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1. 发明授权

US07796368B2 High-frequency power supply system 有权
标题翻译：高频电源系统
公开(公告)号：US07796368B2
公开(公告)日：2010-09-14
申请号：US10580815
申请日：2004-11-26
申请人： Hiroyuki Kotani , Hirotaki Takei , Yoshifumi Ibuki , Hiroaki Oichi
发明人： Hiroyuki Kotani , Hirotaki Takei , Yoshifumi Ibuki , Hiroaki Oichi
IPC分类号： H02H3/00
CPC分类号： H01J37/32174 , H01J37/32935 , H03H7/40 , H05H1/46
摘要： A high-frequency power supply system includes an anomaly detector 3 which detects an anomaly occurring in a circuit on the side of a load L as from an outputting end A of a high-frequency power source 1. The anomaly detector 3 includes a first detector 21 which detects a voltage value Vf of a high-frequency forward wave, a second detector 22 which detects a voltage value Vr of a high-frequency reflected wave, a reflection coefficient calculator 23 and a differentiator 24 which calculate a reflection coefficient differential value dΓ/dt from the forward wave voltage value Vf and the reflected wave voltage value Vr, and an anomaly determiner 25 which determines of an occurrence of an anomaly based on the reflection coefficient differential value dΓ/dt. When the anomaly detector 3 outputs an anomaly detection signal to the high-frequency power source 1, high-frequency power source 1 stops its power output operation.
摘要翻译：高频电源系统包括异常检测器3，其从高频电源1的输出端A检测在负载L侧的电路中发生的异常。异常检测器3包括第一检测器 21检测高频正向波的电压值Vf，检测高频反射波的电压值Vr的第二检测器22，计算反射系数微分值d＆Ggr的反射系数计算器23和微分器24 ; / dt和反射波电压值Vr，以及基于反射系数微分值d＆Ggr; / dt确定异常的发生的异常判定器25。当异常检测器3向高频电源1输出异常检测信号时，高频电源1停止其电力输出动作。

2. 发明授权

US08134816B2 High-frequency power supply system 有权
标题翻译：高频电源系统
公开(公告)号：US08134816B2
公开(公告)日：2012-03-13
申请号：US12834579
申请日：2010-07-12
申请人： Hiroyuki Kotani , Hirotaki Takei , Yoshifumi Ibuki , Hiroaki Oichi
发明人： Hiroyuki Kotani , Hirotaki Takei , Yoshifumi Ibuki , Hiroaki Oichi
IPC分类号： H02H3/00
CPC分类号： H01J37/32174 , H01J37/32935 , H03H7/40 , H05H1/46
摘要： A high-frequency power supply system includes an anomaly detector 3 which detects an anomaly occurring in a circuit on the side of a load L as from an outputting end A of a high-frequency power source 1. The anomaly detector 3 includes a first detector 21 which detects a voltage value Vf of a high-frequency forward wave, a second detector 22 which detects a voltage value Vr of a high-frequency reflected wave, a reflection coefficient calculator 23 and a differentiator 24 which calculate a reflection coefficient differential value dΓ/dt from the forward wave voltage value Vf and the reflected wave voltage value Vr, and an anomaly determiner 25 which determines of an occurrence of an anomaly based on the reflection coefficient differential value dΓ/dt. When the anomaly detector 3 outputs an anomaly detection signal to the high-frequency power source 1, high-frequency power source 1 stops its power output operation.
摘要翻译：高频电源系统包括异常检测器3，其从高频电源1的输出端A检测在负载L侧的电路中发生的异常。异常检测器3包括第一检测器 21检测高频正向波的电压值Vf，检测高频反射波的电压值Vr的第二检测器22，计算反射系数微分值d＆Ggr的反射系数计算器23和微分器24 ; / dt和反射波电压值Vr，以及基于反射系数微分值d＆Ggr; / dt确定异常的发生的异常判定器25。当异常检测器3向高频电源1输出异常检测信号时，高频电源1停止其电力输出动作。

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