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    • 5. 发明申请
    • METHOD OF MANUFACTURING CERAMIC PROBE CARD
    • 制造陶瓷探针卡的方法
    • US20100032407A1
    • 2010-02-11
    • US12397923
    • 2009-03-04
    • Ho Joon ParkByeung Gyu ChangHee Ju SonSang Jin Kim
    • Ho Joon ParkByeung Gyu ChangHee Ju SonSang Jin Kim
    • B44C1/22
    • G01R3/00G01R1/06727
    • Provided is a method of manufacturing a ceramic probe card. A ceramic laminated body having a plurality of ceramic green sheets and an interlayer circuit including a conductive via and a conductive line formed in the plurality of ceramic green sheets is prepared. Then, at least one probe pin structure connected to the interlayer circuit is formed by selectively removing the plurality of photosensitive ceramic sheets having a ceramic powder and a photosensitive organic component on the ceramic laminated body necessarily, and by filling a metal material in a region from which the plurality of photosensitive ceramic sheets have been removed. Then, a ceramic substrate having the at least one probe pin structure is provided by simultaneously firing the ceramic laminated body and the photosensitive ceramic sheets, and by removing the photosensitive ceramic sheets.
    • 提供一种制造陶瓷探针卡的方法。 制备具有多个陶瓷生片的陶瓷层叠体和形成在多个陶瓷生片中的导电通孔和导电线的层间电路。 然后,通过在陶瓷层叠体上选择性地除去多个具有陶瓷粉末和感光性有机成分的感光陶瓷片而形成与层间电路连接的至少一个探针插脚结构,并且通过在 多个感光陶瓷片已被去除。 然后,通过同时烧制陶瓷层叠体和感光陶瓷片,并且通过除去感光陶瓷片来提供具有至少一个探针引脚结构的陶瓷基片。
    • 9. 发明申请
    • METHOD OF FABRICATING PROBE PIN FOR PROBE CARD
    • 用于制作探针卡的探针的方法
    • US20100116676A1
    • 2010-05-13
    • US12502652
    • 2009-07-14
    • Sang Jin KimByeung Gyu ChangHee Ju SonHo Joon Park
    • Sang Jin KimByeung Gyu ChangHee Ju SonHo Joon Park
    • C25D5/02
    • C25D1/00C25D1/003C25D1/10
    • Provided is a method of fabricating a probe pin. In the method, a concave region for a probe pin is formed on a mold substrate. The surface roughness of the concave region is reduced to smooth the surface of the concave region. A release layer is formed on the surface of the concave region of the mold substrate. A plating process is performed to form a probe pin corresponding to the concave region. After the performing of the plating process, the mold substrate having the probe pin is disposed on a circuit substrate and the probe pin is connected to a desired portion of the circuit substrate. Thereafter, the mold substrate is separated from the probe pin in such a way that the mold substrate remains unchanged. Also, the separated mold substrate may be reused.
    • 提供了一种制造探针的方法。 在该方法中,在模具基板上形成用于探针的凹部。 凹区域的表面粗糙度减小以使凹面的表面平滑。 剥离层形成在模具基板的凹部的表面上。 进行电镀处理以形成与凹区对应的探针。 在进行电镀处理之后,具有探针的模具基板设置在电路基板上,探针连接到电路基板的期望部分。 此后,将模具基板与探针分离,使得模具基板保持不变。 而且,分离的模具基板可以重复使用。