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    • 1. 发明申请
    • METHOD AND APPARATUS FOR AUTOMATED VALIDATION OF SEMICONDUCTOR PROCESS RECIPES
    • 用于自动验证半导体工艺制程的方法和装置
    • WO2012030930A3
    • 2012-05-18
    • PCT/US2011049918
    • 2011-08-31
    • APPLIED MATERIALS INCHARDY CHARLESLINDLEY ROGER ALAN
    • HARDY CHARLESLINDLEY ROGER ALAN
    • G06F19/00G06F9/44
    • G06N5/025
    • Methods and apparatus for automated validation of semiconductor process steps are provided herein. In some examples, a method for validating a semiconductor process recipe includes: selecting a rule set describing an operating window for a semiconductor process tool; checking parameter values defined by steps in the semiconductor process recipe against limit-checking rules of the rule set to produce first results; determining step types from the steps in the semiconductor process recipe using step definition rules of the rule set to produce second results; checking transitions between the step types against step transition rules of the rule set to produce third results; and generating, using the computer, validation data for use of the semiconductor process recipe with the semiconductor process tool based on the first, the second, and the third results.
    • 本文提供了半导体工艺步骤的自动验证的方法和装置。 在一些示例中,用于验证半导体处理配方的方法包括:选择描述半导体处理工具的操作窗口的规则集; 检查由半导体工艺配方中的步骤定义的参数值,以反映规则集的限制检查规则以产生第一个结果; 使用规则集的步骤定义规则从半导体工艺配方中的步骤确定步骤类型以产生第二结果; 检查步骤类型与规则集的步骤转换规则之间的转换,以产生第三个结果; 以及基于第一,第二和第三结果,使用计算机产生使用半导体处理工具的半导体工艺配方的验证数据。
    • 4. 发明申请
    • MATERIALS, METHODS, AND SYSTEMS FOR CAVITATION-MEDIATED ULTRASONIC DRUG DELIVERY
    • 用于空腔介导的超声波药物输送的材料,方法和系统
    • WO2008157422A1
    • 2008-12-24
    • PCT/US2008/067004
    • 2008-06-13
    • HARDY, Charles, Thomas
    • HARDY, Charles, Thomas
    • A61B17/20
    • A61M37/0092A61K9/0009A61K9/1273A61K41/0028A61K47/58A61K47/60A61K47/6455A61K47/6915A61K49/0002A61K49/124B82Y5/00
    • Materials, methods, and systems for targeted and non-targeted therapeutic delivery in vivo utilizing cavitation-mediated ultrasonic drug delivery are described. Targeted therapeutic delivery systems comprising specially designed nanocarriers for intracellular therapeutic delivery, mediated by acoustic energy, for use either in vivo or in vitro, are also embodied. Nanocarriers comprised of substantially dendritic polymers, supramolecular assemblies, polymersomes, peptosomes, or mixtures thereof, are used to treat a variety of diseases in humans and other species, such as cancer, ophthalmological, pulmonary, urinary, or other pathologies. Noninvasive sonic energy being applied to the patient in a controlled fashion at the treatment area results in controlled acoustic cavitation at said region, and cell and tissue specific drug delivery. Microbubbles, both in the form of contrast agents, and/or other active agents infused into the patient, and/or bubbles formed from previous ultrasound exposure, allow for predictable cavitation thresholds, requiring much lower incident ultrasound intensities for permeating tissue.
    • 描述了使用空化介导的超声药物递送在体内靶向和非靶向治疗递送的材料,方法和系统。 包含用于体内或体外使用的由声能介导的用于细胞内治疗递送的特别设计的纳米载体的靶向治疗递送系统也被体现。 使用由基本上树枝状聚合物,超分子组装,聚合物囊泡,peptosomes或其混合物组成的纳米载体来治疗人类和其它物种如癌症,眼科,肺,尿或其它病症中的各种疾病。 在治疗区域以受控的方式施用于患者的无创声波能量导致在所述区域受控的声空泡,以及细胞和组织特异性药物递送。 以造影剂形式存在的微泡和/或注入患者的其它活性剂,和/或由先前的超声暴露形成的气泡允许可预测的气穴阈值,对渗透组织需要较低的入射超声强度。
    • 6. 发明申请
    • METHOD AND APPARATUS FOR AUTOMATED VALIDATION OF SEMICONDUCTOR PROCESS RECIPES
    • 自动验证半导体工艺方法的方法和设备
    • WO2012030930A2
    • 2012-03-08
    • PCT/US2011/049918
    • 2011-08-31
    • APPLIED MATERIALS, INC.HARDY, CharlesLINDLEY, Roger Alan
    • HARDY, CharlesLINDLEY, Roger Alan
    • G06F19/00G06F9/44
    • G06N5/025
    • Methods and apparatus for automated validation of semiconductor process steps are provided herein. In some examples, a method for validating a semiconductor process recipe includes: selecting a rule set describing an operating window for a semiconductor process tool; checking parameter values defined by steps in the semiconductor process recipe against limit-checking rules of the rule set to produce first results; determining step types from the steps in the semiconductor process recipe using step definition rules of the rule set to produce second results; checking transitions between the step types against step transition rules of the rule set to produce third results; and generating, using the computer, validation data for use of the semiconductor process recipe with the semiconductor process tool based on the first, the second, and the third results.
    • 本文提供了用于半导体工艺步骤的自动验证的方法和设备。 在一些示例中,用于验证半导体工艺配方的方法包括:选择描述用于半导体工艺工具的操作窗口的规则集合; 检查由所述半导体工艺配方中的步骤定义的参数值与所述规则集的限制检查规则,以产生第一结果; 使用规则集的步骤定义规则从半导体工艺配方中的步骤确定步骤类型以产生第二结果; 检查步骤类型之间的转换与规则集的步骤转换规则,以产生第三结果; 以及基于所述第一,第二和第三结果,使用所述计算机生成用于使用具有所述半导体处理工具的所述半导体工艺配方的验证数据。