利地用于制造本发明的探针结构。