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1. 发明申请

US20100325084A1 COMPONENT-TRACKING SYSTEM AND METHODS THEREFOR 有权
标题翻译：组件跟踪系统及其方法
公开(公告)号：US20100325084A1
公开(公告)日：2010-12-23
申请号：US12869016
申请日：2010-08-26
申请人： Chung-Ho Huang , Hae-Pyng Jea , Tung Hsu , Jackie Seto
发明人： Chung-Ho Huang , Hae-Pyng Jea , Tung Hsu , Jackie Seto
IPC分类号： G06F17/00 , G06F17/30
CPC分类号： G05B19/418 , Y02P90/02 , Y02P90/205 , Y02P90/86 , Y10S707/99943 , Y10S707/99945
摘要： A system for facilitating plasma processing tool component management across plurality of tools is provided. The system includes means for receiving first component data for first plurality of components, including identification and usage history for a first plurality of components, at first database associated with first tool. The system also includes means for receiving second component data for second plurality of components at second database associated with second tool, which is different from first tool. The system further includes means for synchronizing first and second component data with third database. The synchronizing includes synchronizing between third database and at least one of first and second database rules that govern usage of at least one component of first and second plurality of components. The third database is coupled to exchange data with plurality of tools. The system yet also includes means for obtaining information, using rules and usage history data about given component prior to performing one of replacement, analysis, and maintenance.
摘要翻译：提供了一种用于促进跨多个工具的等离子体处理工具部件管理的系统。该系统包括用于在与第一工具相关联的第一数据库处接收用于第一多个组件的第一组件数据的装置，包括用于第一多个组件的标识和使用历史。该系统还包括用于在与第二工具相关联的第二数据库处接收与第一工具不同的第二数据组件的第二组件数据的装置。该系统还包括用于将第一和第二组件数据与第三数据库同步的装置。同步包括在第三数据库与管理第一和第二多个组件的至少一个组件的使用的第一和第二数据库规则中的至少一个之间进行同步。第三数据库被耦合以与多个工具交换数据。该系统还包括在执行替换，分析和维护之前获得信息，使用关于给定组件的规则和使用历史数据的装置。

2. 发明授权

US07814046B2 Dynamic component-tracking system and methods therefor 有权
标题翻译：动态组件跟踪系统及其方法
公开(公告)号：US07814046B2
公开(公告)日：2010-10-12
申请号：US11537517
申请日：2006-09-29
申请人： Chung-Ho Huang , Hae-Pyng Jea , Tung Hsu , Jackie Seto
发明人： Chung-Ho Huang , Hae-Pyng Jea , Tung Hsu , Jackie Seto
IPC分类号： G06F17/00
CPC分类号： G05B19/418 , Y02P90/02 , Y02P90/205 , Y02P90/86 , Y10S707/99943 , Y10S707/99945
摘要： A computer-implemented method for facilitating plasma processing tool component management across plurality of tools is provided. The method includes receiving first component data for first plurality of components, including identification and usage history, at first database associated with first tool. The method also includes receiving second component data for second plurality of components at second database associated with second tool, which is different from first tool. The method further includes synchronizing first and second component data with third database. The synchronizing includes synchronizing between third database and at least one of first and second database rules that govern usage of at least one component of first and second plurality of components. The third database is coupled to exchange data with plurality of tools. The method yet also includes obtaining information, using rules and usage history data about given component prior to performing one of replacement, analysis, and maintenance.
摘要翻译：提供了一种用于促进跨多个工具的等离子体处理工具部件管理的计算机实现的方法。该方法包括在与第一工具相关联的第一数据库处接收包括标识和使用历史的第一多个组件的第一组件数据。该方法还包括在与第二工具相关联的第二数据库处接收与第一工具不同的第二多个组件的第二组件数据。该方法还包括将第一和第二组件数据与第三数据库同步。同步包括在第三数据库与管理第一和第二多个组件的至少一个组件的使用的第一和第二数据库规则中的至少一个之间进行同步。第三数据库被耦合以与多个工具交换数据。该方法还包括在执行替换，分析和维护之前获得信息，使用关于给定组件的规则和使用历史数据。

3. 发明申请

US20080082579A1 DYNAMIC COMPONENT-TRACKING SYSTEM AND METHODS THEREFOR 有权
标题翻译：动态组件跟踪系统及其方法
公开(公告)号：US20080082579A1
公开(公告)日：2008-04-03
申请号：US11537517
申请日：2006-09-29
申请人： Chung-Ho Huang , Hae-Pyng Jea , Tung Hsu , Jackie Seto
发明人： Chung-Ho Huang , Hae-Pyng Jea , Tung Hsu , Jackie Seto
IPC分类号： G06F17/00
CPC分类号： G05B19/418 , Y02P90/02 , Y02P90/205 , Y02P90/86 , Y10S707/99943 , Y10S707/99945
摘要： A computer-implemented method for facilitating plasma processing tool component management across plurality of tools is provided. The method includes receiving first component data for first plurality of components, including identification and usage history, at first database associated with first tool. The method also includes receiving second component data for second plurality of components at second database associated with second tool, which is different from first tool. The method further includes synchronizing first and second component data with third database. The synchronizing includes synchronizing between third database and at least one of first and second database rules that govern usage of at least one component of first and second plurality of components. The third database is coupled to exchange data with plurality of tools. The method yet also includes obtaining information, using rules and usage history data about given component prior to performing one of replacement, analysis, and maintenance.
摘要翻译：提供了一种用于促进跨多个工具的等离子体处理工具部件管理的计算机实现的方法。该方法包括在与第一工具相关联的第一数据库处接收包括标识和使用历史的第一多个组件的第一组件数据。该方法还包括在与第二工具相关联的第二数据库处接收与第一工具不同的第二多个组件的第二组件数据。该方法还包括将第一和第二组件数据与第三数据库同步。同步包括在第三数据库与管理第一和第二多个组件的至少一个组件的使用的第一和第二数据库规则中的至少一个之间进行同步。第三数据库被耦合以与多个工具交换数据。该方法还包括在执行替换，分析和维护之前获得信息，使用关于给定组件的规则和使用历史数据。

4. 发明授权

US08010483B2 Component-tracking system and methods therefor 有权
标题翻译：组件跟踪系统及其方法
公开(公告)号：US08010483B2
公开(公告)日：2011-08-30
申请号：US12869016
申请日：2010-08-26
申请人： Chung-Ho Huang , Hae-Pyng Jea , Tung Hsu , Jackie Seto
发明人： Chung-Ho Huang , Hae-Pyng Jea , Tung Hsu , Jackie Seto
IPC分类号： G06F17/00
CPC分类号： G05B19/418 , Y02P90/02 , Y02P90/205 , Y02P90/86 , Y10S707/99943 , Y10S707/99945
摘要： A system for facilitating plasma processing tool component management across plurality of tools is provided. The system includes means for receiving first component data for first plurality of components, including identification and usage history for a first plurality of components, at first database associated with first tool. The system also includes means for receiving second component data for second plurality of components at second database associated with second tool, which is different from first tool. The system further includes means for synchronizing first and second component data with third database. The synchronizing includes synchronizing between third database and at least one of first and second database rules that govern usage of at least one component of first and second plurality of components. The third database is coupled to exchange data with plurality of tools. The system yet also includes means for obtaining information, using rules and usage history data about given component prior to performing one of replacement, analysis, and maintenance.
摘要翻译：提供了一种用于促进跨多个工具的等离子体处理工具部件管理的系统。该系统包括用于在与第一工具相关联的第一数据库处接收用于第一多个组件的第一组件数据的装置，包括用于第一多个组件的标识和使用历史。该系统还包括用于在与第二工具相关联的第二数据库处接收与第一工具不同的第二数据组件的第二组件数据的装置。该系统还包括用于将第一和第二组件数据与第三数据库同步的装置。同步包括在第三数据库与管理第一和第二多个组件的至少一个组件的使用的第一和第二数据库规则中的至少一个之间进行同步。第三数据库被耦合以与多个工具交换数据。该系统还包括在执行替换，分析和维护之前获得信息，使用关于给定组件的规则和使用历史数据的装置。

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