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    • 4. 发明授权
    • Manufacturing execution system (MES) including a wafer sampling engine (WSE) for a semiconductor manufacturing process
    • 制造执行系统(MES),包括用于半导体制造过程的晶片采样引擎(WSE)
    • US08565910B2
    • 2013-10-22
    • US13020846
    • 2011-02-04
    • Gary W. BehmMalek Ben SalemYue Li
    • Gary W. BehmMalek Ben SalemYue Li
    • G05B13/02
    • G05B19/41875G05B2219/32206G05B2219/45031Y02P90/12Y02P90/22
    • A method of sampling semiconductor wafers includes passing a lot of semiconductor wafers into a semiconductor processing tool, processing a first portion of the lot in one process chamber of the semiconductor processing tool and a second portion of the lot in another process chamber of the semiconductor processing tool to produce processed semiconductor wafers, and initiating a wafer sampling engine to select at least one of the processed semiconductor wafers for sampling. The wafer sampling engine computes a long term process capability index for the processing tool and a short term process performance index for at least one of the processing tool and process chamber, identifies at least one desired sampling measurement type, selects the at least one of the processed semiconductor wafers for sampling, and collects the desired measurement types from the at least one of the processed semiconductor wafers selected for sampling.
    • 采用半导体晶片的方法包括将大量半导体晶片传送到半导体处理工具中,在半导体处理工具的一个处理室中处理批次的第一部分,以及处理半导体处理的另一处理室中的批次的第二部分 制造经处理的半导体晶片的工具,以及启动晶片采样引擎以选择所处理的半导体晶片中的至少一个进行采样。 晶片采样引擎计算用于处理工具的长期工艺能力指数和用于处理工具和处理室中的至少一个的短期工艺性能指标,以识别至少一个期望的采样测量类型,选择至少一个 处理的半导体晶片进行采样,并从被选择用于采样的所处理的半导体晶片中的至少一个收集所需的测量类型。
    • 9. 发明申请
    • MANUFACTURING EXECUTION SYSTEM (MES) INCLUDING A WAFER SAMPLING ENGINE (WSE) FOR A SEMICONDUCTOR MANUFACTURING PROCESS
    • 包括用于半导体制造过程的WAEER采样发动机(WSE)的制造执行系统(MES)
    • US20120203369A1
    • 2012-08-09
    • US13020846
    • 2011-02-04
    • Gary W. BehmMalek Ben SalemYue Li
    • Gary W. BehmMalek Ben SalemYue Li
    • G06F19/00
    • G05B19/41875G05B2219/32206G05B2219/45031Y02P90/12Y02P90/22
    • A method of sampling semiconductor wafers includes passing a lot of semiconductor wafers into a semiconductor processing tool, processing a first portion of the lot in one process chamber of the semiconductor processing tool and a second portion of the lot in another process chamber of the semiconductor processing tool to produce processed semiconductor wafers, and initiating a wafer sampling engine to select at least one of the processed semiconductor wafers for sampling. The wafer sampling engine computes a long term process capability index for the processing tool and a short term process performance index for at least one of the processing tool and process chamber, identifies at least one desired sampling measurement type, selects the at least one of the processed semiconductor wafers for sampling, and collects the desired measurement types from the at least one of the processed semiconductor wafers selected for sampling.
    • 采用半导体晶片的方法包括将大量半导体晶片传送到半导体处理工具中,在半导体处理工具的一个处理室中处理批次的第一部分,以及处理半导体处理的另一处理室中的批次的第二部分 制造经处理的半导体晶片的工具,以及启动晶片采样引擎以选择所处理的半导体晶片中的至少一个进行采样。 晶片采样引擎计算用于处理工具的长期工艺能力指数和用于处理工具和处理室中的至少一个的短期工艺性能指标,以识别至少一个期望的采样测量类型,选择至少一个 处理的半导体晶片进行采样,并从被选择用于采样的所处理的半导体晶片中的至少一个收集所需的测量类型。
    • 10. 发明授权
    • Apparatus and method for enhancing field of vision of the visually impaired
    • 用于增强视障者视力的装置和方法
    • US08130262B2
    • 2012-03-06
    • US12354266
    • 2009-01-15
    • Gary W. BehmAlfred J. NollRichard E. Von Mering
    • Gary W. BehmAlfred J. NollRichard E. Von Mering
    • H04N9/47
    • G06F1/163G02B27/017G02B2027/0123G02B2027/0138G02B2027/014G09B21/008
    • An apparatus and a method for enhancing a field of vision of a user with a visual impairment to help the user to navigate safely in the surroundings. The apparatus includes a body, at least one video device coupled to the body for recording a visual image of a physical environment surrounding the user, at least one monitor coupled to the body, a processor which receives signals from the at least one video device and operatively controls the at least one monitor to display the visual image recorded by the at least one video device, and a tunnel vision finder to determine the user's actual vision size. The method includes the step of determining the user's actual vision size, acquiring a visual image of a physical environment surrounding the user, processing the visual image, and displaying the visual image in the user's actual vision.
    • 一种用于增强具有视觉障碍的用户的视野的装置和方法,以帮助用户在周围环境中安全地导航。 该装置包括主体,耦合到主体的至少一个视频设备,用于记录围绕用户的物理环境的视觉图像,耦合到主体的至少一个监视器,接收来自至少一个视频设备的信号的处理器,以及 操作地控制所述至少一个监视器以显示由所述至少一个视频设备记录的视觉图像,以及隧道视力检测器,以确定用户的实际视觉尺寸。 该方法包括确定用户的实际视觉尺寸,获取用户周围的物理环境的视觉图像,处理视觉图像以及在用户的实际视觉中显示视觉图像的步骤。