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1. 发明授权

US10578560B2 Inspection apparatus and method for detecting false defects 有权
公开(公告)号：US10578560B2
公开(公告)日：2020-03-03
申请号：US13440080
申请日：2012-04-05
申请人： Hiroteru Akiyama , Ikunao Isomura
发明人： Hiroteru Akiyama , Ikunao Isomura
IPC分类号： H04N7/18 , G01N21/956
摘要： An inspection apparatus and method comprising a unit for acquiring an optical image of an object to be inspected by irradiating the object with light, wherein the unit includes a line sensor comprising a plurality of sensors linearly arranged in a row, a generating unit for generating a reference image from design data of the object to be inspected, a comparing unit for comparing the optical image with the reference image, a unit for storing data of three lines acquired by the line sensor, and calculating differences between a gradation value of a pixel on a center line and each gradation value of the eight pixels adjacent to the pixel determining if the pixel is a defect if all of the eight differences of the adjacent pixels are more than a predetermined threshold.

2. 发明授权

US08755599B2 Review apparatus and inspection system 有权
标题翻译：检查仪器和检查系统
公开(公告)号：US08755599B2
公开(公告)日：2014-06-17
申请号：US12902622
申请日：2010-10-12
申请人： Hiroteru Akiyama
发明人： Hiroteru Akiyama
IPC分类号： G06K9/62 , G06K9/00
CPC分类号： G06T5/009 , G03F1/84 , G06T5/50 , G06T7/001 , G06T2207/10024 , G06T2207/30148
摘要： A review apparatus comprises: means for acquiring a reference image and an optical image by associating the data of the reference image and the data of the optical image with the gradation values defined by a color palette selected from among a plurality of first color palettes; and means for acquiring a comparison image by associating comparison image data that can be acquired from the reference image data and the optical image data with the gradation values defined by a color palette selected from among a plurality of second color palettes. Gradation values for the comparison image data are represented by gradation values for the reference image data and gradation values for the optical image data.
摘要翻译：检查装置包括：用于通过将参考图像的数据和光学图像的数据与由多个第一调色板中选择的调色板定义的灰度值相关联来获取参考图像和光学图像的装置; 以及用于通过将可从参考图像数据获得的比较图像数据和光学图像数据与从多个第二调色板中选择的调色板定义的灰度值相关联来获取比较图像的装置。用于比较图像数据的灰度值由参考图像数据的灰度值和光学图像数据的灰度值表示。

3. 发明申请

US20120307043A1 INSPECTION APPARATUS AND METHOD 审中-公开
标题翻译：检查装置和方法
公开(公告)号：US20120307043A1
公开(公告)日：2012-12-06
申请号：US13440080
申请日：2012-04-05
申请人： Hiroteru AKIYAMA , Ikunao Isomura
发明人： Hiroteru AKIYAMA , Ikunao Isomura
IPC分类号： H04N7/18
CPC分类号： G01N21/95607 , G01N2021/95615
摘要： An inspection apparatus and method comprising a unit for acquiring an optical image of an object to be inspected by irradiating the object with light, wherein the unit includes a line sensor comprising a plurality of sensors linearly arranged in a row, a generating unit for generating a reference image from design data of the object to be inspected, a comparing unit for comparing the optical image with the reference image, a unit for storing data of three lines acquired by the line sensor, and calculating differences between a gradation value of a pixel on a center line and each gradation value of the eight pixels adjacent to the pixel determining if the pixel is a defect if all of the eight differences of the adjacent pixels are more than a predetermined threshold.
摘要翻译：一种检查装置和方法，包括：用于通过用光照射所述物体来获取待检查物体的光学图像的单元，其中所述单元包括线阵列，所述线传感器包括以行直线排列的多个传感器;生成单元，参考图像，用于将光学图像与参考图像进行比较，比较单元，用于存储由线传感器获取的三条线的数据，以及计算像素的灰度值之间的差异中心线和与像素相邻的八个像素的每个灰度值，如果相邻像素的所有八个差都超过预定阈值，则确定像素是否是缺陷。

4. 发明申请

US20110091099A1 REVIEW APPARATUS AND INSPECTION SYSTEM 有权
标题翻译：检查装置和检查系统
公开(公告)号：US20110091099A1
公开(公告)日：2011-04-21
申请号：US12902622
申请日：2010-10-12
申请人： Hiroteru AKIYAMA
发明人： Hiroteru AKIYAMA
IPC分类号： G06K9/00
CPC分类号： G06T5/009 , G03F1/84 , G06T5/50 , G06T7/001 , G06T2207/10024 , G06T2207/30148
摘要： A review apparatus comprises: means for acquiring a reference image and an optical image by associating the data of the reference image and the data of the optical image with the gradation values defined by a color palette selected from among a plurality of first color palettes; and means for acquiring a comparison image by associating comparison image data that can be acquired from the reference image data and the optical image data with the gradation values defined by a color palette selected from among a plurality of second color palettes. Gradation values for the comparison image data are represented by gradation values for the reference image data and gradation values for the optical image data.
摘要翻译：检查装置包括：用于通过将参考图像的数据和光学图像的数据与由多个第一调色板中选择的调色板定义的灰度值相关联来获取参考图像和光学图像的装置; 以及用于通过将可从参考图像数据获得的比较图像数据和光学图像数据与从多个第二调色板中选择的调色板定义的灰度值相关联来获取比较图像的装置。用于比较图像数据的灰度值由参考图像数据的灰度值和光学图像数据的灰度值表示。

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