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    • 1. 发明授权
    • Apparatus for treating surface of boards
    • 用于处理板表面的设备
    • US06302600B1
    • 2001-10-16
    • US09577045
    • 2000-05-24
    • Hideo NagaseShu OgawaKiyoshi KamibayashiMakoto KikukawaTakahiro HouzanToshimoto NakagawaMitsumoto Nakagawa
    • Hideo NagaseShu OgawaKiyoshi KamibayashiMakoto KikukawaTakahiro HouzanToshimoto NakagawaMitsumoto Nakagawa
    • G03D500
    • G03D5/04G03F7/3071G03F7/3092G03F7/422
    • The apparatus for treating surface of boards includes treating means for treating surface of boards by supplying sequentially a treating solution and a rinse liquid on boards placed on a treating table; solution collecting means for collecting waste treating solution separately from waste rinse liquid; waste solution storing, concentrating detecting and solution supplementing means for storing the waste treating solution, detecting the concentration of at least one ingredient in the waste treating solution by an electric conductivity meter and/or an absorption photometer, supplementing treating solution for adjusting containing necessary ingredients depending on the detected value, and adjusting the treating solution; and treating solution feed means for feeding the adjusted treating solution into the treating means. By thus constructing, the treating solution can be recycled, and if recycling is repeated, the performance of the treating solution itself can be maintained.
    • 用于处理板表面的设备包括处理装置,用于通过在放置在处理台上的板上依次提供处理溶液和冲洗液来处理板的表面; 用于从废液冲洗液中分离收集废物处理液的溶液收集装置; 用于存储废物处理溶液的废液储存,浓缩检测和溶液补充装置,通过电导率计和/或吸收光度计检测废物处理溶液中至少一种成分的浓度,补充处理溶液以调节含有必需成分 取决于检测值,并调整处理液; 以及处理溶液进料装置,用于将经调节的处理溶液进料到处理装置中。 通过这样构成,处理溶液可以再循环,如果重复循环,则可以维持处理液本身的性能。