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    • 7. 发明授权
    • Mass flow controller for control purge and managing method of the same
    • 质量流量控制器用于控制吹扫和管理方法
    • US06843122B2
    • 2005-01-18
    • US10431129
    • 2003-05-07
    • Hae-Lyong KimTae-Ho Lee
    • Hae-Lyong KimTae-Ho Lee
    • G01F1/68G01F1/684G01F5/00G05D7/01H01L21/02G06F19/00
    • G01F5/00G01F1/6847G05D7/0635
    • The present invention relates to a mass flow controller for a control purge and a managing method of the same. When a user sets the mode to a control purge mode capable of controlling a maximum flowing amount for constantly maintaining a maximum flowing amount when performing a purge function after the user sets a purge function mode based on a purpose of use of a mass flow controller, a control circuit compares a set value of a flowing amount inputted based on a user's selection with a previously set threshold value and controls a valve for constantly maintaining a maximum flowing amount by switching to a gain resistor for a purge mode having a gain value capable of performing a purge function and controls a valve for thereby accurately controlling a small flowing amount by switching to a gain resistor for a common control mode having a gain value capable of performing a common control function. When a user sets the mode to a purge function mode based on a state of use of a mass flow controller, fully opens a valve and sets a valve open purge mode for obtaining a maximum flowing amount, a control circuit compares a set value of a flowing amount inputted by a user with a previously set threshold value and controls a valve for fully opening a valve for thereby implementing a maximum flowing amount and accurately controlling a small flowing amount.
    • 本发明涉及一种用于控制吹扫的质量流量控制器及其管理方法。 当用户基于使用质量流量控制器的目的设置吹扫功能模式时,当用户将模式设置为能够控制最大流量的持续保持最大流量时的控制吹扫模式, 控制电路将基于用户选择输入的流量的设定值与预先设定的阈值进行比较,并且通过切换到增益电阻器来控制持续保持最大流量的阀,所述增益电阻器具有能够 执行净化功能并控制阀,从而通过切换到具有能够执行公共控制功能的增益值的公共控制模式的增益电阻来精确地控制小流量。 当用户基于质量流量控制器的使用状态将模式设置为吹扫功能模式时,完全打开阀并设置阀打开吹扫模式以获得最大流量,控制电路将a的设定值 流量由用户输入预先设定的阈值,并且控制用于完全打开阀的阀,从而实现最大流量并精确地控制小流量。