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    • 2. 发明授权
    • Welded bellows for semiconductor manufacturing device
    • 焊接波纹管用于半导体制造装置
    • US09147571B2
    • 2015-09-29
    • US14110651
    • 2012-03-09
    • Hidekazu TakahashiMasahiko InoueHiroyuki Ochiai
    • Hidekazu TakahashiMasahiko InoueHiroyuki Ochiai
    • F16J15/00H01L21/00F16J3/04
    • H01L21/00F16J3/047Y10T29/41
    • An accordion-structured welded bellows for a semiconductor-manufacturing device is characterized in that a plurality of annular bellows plates having curved surfaces in a radial direction are connected in an alternating fashion on the outside-diameter side and the inside-diameter side, wherein the annular bellows plates have a processing-side bellows plate and a non-processing-side bellows plate, a gas layer is interposed between the two bellows plates, the processing-side bellows plate is configured as a thick plate, and the non-processing-side bellows plate is configured as a thin plate. The welded bellows is less likely to be damaged by foreign matter and to be able to use the non-processing-side bellows plate to compensate for any damage to the processing-side bellows plate.
    • 用于半导体制造装置的手风琴结构化的波纹管的特征在于,具有径向弯曲表面的多个环形波纹管板以交替的方式连接在外径侧和内径侧上,其中, 环形波纹管板具有处理侧波纹管板和非加工侧波纹管板,气体层插入在两个波纹管板之间,处理侧波纹管板构造为厚板, 侧面波纹管板被配置为薄板。 焊接的波纹管不太可能被异物损坏,并且能够使用非加工侧波纹管板来补偿对加工侧波纹管板的任何损坏。
    • 4. 发明授权
    • Coating film and coating-film forming method
    • 涂膜和涂膜成型方法
    • US08287968B2
    • 2012-10-16
    • US12296179
    • 2006-04-05
    • Akihiro GotoMasahiro OkaneKazushi NakamuraHiroyuki TeramotoHiroyuki OchiaiMitsutoshi Watanabe
    • Akihiro GotoMasahiro OkaneKazushi NakamuraHiroyuki TeramotoHiroyuki OchiaiMitsutoshi Watanabe
    • H01T14/00B32B15/00
    • C23C26/02C23C8/80C23C26/00Y10T428/12493
    • To form a coating film having an excellent wear-resistant property in a temperature range from low temperature to high temperature a coating-film forming method includes a metal-powder producing step of producing a metal powder containing an element exhibiting a lubricating property when oxidized; an oxidizing step of oxidizing the metal powder so that an amount of oxygen contained in the metal powder is within 6 weight % to 14 weight %; and a coating-film forming step of forming a coating film on a material subject to a treatment, the coating film having such a composition that an area where an oxygen content is 3 weight % or less and an area where an oxygen content is 8 weight % or more are distributed in a unit area of the coating film when the metal powder is in a melted state or a semi-melted state, and an oxygen content of the entire coating film after the metal powder is melted or semi-melted being within 5 weight % to 9 weight %.
    • 为了形成在低温至高温的温度范围内具有优异的耐磨性的涂膜,涂膜形成方法包括:金属粉末的制造步骤,其制造含有氧化时具有润滑性的元素的金属粉末; 氧化金属粉末的氧化步骤,使得金属粉末中所含的氧含量在6重量%至14重量%之间; 以及在经受处理的材料上形成涂膜的涂膜形成步骤,所述涂膜具有氧含量为3重量%以下的面积和氧含量为8重量的区域的组成 当金属粉末处于熔融状态或半熔化状态时,涂膜的单位面积中分布有%以上,并且金属粉末后的整个涂膜的氧含量在内部熔融或半熔融 5重量%至9重量%。
    • 5. 发明申请
    • TUBULAR BODY SOUNDPROOF COVER AND COVERED TUBULAR BODY
    • 管状身体防护罩和覆盖的管状体
    • US20120118664A1
    • 2012-05-17
    • US13359084
    • 2012-01-26
    • Kazuki ERAHiroyuki OCHIAI
    • Kazuki ERAHiroyuki OCHIAI
    • G10K11/22
    • F02M35/1272F02B29/0406F02B77/13F02M35/1277F16L55/0336
    • A purpose is to provide a tubular body soundproof cover and a covered tubular body, for which elastic deformation of the tubular body is unlikely to be inhibited. The tubular body soundproof cover includes a sound absorbing layer arranged on outside in an axially perpendicular direction of a tubular body having tubular body side curved sections; a skin layer arranged on outside in the axially perpendicular direction of the sound absorbing layer; and cover side curved sections arranged on outside in the axially perpendicular direction of the tubular body side curved sections, including at least a portion of the sound absorbing layer and at least a portion of the skin layer. The cover side curved sections have non-adherent sections in which the sound absorbing layer and the skin layer are not bonded over the entire circumferential length.
    • 目的是提供一种管状体隔音盖和一个覆盖的管状体,由此不可能抑制管状体的弹性变形。 管体隔音罩包括:吸声层,其设置在具有筒状体侧弯曲部的管状体的轴向垂直方向的外侧; 在吸声层的轴向垂直方向上配置在外侧的皮肤层; 以及在管状体侧弯曲部分的轴向垂直方向上布置在外侧的覆盖侧弯曲部分,包括至少一部分吸音层和至少一部分皮肤层。 盖侧弯曲部分具有不粘附部分,其中吸声层和表皮层在整个圆周长度上不粘合。
    • 6. 发明授权
    • Surface treatment method and repair method
    • 表面处理方法及修复方法
    • US08162601B2
    • 2012-04-24
    • US11908038
    • 2006-03-09
    • Hiroyuki OchiaiMitsutoshi WatanabeTakashi FurukawaIssei Otera
    • Hiroyuki OchiaiMitsutoshi WatanabeTakashi FurukawaIssei Otera
    • F03B1/04
    • C23C8/02C23C26/00F01D5/288F05D2230/30F05D2230/40Y10T29/49318Y10T29/49728
    • A method for forming a dense coating on a limited region of a subject body is disclosed. The method is composed of the steps of: applying one selected from the group of a compressed body of a powder of a metal and a sintered compressed body of a powder of a metal to a working electrode; executing discharge deposition to deposit a first coating from the working electrode on the subject body by applying the subject body as a workpiece of the discharge deposition; executing discharge deposition to deposit a second coating from the working electrode on the first coating by applying the subject body as a workpiece of the discharge deposition; and heating the subject body in one selected from the group of a vacuum, an air and an oxidizing atmosphere so as to densify the second coating or oxidizing the second coating at least in part to generate a solid lubricant substance.
    • 公开了一种在被检体的有限区域上形成致密涂层的方法。 该方法包括以下步骤:将金属粉末的压缩体和金属粉末的烧结压缩体的组中的一个施加到工作电极; 执行放电沉积,通过施加作为放电沉积的工件的被检体,将来自工作电极的第一涂层沉积在被检体上; 执行放电沉积,通过施加作为放电沉积的工件的被检体,在第一涂层上从工作电极沉积第二涂层; 以及从真空,空气和氧化气氛组中选择的一个体中加热被检体,从而至少部分地致密化第二涂层或氧化第二涂层以产生固体润滑剂物质。