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1. 发明申请

US20120212723A1 ELECTROMAGNETIC ACTUATOR, STAGE APPARATUS AND LITHOGRAPHIC APPARATUS 有权
标题翻译：电磁执行器，阶段装置和平面设备
公开(公告)号：US20120212723A1
公开(公告)日：2012-08-23
申请号：US13401560
申请日：2012-02-21
申请人： Sven Antoin Johan Hol , Jan Van Eijk , Johannes Petrus Martinus Bernardus Vermeulen , Gerard Johannes Pieter Nijsse , Simon Bernardus Cornelis Maria Martens , Yang-Shan Huang , Michael Wilhelmus Theodorus Koot , Jeroen De Boeij , Maarten Hartger Kimman , Wei Zhou
发明人： Sven Antoin Johan Hol , Jan Van Eijk , Johannes Petrus Martinus Bernardus Vermeulen , Gerard Johannes Pieter Nijsse , Simon Bernardus Cornelis Maria Martens , Yang-Shan Huang , Michael Wilhelmus Theodorus Koot , Jeroen De Boeij , Maarten Hartger Kimman , Wei Zhou
IPC分类号： G03B27/54 , H01F27/28 , G03B27/58 , H01F27/24
CPC分类号： H01F7/081 , G03F7/70758 , H01F7/122 , H01F7/1646
摘要： An electromagnetic actuator includes a first and second magnetic members that are displaceable relative to each other and are arranged to provide a magnetic circuit; and a coil configured to, in use, receive a current to generate a magnetic flux through the magnetic circuit, thereby generating a force between the first and second magnetic members in a first direction, the magnetic flux, in use, being transferred between the first and second magnetic members through a first surface of the first magnetic member and a second surface of the second magnetic member, the first and second surface being separated by an airgap, wherein the first surface and the second surface are arranged relative to each other such that an outer dimension of the first surface extends beyond an outer dimension of the second surface in a second direction substantially perpendicular to the first direction.
摘要翻译：电磁致动器包括第一和第二磁性构件，其可相对于彼此移动并被布置成提供磁路; 以及线圈，其被配置为在使用中接收电流以产生通过所述磁路的磁通量，从而在第一方向上在所述第一和第二磁性构件之间产生力，所述磁通在使用中在所述第一和第二磁性件通过第一磁性件的第一表面和第二磁性件的第二表面，第一和第二表面被气隙隔开，其中第一表面和第二表面相对于彼此布置使得第一表面的外部尺寸在基本上垂直于第一方向的第二方向上延伸超过第二表面的外部尺寸。

2. 发明授权

US07628875B2 MEMS device and assembly method 有权
标题翻译： MEMS器件和组装方法
公开(公告)号：US07628875B2
公开(公告)日：2009-12-08
申请号：US11519204
申请日：2006-09-12
申请人： Jan Bex , Raymond Jacobus Knaapen , Gerard Johannes Pieter Nijsse , Gerard Kums
发明人： Jan Bex , Raymond Jacobus Knaapen , Gerard Johannes Pieter Nijsse , Gerard Kums
IPC分类号： B32B37/12
CPC分类号： B81C3/001 , B81C2203/032 , Y10T428/20 , Y10T428/218 , Y10T428/219 , Y10T428/249953
摘要： A method of bonding a MEMS device to a substrate to form a MEMS device assembly. A thickness profile of the MEMS device and/or the flatness of the mating surface of the substrate is determined. An adhesive is deposited onto a mating surface of the MEMS device and/or the mating surface of the substrate. The mating surfaces of the MEMS device and substrate are brought together, such that the adhesive can bond the MEMS device to the substrate. The volume of adhesive deposited at particular locations on the mating surface is varied to compensate for local variations in the thickness profile of the MEMS device and/or the flatness of the mating surface of the substrate.
摘要翻译：将MEMS器件接合到衬底以形成MEMS器件组件的方法。确定MEMS器件的厚度分布和/或衬底的配合表面的平坦度。将粘合剂沉积到MEMS器件的配合表面和/或衬底的配合表面上。 MEMS器件和衬底的配合表面被带到一起，使得粘合剂可以将MEMS器件接合到衬底。沉积在配合表面上的特定位置处的粘合剂的体积被改变以补偿MEMS装置的厚度分布的局部变化和/或基底的配合表面的平坦度。

3. 发明授权

US08687171B2 Electromagnetic actuator, stage apparatus and lithographic apparatus 有权
标题翻译：电磁执行器，平台设备和光刻设备
公开(公告)号：US08687171B2
公开(公告)日：2014-04-01
申请号：US13401560
申请日：2012-02-21
申请人： Sven Antoin Johan Hol , Jan Van Eijk , Johannes Petrus Martinus Bernardus Vermeulen , Gerard Johannes Pieter Nijsse , Simon Bernardus Cornelis Maria Martens , Yang-Shan Huang , Michael Wilhelmus Theodorus Koot , Jeroen De Boeij , Maarten Hartger Kimman , Wei Zhou
发明人： Sven Antoin Johan Hol , Jan Van Eijk , Johannes Petrus Martinus Bernardus Vermeulen , Gerard Johannes Pieter Nijsse , Simon Bernardus Cornelis Maria Martens , Yang-Shan Huang , Michael Wilhelmus Theodorus Koot , Jeroen De Boeij , Maarten Hartger Kimman , Wei Zhou
IPC分类号： G03B27/58 , G03B27/62 , H02K41/02
CPC分类号： H01F7/081 , G03F7/70758 , H01F7/122 , H01F7/1646
摘要： An electromagnetic actuator includes a first and second magnetic members that are displaceable relative to each other and are arranged to provide a magnetic circuit; and a coil configured to, in use, receive a current to generate a magnetic flux through the magnetic circuit, thereby generating a force between the first and second magnetic members in a first direction, the magnetic flux, in use, being transferred between the first and second magnetic members through a first surface of the first magnetic member and a second surface of the second magnetic member, the first and second surface being separated by an airgap, wherein the first surface and the second surface are arranged relative to each other such that an outer dimension of the first surface extends beyond an outer dimension of the second surface in a second direction substantially perpendicular to the first direction.
摘要翻译：电磁致动器包括第一和第二磁性构件，其可相对于彼此移动并被布置成提供磁路; 以及线圈，其被配置为在使用中接收电流以产生通过所述磁路的磁通量，从而在第一方向上在所述第一和第二磁性构件之间产生力，所述磁通在使用中在所述第一和第二磁性件通过第一磁性件的第一表面和第二磁性件的第二表面，第一和第二表面被气隙隔开，其中第一表面和第二表面相对于彼此布置使得第一表面的外部尺寸在基本上垂直于第一方向的第二方向上延伸超过第二表面的外部尺寸。

4. 发明申请

US20080063830A1 MEMS device and assembly method 有权
标题翻译： MEMS器件和组装方法
公开(公告)号：US20080063830A1
公开(公告)日：2008-03-13
申请号：US11519204
申请日：2006-09-12
申请人： Jan Bex , Raymond Jacobus Knaapen , Gerard Johannes Pieter Nijsse , Gerard Kums
发明人： Jan Bex , Raymond Jacobus Knaapen , Gerard Johannes Pieter Nijsse , Gerard Kums
IPC分类号： B32B37/12 , B32B41/00 , B32B3/26
CPC分类号： B81C3/001 , B81C2203/032 , Y10T428/20 , Y10T428/218 , Y10T428/219 , Y10T428/249953
摘要： A method of bonding a MEMS device to a substrate to form a MEMS device assembly. A thickness profile of the MEMS device and/or the flatness of the mating surface of the substrate is determined. An adhesive is deposited onto a mating surface of the MEMS device and/or the mating surface of the substrate. The mating surfaces of the MEMS device and substrate are brought together, such that the adhesive can bond the MEMS device to the substrate. The volume of adhesive deposited at particular locations on the mating surface is varied to compensate for local variations in the thickness profile of the MEMS device and/or the flatness of the mating surface of the substrate.
摘要翻译：将MEMS器件接合到衬底以形成MEMS器件组件的方法。确定MEMS器件的厚度分布和/或衬底的配合表面的平坦度。将粘合剂沉积到MEMS器件的配合表面和/或衬底的配合表面上。 MEMS器件和衬底的配合表面被带到一起，使得粘合剂可以将MEMS器件接合到衬底。沉积在配合表面上的特定位置处的粘合剂的体积被改变以补偿MEMS装置的厚度分布的局部变化和/或基底的配合表面的平坦度。

5. 发明授权

US07209413B2 Optical scanning device 失效
标题翻译：光学扫描装置
公开(公告)号：US07209413B2
公开(公告)日：2007-04-24
申请号：US10521658
申请日：2003-07-02
申请人： Michael Adrianus Henricus Van Der , Gerardus Lucien Mathildus Jansen , Gerard Johannes Pieter Nijsse , Johannes Joseph Hubertina Barbara Schleipen , Aukje Arianne Annette Kastelijn , Frank Cornelis Penning , Willem Gerard Ophey
发明人： Michael Adrianus Henricus Van Der , Gerardus Lucien Mathildus Jansen , Gerard Johannes Pieter Nijsse , Johannes Joseph Hubertina Barbara Schleipen , Aukje Arianne Annette Kastelijn , Frank Cornelis Penning , Willem Gerard Ophey
IPC分类号： G11B7/00
CPC分类号： G11B7/1359 , G02B26/108 , G11B7/08576 , G11B7/1362 , G11B7/1398
摘要： An optical scanning device for scanning an information layer of an optical record carrier and including a rotary aim (2; 102; 202; 302; 402; 502) which is arranged to swing about a rotation axis (CR) to alter an angular position of the rotary arm about the rotation axis; a detector arrangement (10) arranged separate from the rotary arm (2; 102; 202; 302; 402; 502) for detecting a radiation beam spot, the radiation beam spot (40; 140; 240; 340; 440; 540) having an angular disposition; a first reflective surface (4; 104; 204; 304; 404; 504) attached to the rotary arm (2; 102; 202; 302; 402; 502); a second reflective surface (6; 106; 206; 306; 406; 506) attached to the rotary arm (2; 102; 302; 402; 502); a first light path (LP 1; LP 1 O 1; LP201; LP301; LP401; LP501; running from a location on the record carrier to said first reflective surface; a second light path (LP2; LP102; LP202; LP302; LP402; LP502) running from said first reflective surface to said second reflective surface; a third light path (LP3; LP103; LP203; LP303; LP403; LP503) running from said second reflective surface to said detector arrangement (10). The rotary arm includes at least one optical inversion element (52; 54; 56; 58; 64; 66) arranged such that a dependence between variation of the angular disposition of the radiation beam spot and variation of the angular position of the rotary arm is reduced.
摘要翻译：一种用于扫描光学记录载体的信息层并包括旋转瞄准镜（2; 102; 202; 302; 402; 502）的光学扫描装置，其被设置成围绕旋转轴线（CR）摆动以改变角度位置旋转臂围绕旋转轴线; 与所述旋转臂（2; 102; 202; 302; 402; 502）分开布置的用于检测辐射束点的检测器装置（10），所述辐射束点（40; 140; 240; 340; 440; 540）具有角度配置; 附接到旋转臂（2; 102; 202; 302; 402; 502）的第一反射表面（4; 104; 204; 304; 404; 504）附接到旋转臂（2; 102; 302; 402; 502）的第二反射表面（6; 106; 206; 306; 406; 506）第一光路（LP 1; LP 1 O 1; LP 201; LP 301; LP 401; LP 501;从记录载体上的位置运行到所述第一反射表面;第二光路（LP 2; LP 102; LP 202; LP 302; LP 402; LP 502），从所述第一反射表面延伸到所述第二反射表面;第三光路（LP 3; LP 103; LP 203; LP 303; LP 403; LP 503）所述旋转臂包括至少一个光学反转元件（52; 54; 56; 58; 64; 66），所述至少一个光学反转元件被布置成使得所述辐射束光斑的角度配置的变化之间的相关性并且减小了旋转臂的角位置的变化。

6. 发明授权

US06402118B1 Magnetic support system 有权
标题翻译：磁性支撑系统
公开(公告)号：US06402118B1
公开(公告)日：2002-06-11
申请号：US09509153
申请日：2000-06-16
申请人： Gerard Johannes Pieter Nijsse , Josephus Wilhelmus Spronck
发明人： Gerard Johannes Pieter Nijsse , Josephus Wilhelmus Spronck
IPC分类号： F16M1300
CPC分类号： A47C31/003 , F16C39/063 , F16F6/005 , F16F15/03 , G01D11/14
摘要： There is described a support system enabling supporting an object such as a platform (1) free from vibration, in that bearing elements (50) have a stiffness (k) which at a working point (z0) equals zero. A bearing element (50) comprises two magnectic couplings (51, 52) provided by permanent magnets (61, 63). One coupling (51) has a positive stiffness (k51), and the other coupling has a negative stiffness (k52); in the working point, the absolute values of those stiffnesses are equally great. Alternatively, electrostatic couplings are used.
摘要翻译：描述了一种支撑系统，其能够支撑诸如平台（1）之类的无振动的物体，因为轴承元件（50）具有在工作点（z0）等于零的刚度（k）。轴承元件（50）包括由永久磁铁（61,63）提供的两个大的联接器（51,52）。一个联轴器（51）具有正刚度（k51），另一个联轴器具有负刚度（k52）; 在工作点，这些刚度的绝对值同样大。或者，使用静电耦合。

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