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1. 发明申请

US20100066251A1 PLASMA PROCESSING APPARATUS 有权
标题翻译：等离子体加工设备
公开(公告)号：US20100066251A1
公开(公告)日：2010-03-18
申请号：US12447384
申请日：2007-11-21
申请人： Shinji Nakagami , Hirohiko Nakano
发明人： Shinji Nakagami , Hirohiko Nakano
IPC分类号： H05H1/46
CPC分类号： H01J37/321 , H01J37/32174
摘要： An induction coil composed of n pieces of identically shaped coil elements (where n is equal to or greater than two), which are rotation-symmetrically arranged with respect to an axis normal to the surface of an object to be processed, is provided above the object, the coil elements being electrically connected in parallel. Each of the coil elements of the induction coil encircles the aforementioned axis, with the ground end and the feed end located at the same position on a projection plane on the object with the ground end under the feed end. Each coil element has a bottom portion shaped like an arc having a predetermined width and a central angle of 360°/n, with the ground end at one end thereof, and a feed portion shaped like an arc having a predetermined width, with the feed end at one end thereof, the feed portion being located above the bottom portion and electrically connected to the same bottom portion. It is also possible to assemble a plurality of coil elements so that the ground end of each coil element is located immediately below the feed end of another coil element.
摘要翻译：由n个相同形状的线圈元件（其中n等于或大于2个）组成的感应线圈在相对于垂直于待处理物体的表面的轴线旋转对称地设置在物体，线圈元件并联电连接。感应线圈的每个线圈元件围绕上述轴线，接地端和馈电端位于物体上的投影平面上的相同位置，接地端在馈送端下方。每个线圈元件具有形状为具有预定宽度和360°/ n的中心角的弧形的底部，其一端的接地端和具有预定宽度的具有预定宽度的弧形的馈电部分在其一端端部，所述进给部分位于所述底部的上方并电连接到所述底部。也可以组装多个线圈元件，使得每个线圈元件的接地端位于另一个线圈元件的馈电端的正下方。

2. 发明授权

US08314560B2 Plasma processing apparatus 有权
标题翻译：等离子体处理装置
公开(公告)号：US08314560B2
公开(公告)日：2012-11-20
申请号：US12447384
申请日：2007-11-21
申请人： Shinji Nakagami , Hirohiko Nakano
发明人： Shinji Nakagami , Hirohiko Nakano
IPC分类号： H05B31/26
CPC分类号： H01J37/321 , H01J37/32174
摘要： An induction coil composed of n pieces of identically shaped coil elements (where n is equal to or greater than two), which are rotation-symmetrically arranged with respect to an axis normal to the surface of an object to be processed, is provided above the object, the coil elements being electrically connected in parallel. Each of the coil elements of the induction coil encircles the aforementioned axis, with the ground end and the feed end located at the same position on a projection plane on the object with the ground end under the feed end. Each coil element has a bottom portion shaped like an arc having a predetermined width and a central angle of 360°/n, with the ground end at one end thereof, and a feed portion shaped like an arc having a predetermined width, with the feed end at one end thereof, the feed portion being located above the bottom portion and electrically connected to the same bottom portion. It is also possible to assemble a plurality of coil elements so that the ground end of each coil element is located immediately below the feed end of another coil element.
摘要翻译：由n个相同形状的线圈元件（其中n等于或大于2个）组成的感应线圈在相对于垂直于待处理物体的表面的轴线旋转对称地设置在物体，线圈元件并联电连接。感应线圈的每个线圈元件围绕上述轴线，接地端和馈电端位于物体上的投影平面上的相同位置，接地端在馈送端下方。每个线圈元件具有形状为具有预定宽度和360°/ n的中心角的弧形的底部，其一端的接地端和具有预定宽度的具有预定宽度的弧形的馈电部分在其一端端部，所述进给部分位于所述底部的上方并电连接到所述底部。也可以组装多个线圈元件，使得每个线圈元件的接地端位于另一个线圈元件的馈电端的正下方。

3. 发明授权

US5559984A Distributed file system permitting each user to enhance cache hit ratio in file access mode 失效
标题翻译：分布式文件系统允许每个用户在文件访问模式下提高缓存命中率
公开(公告)号：US5559984A
公开(公告)日：1996-09-24
申请号：US313844
申请日：1994-09-28
申请人： Hirohiko Nakano , Seiichi Domyo , Takaki Kuroda , Naofumi Shouji , Atsushi Kobayashi
发明人： Hirohiko Nakano , Seiichi Domyo , Takaki Kuroda , Naofumi Shouji , Atsushi Kobayashi
IPC分类号： G06F12/00 , G06F12/08 , G06F12/12 , G06F13/00 , G06F12/02 , G06F15/177
CPC分类号： G06F12/122 , G06F12/0866 , Y10S707/99932
摘要： A distributed file system in which the cache hit ratio of a client is enhanced to speed up a file access for each of users logging into the client. A file server includes an access frequency database in which the names of users are listed in association with the names of files that are frequently accessed by the individual users. Each client includes a log-in user table for entering the name of a user who is logging in, and a cache priority control module. The cache priority control module sets priority levels for the copies of the files stored in a cache area, on the basis of the contents of the access frequency database and the log-in user table. The set priority levels function as criteria when any of the file copies is to be expelled from the cache area. Owing to this construction, the copies of the files of high usage frequencies are preferentially kept in the cache area of the client for each user logging into this client, whereby the cache hit ratio can be enhanced to speed up the file access.
摘要翻译：分发文件系统，其中客户端的高速缓存命中率被增强以加速登录到客户端的每个用户的文件访问。文件服务器包括访问频率数据库，其中列出与用户个体经常访问的文件的名称相关联的用户名。每个客户端包括用于输入正在登录的用户的名称的登录用户表和缓存优先级控制模块。高速缓存优先级控制模块基于访问频率数据库和登录用户表的内容来设置存储在高速缓存区域中的文件的副本的优先级。当任何文件副本将从高速缓存区域中排出时，设置的优先级级别将用作标准。由于这种结构，对于登录到该客户端的每个用户，优先将高使用频率的文件的副本保存在客户端的高速缓存区域中，由此可以增强高速缓存命中率以加速文件访问。

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