会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 7. 发明授权
    • Process and device for coating the inner surface of greatly arched,
essentially dome-shaped substrates by CVD
    • 用于通过CVD涂覆大拱形的,基本上圆顶形的衬底的内表面的工艺和装置
    • US5503677A
    • 1996-04-02
    • US340910
    • 1994-11-15
    • Ewald MorsenHelge VogtJohannes Segner
    • Ewald MorsenHelge VogtJohannes Segner
    • C23C16/44C03C17/00C23C16/04C23C16/455C23C16/50C23C16/511C23C16/515C23C16/00
    • C23C16/455C03C17/004C23C16/045
    • A process and a device for coating the inner surface of a greatly arched, essentially dome-shaped substrate by CVD are described. In the process, the reaction gases, which contain the layer-former molecules, are conveyed into the reaction chamber containing the substrate(s) to be coated, through at least one gas inlet, placed facing the vertex of the dome at a distance from the surface to be coated. Deposition of the layer material on the substrate is brought about in a way known in the art by producing a reaction zone on the inner surface of the substrate to be coated. According to the invention, the reaction gases do not, as is usual for known processes, flow slowly into the reaction chamber. Instead, for production of a uniform coating, the reaction gases are introduced into the reaction chamber at a high speed such that the product of Reynolds number, R, of the gas jet in or in the immediate vicinity of the gas inlet and the distance, h, between the gas inlet and the dome vertex is:400
    • 描述了通过CVD涂覆大拱形基本圆顶形基底的内表面的方法和装置。 在此过程中,将包含成层分子的反应气体通过至少一个气体入口输送到含有待涂覆的基材的反应室中,该入口面向圆顶顶点放置一定距离 待涂层的表面。 通过在待涂覆的基材的内表面上产生反应区,以本领域已知的方式使层材料沉积在基材上。 根据本发明,如已知方法通常,反应气体不会缓慢地流入反应室。 相反,为了生产均匀的涂层,反应气体以高速被引入反应室,使得在气体入口处或其附近的气体射流的雷诺数R的乘积和距离, h,气体入口和圆顶顶点之间为:400