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1. 发明申请

US20090320610A1 FORCE SENSOR 有权
标题翻译：力传感器
公开(公告)号：US20090320610A1
公开(公告)日：2009-12-31
申请号：US12310197
申请日：2007-08-24
申请人： Takeshi Ohsato , Shigenori Yasuie , Yusuke Hirabayashi , Hiroshi Yakobayashi
发明人： Takeshi Ohsato , Shigenori Yasuie , Yusuke Hirabayashi , Hiroshi Yakobayashi
IPC分类号： G01L5/16 , G01R3/00
CPC分类号： G01L5/162 , G01L1/18 , G01L1/2231 , Y10T29/49002 , Y10T29/49082 , Y10T29/49103
摘要： A force sensor 1 includes: a force sensor chip 2 including an action portion 21, a connecting portion 23 on which strain resistive elements are disposed, and a support portion 22 for supporting the action portion 21 and the connecting portion 23; an attenuator 3 including an input portion 30 to which an external force is input, a fixing portion 32 for fixing the force sensor chip 2, and a transmission portion 31 for attenuating the external force and transmitting the attenuated external force to the action portion 21; a first glass member 11 disposed between the action portion 21 and the transmission portion 31 and a second glass member 12 disposed between the support portion 22 and the fixing portion 32, through which glass members 11, 12 the force sensor chip 2 and the attenuator 3 are joined. A single or more glass beams 13 joins the first glass member 11 and the second glass member 12 together as a single member.
摘要翻译：力传感器1包括：力传感器芯片2，包括作用部分21，其上设置有应变电阻元件的连接部分23和用于支撑作用部分21和连接部分23的支撑部分22; 包括输入部分30的衰减器3，用于固定力传感器芯片2的固定部分32，以及用于衰减外力并将衰减的外力传递到动作部分21的传输部分31; 布置在动作部分21和传动部分31之间的第一玻璃部件11和设置在支撑部分22和固定部分32之间的第二玻璃部件12，玻璃部件11,12，力传感器芯片2和衰减器3 被加入。单个或更多个玻璃梁13将第一玻璃构件11和第二玻璃构件12连接在一起作为单个构件。

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