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    • 3. 发明授权
    • Method and circuit for measuring and displaying physical values
    • 测量和显示物理值的方法和电路
    • US4794330A
    • 1988-12-27
    • US010423
    • 1987-02-03
    • Hans-Hermann KleinZoltan Szocs
    • Hans-Hermann KleinZoltan Szocs
    • G01D3/02G01R15/00G01R17/04
    • G01D3/022G01R15/005
    • A method and circuit for measuring and displaying a parameter, in which the parameter is sensed by means of a sensor which supplies an output voltage representative of the value of the parameter, the output voltage is compared with a comparison voltage associated with the sensor response characteristic, and a display is produced on the basis of the result of the comparing step. The comparison is effected by supplying the output voltage from the sensor to a first input of a comparator, supplying the comparison voltage to a second input of the comparator, and varying the comparison voltage between successive values extending over the output voltage range of the sensor. The display is produced by providing a succession of parameter value signals each associated with a respective comparison voltage value, supplying each parameter value signal to a latch device in synchronism with occurrence of the associated comparison voltage value, and conducting to a display device from the latch device the parameter value signal which is associated with the comparison voltage value that corresponds to the output voltage value of the sensor.
    • 一种用于测量和显示参数的方法和电路,其中通过提供表示参数值的输出电压的传感器来感测参数,将输出电压与与传感器响应特性相关联的比较电压进行比较 并且基于比较步骤的结果产生显示。 比较通过将来自传感器的输出电压提供给比较器的第一输入端,将比较电压提供给比较器的第二输入端,并且改变在传感器的输出电压范围上延伸的连续值之间的比较电压。 显示是通过提供一系列参数值信号产生的,每个参数值信号与相应的比较电压值相关联,将每个参数值信号与相关联的比较电压值的出现同步地提供给锁存器件,并且从锁存器 设置与与传感器的输出电压值对应的比较电压值相关联的参数值信号。
    • 5. 发明授权
    • Cryopump and process for regenerating said cryopump
    • 冷冻库和用于再生所述低温泵的过程
    • US5400604A
    • 1995-03-28
    • US64050
    • 1993-05-18
    • Hans-Ulrich HafnerHans-Jurgen MundingerGerd FlickHans-Joachim ForthHans-Hermann KleinUwe Timm
    • Hans-Ulrich HafnerHans-Jurgen MundingerGerd FlickHans-Joachim ForthHans-Hermann KleinUwe Timm
    • F04B37/08B01D8/00
    • F04B37/08Y10S417/901
    • The invention relates to a process for regenerating a cryopump (1) that is equipped with an inlet valve (33), with cold surfaces (6, 8, 11) which have a temperature during operation of the pump that effects the condensation and/or adsorption of gases and which are heated for the purpose of regenerating them, the cryopump further including a backing pump (45) that is connected with the pump interior (9) by way of a valve (44). In this process, heating of the cold surfaces begins if the inlet valve (33) is closed and the connection between the pump interior (9) and the connected backing pump (45) is blocked so that, in addition to the temperature of the cold surfaces, the pressure in the pump interior also rises to values that lie above the corresponding values of the triple point of the gas to be removed. The removal of the precipitates released from the cold surfaces is effected in liquid and/or gaseous form through a conduit (46) equipped with a regeneration valve (47) that is actuated as a function of the pressure in the pump interior (9).
    • PCT No.PCT / EP91 / 01713 Sec。 371日期:1993年5月18日 102(e)日期1993年5月18日PCT 1991年9月10日PCT PCT。 公开号WO92 / 08894 本发明涉及一种用于再生低温泵(1)的方法,该低温泵配备有入口阀(33),冷却表面(6,8,11)在泵的操作期间具有温度, 影响气体的冷凝和/或吸附并被加热以再生它们,低温泵还包括通过阀(44)与泵内部(9)连接的背衬泵(45)。 在该过程中,如果入口阀(33)关闭并且泵内部(9)和连接的背衬泵(45)之间的连接被阻塞,则开始冷表面的加热,使得除了冷的温度 表面,泵内部的压力也上升到高于要去除的气体的三重点的对应值的值。 从冷表面释放的沉淀物的去除通过配备有作为泵内部(9)中的压力的​​函数致动的再生阀(47)的导管(46)而以液体和/或气体形式进行。
    • 6. 发明授权
    • Two-stage cryopump
    • 两级CRYOPUMP
    • US5111667A
    • 1992-05-12
    • US663130
    • 1991-03-04
    • Hans-Ulrich HafnerHans-Hermann KleinUwe Timm
    • Hans-Ulrich HafnerHans-Hermann KleinUwe Timm
    • F04B37/08F25B9/14F25D19/00
    • F25D19/006F04B37/08F25B9/14Y10S417/901
    • A two-stage cryopump having a refrigerator including a first stage and a second stage being colder than the first stage; a condensation member having a condensation surface; a first coupler for connecting the condensation member to the second stage in a thermally conducting manner; an adsorption member having an adsorption surface and being spaced from the condensation member; and a second coupler for connecting the adsorption member to the second stage in a heat conducting manner. There is further provided a heater for heating the adsorption member during time periods for regenerating the adsorption member. The second coupler is so designed that it thermally sufficiently insulates the adsorption member from the second stage and from the condensation member at least during heating periods of the adsorption member, for preventing heating the condensation member by the heater.
    • 一种具有第一阶段和第二阶段比第一阶段更冷的冰箱的两级低温泵; 具有冷凝表面的冷凝构件; 第一联接器,用于以导热方式将冷凝构件连接到第二台; 具有吸附表面并与所述冷凝构件间隔开的吸附构件; 以及用于以热传导方式将吸附构件连接到第二阶段的第二联接器。 进一步提供一种用于在用于再生吸附构件的时间段期间加热吸附构件的加热器。 第二联接器被设计成使得其至少在吸附构件的加热期间使吸附构件从第二级和冷凝构件热充分绝热,以防止加热器对冷凝构件进行加热。