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1. 发明申请

US20070115788A1 Information recording apparatus and method for recording information and information recording medium 失效
标题翻译：用于记录信息和信息记录介质的信息记录装置和方法
公开(公告)号：US20070115788A1
公开(公告)日：2007-05-24
申请号：US11652676
申请日：2007-01-12
申请人： Osamu Kumasaka , Masaki Kobayashi , Hiroki Kaneda , Masami Sone , Kenji Kamimura , Kazumi Kuriyama
发明人： Osamu Kumasaka , Masaki Kobayashi , Hiroki Kaneda , Masami Sone , Kenji Kamimura , Kazumi Kuriyama
IPC分类号： G11B7/00 , G11B19/00
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , G11B7/261
摘要： An information recording apparatus for recording tracks includes: a rotation drive section (RDS) that supports and rotates a master disk with a resist layer; an exposure beam emitting section (EBES) deflectably applying an exposure beam to the disk to form a spot thereon; a relative movement drive section (RMDS) translating the RDS relatively to the spot in a radial direction of the disk; an emission controller supplying the EBES with an instruction for modulating an intensity of the exposure beam according to data to be recorded; and a movement controller supplying the RMDS with an instruction for moving the RDS with the rotating disk by a predetermined moving amount for each disk rotation. The apparatus also includes a deflection controller supplying the EBES with instructions for deflection operations for deflecting the exposure beam in a manner that the spot is successively moved from a first exposure start position in either the opposite or the same direction to a moving direction of the RDS and then, at a point in time when the spot has moved up to an exposure stop position of the disk in predetermined rotation thereof, the spot is intermittently moved to a second exposure start position in the moving direction of the RDS, and wherein the spot is periodically returned to the first exposure start position.
摘要翻译：用于记录轨道的信息记录装置包括：支撑并旋转具有抗蚀剂层的母盘的旋转驱动部分（RDS）; 曝光光束发射部分（EBES），其可偏转地将曝光光束施加到盘上以在其上形成点; 相对运动驱动部分（RMDS），其相对于盘的径向方向上的点平移RDS; 向EBES提供根据要记录的数据调制曝光光束的强度的指令的发射控制器; 以及运动控制器，为RMDS提供用于将每个盘旋转的旋转盘移动RDS的预定移动量的指令。该设备还包括偏转控制器，为EBES提供用于偏转操作的指令，以使曝光光束以使得光点从与RDS的移动方向相反或相同方向上的第一曝光开始位置连续移动的方式然后，在点已经以规定的旋转移动到盘的曝光停止位置的时间点，间隔地移动到RDS的移动方向上的第二曝光开始位置，并且其中点定期地返回到第一曝光开始位置。

2. 发明授权

US07336585B2 Information recording apparatus and method for recording information and information recording medium 失效
标题翻译：用于记录信息和信息记录介质的信息记录装置和方法
公开(公告)号：US07336585B2
公开(公告)日：2008-02-26
申请号：US11652676
申请日：2007-01-12
申请人： Osamu Kumasaka , Masaki Kobayashi , Hiroki Kaneda , Masami Sone , Kenji Kamimura , Kazumi Kuriyama
发明人： Osamu Kumasaka , Masaki Kobayashi , Hiroki Kaneda , Masami Sone , Kenji Kamimura , Kazumi Kuriyama
IPC分类号： G11B7/26
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , G11B7/261
摘要： An information recording apparatus for recording tracks includes: a rotation drive section (RDS) that supports and rotates a master disk with a resist layer; an exposure beam emitting section (EBES) deflectably applying an exposure beam to the disk to form a spot thereon; a relative movement drive section (RMDS) translating the RDS relatively to the spot in a radial direction of the disk; an emission controller supplying the EBES with an instruction for modulating an intensity of the exposure beam according to data to be recorded; and a movement controller supplying the RMDS with an instruction for moving the RDS with the rotating disk by a predetermined moving amount for each disk rotation. The apparatus also includes a deflection controller supplying the EBES with instructions for deflection operations for deflecting the exposure beam in a manner that the spot is successively moved from a first exposure start position in either the opposite or the same direction to a moving direction of the RDS and then, at a point in time when the spot has moved up to an exposure stop position of the disk in predetermined rotation thereof, the spot is intermittently moved to a second exposure start position in the moving direction of the RDS, and wherein the spot is periodically returned to the first exposure start position.
摘要翻译：用于记录轨道的信息记录装置包括：支撑并旋转具有抗蚀剂层的母盘的旋转驱动部分（RDS）; 曝光光束发射部分（EBES），其可偏转地将曝光光束施加到盘上以在其上形成点; 相对运动驱动部分（RMDS），其相对于盘的径向方向上的点平移RDS; 向EBES提供根据要记录的数据调制曝光光束的强度的指令的发射控制器; 以及运动控制器，为RMDS提供用于将每个盘旋转的旋转盘移动RDS的预定移动量的指令。该设备还包括偏转控制器，为EBES提供用于偏转操作的指令，以使曝光光束以使得光点从与RDS的移动方向相反或相同方向上的第一曝光开始位置连续移动的方式然后，在点已经以规定的旋转移动到盘的曝光停止位置的时间点，间隔地移动到RDS的移动方向上的第二曝光开始位置，并且其中点定期地返回到第一曝光开始位置。

3. 发明授权

US07203144B2 Information recording apparatus and method for recording information patterns with a deflecting beam irradiated to a recording medium 失效
标题翻译：用于记录具有照射到记录介质的偏转光束的信息图案的信息记录装置和方法
公开(公告)号：US07203144B2
公开(公告)日：2007-04-10
申请号：US10165953
申请日：2002-06-11
申请人： Osamu Kumasaka , Masaki Kobayashi , Hiroki Kaneda , Masami Sone , Kenji Kamimura , Kazumi Kuriyama
发明人： Osamu Kumasaka , Masaki Kobayashi , Hiroki Kaneda , Masami Sone , Kenji Kamimura , Kazumi Kuriyama
IPC分类号： G11B7/26
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , G11B7/261
摘要： An information recording apparatus for recording tracks includes: a rotation drive section (RDS) that supports and rotates a master disk with a resist layer; an exposure beam emitting section (EBES) deflectably applying an exposure beam to the disk to form a spot thereon; a relative movement drive section (RMDS) translating the RDS relatively to the spot in a radial direction of the disk; an emission controller supplying the EBES with an instruction for modulating an intensity of the exposure beam according to data to be recorded; and a movement controller supplying the RMDS with an instruction for moving the RDS with the rotating disk by a predetermined moving amount for each disk rotation.
摘要翻译：用于记录轨道的信息记录装置包括：支撑并旋转具有抗蚀剂层的母盘的旋转驱动部分（RDS）; 曝光光束发射部分（EBES），其可偏转地将曝光光束施加到盘上以在其上形成点; 相对运动驱动部分（RMDS），其相对于盘的径向方向上的点平移RDS; 向EBES提供根据要记录的数据调制曝光光束的强度的指令的发射控制器; 以及运动控制器，为RMDS提供用于将每个盘旋转的旋转盘移动RDS的预定移动量的指令。

4. 发明授权

US06686597B2 Substrate rotating device, and manufacturing method and apparatus of recording medium master 失效
标题翻译：基板旋转装置，以及记录介质主机的制造方法和装置
公开(公告)号：US06686597B2
公开(公告)日：2004-02-03
申请号：US09942982
申请日：2001-08-31
申请人： Osamu Kumasaka , Kazumi Kuriyama , Hiroki Kaneda , Masami Sone , Kenji Kamimura , Takeharu Iwata , Masaki Kobayashi
发明人： Osamu Kumasaka , Kazumi Kuriyama , Hiroki Kaneda , Masami Sone , Kenji Kamimura , Takeharu Iwata , Masaki Kobayashi
IPC分类号： C23F100
CPC分类号： F16C32/06 , B23Q1/38 , B23Q7/02 , B82Y10/00 , B82Y40/00 , F16C2322/39 , G11B7/26 , G11B7/261 , H01J37/3174 , H01J2237/31735 , H01L21/67242 , H01L21/6831
摘要： A master disc manufacturing apparatus includes an electron-beam emitting portion for emitting an electron beam, an electron-beam converging portion for converging an electron beam, a retarding voltage applying portion for applying a substrate with a negative potential having a magnitude of decelerating the electron beam, and a vacuum atmosphere producing portion for evacuating a chamber to produce a vacuum atmosphere therein.
摘要翻译：母盘制造装置包括用于发射电子束的电子束发射部分，用于会聚电子束的电子束会聚部分，用于施加具有使电子减速大小的负电位的衬底的延迟电压施加部分以及用于抽空室以在其中产生真空气氛的真空气氛产生部分。

5. 发明授权

US06650611B1 Master disc manufacturing apparatus 失效
标题翻译：主盘制造装置
公开(公告)号：US06650611B1
公开(公告)日：2003-11-18
申请号：US09950015
申请日：2001-09-12
申请人： Kenji Kamimura , Kazumi Kuriyama , Osamu Kumasaka , Hiroki Kaneda , Masami Sone , Takeharu Iwata , Masaki Kobayashi
发明人： Kenji Kamimura , Kazumi Kuriyama , Osamu Kumasaka , Hiroki Kaneda , Masami Sone , Takeharu Iwata , Masaki Kobayashi
IPC分类号： G11B700
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , G11B7/26 , G11B7/261 , H01J37/304 , H01J2237/3045 , H01J2237/3175
摘要： An apparatus of manufacturing a master by irradiating an electron beam on a substrate mounted on a turntable includes a rotation drive section for rotating the turntable; first and second correction-signal generating sections for respectively detecting first and second asynchronous components of rotational fluctuation of the turntable in a predetermined direction and in a direction perpendicular to the predetermined direction to generate first and second correction signals; and a deflection control section for controlling the electron beam deflection on the basis of the first and second correction signals.
摘要翻译：通过在安装在转台上的基板上照射电子束来制造主机的装置包括：用于旋转转盘的旋转驱动部; 第一和第二校正信号产生部分，用于分别在预定方向和垂直于预定方向的方向上检测转台的旋转波动的第一和第二异步分量，以产生第一和第二校正信号; 以及偏转控制部分，用于根据第一和第二校正信号控制电子束偏转。

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