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    • 3. 发明授权
    • Laser with optimized coupling of pump light to a gain medium in a
side-pumped geometry
    • 激光器将泵浦光的优化耦合到侧泵抽几何中的增益介质
    • US6157663A
    • 2000-12-05
    • US61796
    • 1998-04-16
    • Xingkun WuJouni P. PartanenWilliam F. HugHamid Hemmati
    • Xingkun WuJouni P. PartanenWilliam F. HugHamid Hemmati
    • H01S3/08H01S3/0941H01S3/109H01S3/091
    • H01S3/0941H01S3/08072H01S3/109
    • A solid-state laser includes a high-absorption coefficient solid-state gain medium such as Nd:YVO.sub.4 that is side pumped with a semiconductor laser diode array. The resonant cavity of the solid-state laser is positioned so that the TEM.sub.00 mode is spaced from the face of the laser through which the laser is pumped by a distance sufficient to reduce diffraction losses but sufficiently near to allow coupling of pump light into the gain mode. The gain medium, the doping level of the gain medium, and the operating temperature of the pump laser are selected to efficiently couple pump light into the gain mode. The pump laser is positioned to side pump the gain medium without collimating or focusing optics between the pump laser and the face of the gain medium. A gap between the pump laser and the gain medium is empirically selected to match the angular extent of the pump laser output light to the height of the gain mode at the position of the gain mode fixed to optimize coupling and diffraction losses.
    • 固体激光器包括用半导体激光二极管阵列侧泵浦的高吸收系数固态增益介质,例如Nd:YVO4。 固态激光器的谐振腔被定位成使得TEM00模式与激光器的表面间隔开,激光器的表面通过激光​​器泵浦足够的距离来减少衍射损耗,但足够接近以允许将泵浦光耦合到增益 模式。 选择增益介质,增益介质的掺杂水平和泵激光器的工作温度以有效地将泵浦光耦合到增益模式。 泵浦激光器定位在侧面泵浦增益介质,而不在泵浦激光器和增益介质的面之间准直或聚焦光学元件。 根据经验选择泵浦激光器和增益介质之间的间隙,以将激光输出光的角度范围与固定增益模式位置处的增益模式的高度相匹配,以优化耦合和衍射损耗。
    • 4. 发明授权
    • Laser with optically driven Q-switch
    • 带光驱Q开关的激光
    • US5408480A
    • 1995-04-18
    • US94332
    • 1993-07-15
    • Hamid Hemmati
    • Hamid Hemmati
    • H01S3/11
    • H01S3/113H01S3/1061
    • An optically driven interactive Q-switch, i.e., a Q-switch that responds to a short pulse of light, for example, from external light-emitting diodes (LEDs) or diode lasers, is provided for producing an output laser pulse from electronic energy stored in a laser medium. Q-switching is thus achieved on demand by electrically pulsing the light source to produce a pulse of light directed onto a Q-switch medium in the laser cavity. Electronic control of the light pulse from the external source will thus provide not only efficient Q-switching frequency but also independent control of output laser pulse width with a fast rise time for each output laser pulse.
    • 提供光驱动的交互式Q开关,即例如从外部发光二极管(LED)或二极管激光器对短脉冲光进行响应的Q开关,用于从电子能量产生输出激光脉冲 存储在激光介质中。 因此,通过电激发光源以产生指向激光腔中的Q开关介质的光脉冲,从而实现Q开关。 因此,来自外部源的光脉冲的电子控制将不仅提供有效的Q开关频率,而且还可以独立控制输出激光脉冲宽度,并为每个输出激光脉冲提供快速上升时间。
    • 5. 发明授权
    • Photoprocessing apparatus including conical reflector
    • 包括圆锥形反射镜的光处理装置
    • US4664057A
    • 1987-05-12
    • US811792
    • 1985-12-20
    • Hamid Hemmati
    • Hamid Hemmati
    • C23C16/48C23C14/00
    • C23C16/482C23C16/483
    • A photoprocessing apparatus for processing substrates includes a chamber for holding the substrates and a light source for providing an electromagnetic beam along an axis. A substantially conical reflector is positioned along the axis of the electromagnetic beam to reflect the electromagnetic beam as a plane of light into the chamber. The substrates are arranged in the chamber with respect to the plane of light reflected by the substantially conical reflector, by being either substantially parallel to or substantially normal to the plane of light. If the substrates are substantially parallel to the plane of light and the chamber is filled with a reaction gas, photo-deposition will occur when the plane of light irradiates the reaction gas adjacent to a substrate, so that a film is deposited on the substrate. Other photoprocessing techniques such as photo-etching can be performed when the substrates are arranged normal to the plane of light.
    • 用于处理衬底的光处理装置包括用于保持衬底的腔室和用于沿轴线提供电磁束的光源。 基本上圆锥形的反射器沿着电磁束的轴线定位,以将电磁波束作为光的平面反射到腔室中。 基板通过基本上平行于或基本上垂直于光平面而相对于由基本上圆锥形的反射器反射的光平面布置在室中。 如果基板基本上平行于光平面并且反应气体充满了室,则当平面光照射到与基板相邻的反应气体时会发生光沉积,从而在基板上沉积膜。 当基板平行于光平面布置时,可以执行诸如光蚀刻的其它光处理技术。
    • 6. 发明授权
    • Laser with absorption optimized pumping of a gain medium
    • 激光与吸收优化泵浦增益介质
    • US06347101B1
    • 2002-02-12
    • US09061797
    • 1998-04-16
    • Xingkun WuJouni P. PartanenWilliam F. HugHamid Hemmati
    • Xingkun WuJouni P. PartanenWilliam F. HugHamid Hemmati
    • H01S3098
    • H01S3/0941B33Y30/00H01S3/08072H01S3/1022H01S3/109
    • A solid state laser includes a high absorption coefficient solid state gain medium such as Nd:YVO4 that is side pumped with a semiconductor laser diode array. The resonant cavity of the solid state laser is positioned so that the TEM00 mode is spaced from the face of the laser through which the laser is pumped by a distance sufficient to reduce diffraction losses but sufficiently near to allow coupling of pump light into the gain mode. The gain medium, the doping level of the gain medium, and the operating temperature of the pump laser are selected to efficiently couple pump light into the gain mode. The pump laser is positioned to side pump the gain medium without collimating or focusing optics between the pump laser and the face of the gain medium. A gap between the pump laser and the gain medium is empirically selected to match the angular extent of the pump laser output light to the height of the gain mode at the position of the gain mode fixed to optimize coupling and diffraction losses.
    • 固态激光器包括用半导体激光二极管阵列侧泵浦的高吸收系数固态增益介质,例如Nd:YVO4。 固态激光器的谐振腔被定位成使得TEM00模式与激光器的表面间隔开,激光器通过该表面泵浦足够的距离以减少衍射损耗,但足够接近以允许将泵浦光耦合到增益模式 。 选择增益介质,增益介质的掺杂水平和泵激光器的工作温度以有效地将泵浦光耦合到增益模式。 泵浦激光器定位在侧面泵浦增益介质,而不在泵浦激光器和增益介质的面之间准直或聚焦光学元件。 根据经验选择泵浦激光器和增益介质之间的间隙,以将激光输出光的角度范围与固定增益模式位置处的增益模式的高度相匹配,以优化耦合和衍射损耗。
    • 7. 发明授权
    • Electric-optic resonant phase modulator
    • 电光谐振相位调制器
    • US5347392A
    • 1994-09-13
    • US842300
    • 1992-02-26
    • Chien-Chung ChenDeborah L. RobinsonHamid Hemmati
    • Chien-Chung ChenDeborah L. RobinsonHamid Hemmati
    • G02F1/21H04B10/145G03H1/02H01S3/10G08B5/23
    • H04B10/50G02F1/21
    • An electro-optic resonant cavity is used to achieve phase modulation with lower driving voltages. Laser damage thresholds are inherently higher than with previously used integrated optics due to the utilization of bulk optics. Phase modulation is achieved at higher speeds with lower driving voltages than previously obtained with non-resonant electro-optic phase modulators. The instant scheme uses a data locking dither approach as opposed to the conventional sinusoidal locking schemes. In accordance with a disclosed embodiment, a resonant cavity modulator has been designed to operate at a data rate in excess of 100 Mbps. By carefully choosing the cavity finesse and its dimension, it is possible to control the pulse switching time to within 4 ns and to limit the required switching voltage to within 10 V. Experimentally, the resonant cavity can be maintained on resonance with respect to the input laser signal by monitoring the fluctuation of output intensity as the cavity is switched. This cavity locking scheme can be applied by using only the random data sequence, and without the need of additional dithering of the cavity. Compared to waveguide modulators, the resonant cavity has a comparable modulating voltage requirement. Because of its bulk geometry, resonant cavity modulator has the potential of accommodating higher throughput power. Furthermore, mode matching into a bulk device is easier and typically can be achieved with higher efficiency. On the other hand, unlike waveguide modulators which are essentially traveling wave devices, the resonant cavity modulator requires that the cavity be maintained in resonance with respect to the incoming laser signal. An additional control loop is incorporated into the modulator to maintain the cavity on resonance.
    • 使用电光谐振腔来实现具有较低驱动电压的相位调制。 激光损伤阈值固有地高于以前使用的集成光学元件,因为利用了大量光学元件。 相位调制在较高的速度下实现,其驱动电压低于先前用非谐振电光相位调制器获得的驱动电压。 本方案使用数据锁定抖动方法,而不是常规的正弦锁定方案。 根据所公开的实施例,已经设计了谐振腔调制器以超过100Mbps的数据速率工作。 通过仔细选择腔体精度及其尺寸,可以将脉冲切换时间控制在4 ns内,并将所需的开关电压限制在10 V以内。实验上,谐振腔可以相对于输入端保持谐振 激光信号通过监视腔切换时输出强度的波动。 可以通过仅使用随机数据序列来应用该腔锁定方案,并且不需要额外的空腔抖动。 与波导调制器相比,谐振腔具有相当的调制电压要求。 由于其体积几何形状,谐振腔调制器具有容纳更高吞吐能力的潜力。 此外,模块匹配成批量器件更容易,通常可以以更高的效率实现。 另一方面,与基本上是行波器件的波导调制器不同,谐振腔调制器要求腔相对于输入的激光信号保持谐振。 调制器中并入一个附加的控制回路,以保持谐振腔。