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1. 发明授权

US08932896B2 Solar cell manufacturing apparatus and solar cell manufacturing method 有权
标题翻译：太阳能电池制造装置和太阳能电池制造方法
公开(公告)号：US08932896B2
公开(公告)日：2015-01-13
申请号：US13696880
申请日：2011-06-08
申请人： Genji Sakata
发明人： Genji Sakata
IPC分类号： H01L31/18 , H01L31/0236 , H01L21/266 , H01L21/223
CPC分类号： H01L21/266 , H01L21/2236 , H01L31/1804 , Y02E10/547 , Y02P70/521
摘要： The solar cell manufacturing apparatus includes: a load lock chamber configured to allow loading and unloading of a substrate by switching between atmospheric ambient and vacuum ambient; a processing chamber where the substrate for a solar cell is to be doped with impurity ions for pn junction formation in the vacuum ambient; and a conveyance chamber including a conveyance unit configured to convey the substrate between the load lock chamber and the processing chamber. The doping of impurity ions is performed by irradiation with the impurity ions from an ion gun, and the ion gun is provided with a grid plate, as its ion irradiation surface, facing the substrate conveyed to the processing chamber.
摘要翻译：太阳能电池制造装置包括：负载锁定室，被配置为允许通过在大气环境和真空环境之间切换来加载和卸载基板; 处理室，其中用于太阳能电池的基板将在真空环境中掺杂用于pn结形成的杂质离子; 以及输送室，包括输送单元，该输送单元构造成在所述负载锁定室和所述处理室之间输送所述基板。通过用离子枪照射杂质离子来进行杂质离子的掺杂，并且离子枪设置有栅格板作为其离子照射表面，面向输送到处理室的衬底。

2. 发明申请

US20100151150A1 PLASMA PROCESSING APPARATUS AND MANUFACTURING METHOD OF DEPOSITION-INHIBITORY MEMBER 审中-公开
标题翻译：沉积物制剂等离子体处理装置及制造方法
公开(公告)号：US20100151150A1
公开(公告)日：2010-06-17
申请号：US12600650
申请日：2008-05-14
申请人： Yutaka Kokaze , Masahisa Ueda , Mitsuhiro Endou , Koukou Suu , Toshiya Miyazaki , Genji Sakata , Toshiyuki Nakamura
发明人： Yutaka Kokaze , Masahisa Ueda , Mitsuhiro Endou , Koukou Suu , Toshiya Miyazaki , Genji Sakata , Toshiyuki Nakamura
IPC分类号： C23C16/513
CPC分类号： H01J37/32467 , H01J37/32009 , H01J37/321 , H01J37/32568
摘要： A plasma processing apparatus of the present invention performs on a substrate to be processed, plasma processing with a noble metal material and a ferroelectric material and is provided with a constituent member that is exposed to plasma while being heated. The constituent member is formed with an aluminum alloy of at least 99% aluminum purity.
摘要翻译：本发明的等离子体处理装置对待处理的基板，用贵金属材料和铁电体材料的等离子体处理进行处理，并且在加热时设置有暴露于等离子体的构成部件。该构成部件由至少99％的铝纯度的铝合金形成。

3. 发明申请

US20130052771A1 Solar Cell Manufacturing Apparatus and Solar Cell Manufacturing Method 有权
标题翻译：太阳能电池制造装置和太阳能电池制造方法
公开(公告)号：US20130052771A1
公开(公告)日：2013-02-28
申请号：US13696880
申请日：2011-06-08
申请人： Genji Sakata
发明人： Genji Sakata
IPC分类号： H01L31/0236 , H01L31/18
CPC分类号： H01L21/266 , H01L21/2236 , H01L31/1804 , Y02E10/547 , Y02P70/521
摘要： The solar cell manufacturing apparatus includes: a load lock chamber configured to allow loading and unloading of a substrate by switching between atmospheric ambient and vacuum ambient; a processing chamber where the substrate for a solar cell is to be doped with impurity ions for pn junction formation in the vacuum ambient; and a conveyance chamber including a conveyance unit configured to convey the substrate between the load lock chamber and the processing chamber. The doping of impurity ions is performed by irradiation with the impurity ions from an ion gun, and the ion gun is provided with a grid plate, as its ion irradiation surface, facing the substrate conveyed to the processing chamber.
摘要翻译：太阳能电池制造装置包括：负载锁定室，被配置为允许通过在大气环境和真空环境之间切换来加载和卸载基板; 处理室，其中用于太阳能电池的衬底将在真空环境中掺杂用于pn结形成的杂质离子; 以及输送室，包括输送单元，该输送单元构造成在所述负载锁定室和所述处理室之间输送所述基板。通过用离子枪照射杂质离子来进行杂质离子的掺杂，并且离子枪设置有栅格板作为其离子照射表面，面向输送到处理室的衬底。

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