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1. 发明申请

WO2009099791A1 METHODS OF REDUCING CD LOSS IN A MICROELECTROMECHANICAL DEVICE 审中-公开
标题翻译：减少微电子设备中CD损耗的方法
公开(公告)号：WO2009099791A1
公开(公告)日：2009-08-13
申请号：PCT/US2009/032045
申请日：2009-01-26
申请人： QUALCOMM MEMS TECHNOLOGIES, INC. , KOTHARI, Manish , CHUI, Clarence , GUDLAVALLETI, Sauri
发明人： KOTHARI, Manish , CHUI, Clarence , GUDLAVALLETI, Sauri
IPC分类号： B81C1/00 , G03G17/00 , H01L21/02 , H01L21/44 , H01L23/48 , B81B7/00
CPC分类号： B81C1/00626 , B81B2201/042 , B81B2203/0109
摘要： Methods of fabricating an electromechanical systems device that minimize critical dimension (CD) loss in the device are described. The methods provide electromechanical systems devices with improved properties, including high reflectivity.
摘要翻译：描述了使装置中的临界尺寸（CD）损耗最小化的机电系统装置的制造方法。这些方法提供具有改进性能的机电系统装置，包括高反射率。

2. 发明申请

WO2011034972A3 DISPLAY DEVICE WITH AT LEAST ONE MOVABLE STOP ELEMENT 审中-公开
标题翻译：具有至少一个可动止动元件的显示装置
公开(公告)号：WO2011034972A3
公开(公告)日：2011-05-12
申请号：PCT/US2010048997
申请日：2010-09-15
申请人： QUALCOMM MEMS TECHNOLOGIES INC , KOTHARI MANISH , GUDLAVALLETI SAURI , ZEE STEPHEN
发明人： KOTHARI MANISH , GUDLAVALLETI SAURI , ZEE STEPHEN
IPC分类号： G02B26/00 , B81B3/00 , G02B26/08
CPC分类号： B81B3/0008 , B81B2201/042 , B81C2201/112 , B81C2201/115 , G02B26/001 , G02B26/0841
摘要： In certain embodiments, a device is provided including a substrate (102) and a plurality of supports (104) over the substrate. The device further includes a mechanical layer (106) having a movable portion and a stationary portion. The stationary portion being disposed over the supports. The device further includes a reflective surface (108) positioned over the substrate and mechanically coupled to the movable portion (112). The device of certain embodiments further includes at least one movable stop element (110) displaced from and mechanically coupled to the movable portion. In certain embodiments, the at least a portion of the stop element may be positioned over the stationary portion.
摘要翻译：在某些实施例中，提供了一种装置，其包括衬底（102）和在衬底上的多个支撑件（104）。该装置还包括具有可移动部分和固定部分的机械层（106）。固定部分设置在支撑件上。该装置还包括位于衬底上并机械地联接到可动部分（112）的反射表面（108）。某些实施例的装置还包括从可移动部分移位并机械联接到可移动部分的至少一个可移动止动元件（110）。在某些实施例中，止动元件的至少一部分可以定位在固定部分上方。

3. 发明申请

WO2011034972A2 DISPLAY DEVICE WITH AT LEAST ONE MOVABLE STOP ELEMENT 审中-公开
标题翻译：具有至少一个可动止动元件的显示装置
公开(公告)号：WO2011034972A2
公开(公告)日：2011-03-24
申请号：PCT/US2010/048997
申请日：2010-09-15
申请人： QUALCOMM MEMS TECHNOLOGIES, INC. , KOTHARI, Manish , GUDLAVALLETI, Sauri , ZEE, Stephen
发明人： KOTHARI, Manish , GUDLAVALLETI, Sauri , ZEE, Stephen
IPC分类号： G02B26/00
CPC分类号： B81B3/0008 , B81B2201/042 , B81C2201/112 , B81C2201/115 , G02B26/001 , G02B26/0841
摘要： In certain embodiments, a device is provided including a substrate and a plurality of supports over the substrate. The device may further include a mechanical layer having a movable portion and a stationary portion. The stationary portion may disposed over the supports. In certain embodiments, the device further includes a reflective surface positioned over the substrate and mechanically coupled to the movable portion. The device of certain embodiments further includes at least one movable stop element displaced from and mechanically coupled to the movable portion. In certain embodiments, the at least a portion of the stop element may be positioned over the stationary portion.
摘要翻译：在某些实施例中，提供了一种包括衬底和在衬底上的多个支撑体的装置。该装置还可以包括具有可移动部分和固定部分的机械层。固定部分可以设置在支撑件上方。在某些实施例中，所述装置还包括位于所述基板上并且机械地联接到所述可移动部分的反射表面。某些实施例的装置还包括至少一个可动止动元件，该可移动止动元件从可移动部分移动并机械联接到可动部分。在某些实施例中，止动元件的至少一部分可以定位在固定部分上方。

4. 发明申请

WO2010019521A1 METHOD AND APPARATUS TO REDUCE OR ELIMINATE STICTION AND IMAGE RETENTION IN INTERFEROMETRIC MODULATOR DEVICES 审中-公开
标题翻译：用于减少或消除干涉式调制器装置中的图像和图像保持的方法和装置
公开(公告)号：WO2010019521A1
公开(公告)日：2010-02-18
申请号：PCT/US2009/053315
申请日：2009-08-10
申请人： QUALCOMM MEMS TECHNOLOGIES, INC. , DE GROOT, Wilhelmus, A. , GUDLAVALLETI, Sauri , TUNG, Yeh-Jiun
发明人： DE GROOT, Wilhelmus, A. , GUDLAVALLETI, Sauri , TUNG, Yeh-Jiun
IPC分类号： G02B26/00 , B81B3/00
CPC分类号： G02B26/001 , B81B3/0008 , B81B2201/042
摘要： Method and apparatus to reduce or eliminate stiction and image retention in interferometric display devices are disclosed. In some embodiments, a display element comprises a plurality of interferometric modulator devices configured in a matrix, each interferometric modulator device having a movable reflective layer and a plurality of supporting posts, the plurality of posts defining a post spacing distance in at least one direction that is greater for one or more interferometric modulator devices disposed adjacent to an edge of the display element than one or more interferometric modulator devices disposed nonadjacent to an edge of the display element.
摘要翻译：公开了减少或消除干涉式显示装置中的静摩擦和图像保持的方法和装置。在一些实施例中，显示元件包括以矩阵形式配置的多个干涉式调制器装置，每个干涉式调制器装置具有可移动反射层和多个支撑柱，所述多个柱在至少一个方向上限定柱间隔距离，对于与显示元件的边缘相邻布置的一个或多个干涉式调制器装置，与设置在与显示元件的边缘不相邻的一个或多个干涉式调制器装置更大。

5. 发明申请

WO2012040192A1 LENSLESS CAMERA CONTROLLED VIA MEMS ARRAY 审中-公开
标题翻译：无缝摄像机通过MEMS阵列控制
公开(公告)号：WO2012040192A1
公开(公告)日：2012-03-29
申请号：PCT/US2011/052338
申请日：2011-09-20
申请人： QUALCOMM MEMS TECHNOLOGIES, INC. , GUDLAVALLETI, Sauri , KOTHARI, Manish
发明人： GUDLAVALLETI, Sauri , KOTHARI, Manish
IPC分类号： H04N5/225 , H04N5/232
CPC分类号： H04N5/2254 , H04N5/2259 , H04N5/232 , H04N5/23206
摘要： A lensless camera may include an array of MEMS-based light-modulating devices. A camera controller may control the MEMS-based light-modulating devices to transmit visible light through, or substantially prevent the transmission of visible light through, predetermined areas of the array. The array may be controlled in response to input from a user and/or in response to the location of a detected subject. The viewing direction of a lensless camera having such an array can be rapidly changed by changing the transmittance of different regions of the array.
摘要翻译：无镜头相机可以包括基于MEMS的光调制装置的阵列。照相机控制器可以控制基于MEMS的光调制装置透射可见光，或者基本上防止可见光透过阵列的预定区域。可以响应于来自用户的输入和/或响应于检测到的对象的位置来控制阵列。具有这种阵列的无镜头相机的观看方向可以通过改变阵列的不同区域的透射率来快速地改变。

6. 发明申请

WO2009105373A3 MICROELECTROMECHANICAL DEVICE WITH THERMAL EXPANSION BALANCING LAYER OR STIFFENING LAYER 审中-公开
标题翻译：具有热膨胀平衡层或强化层的微电子器件
公开(公告)号：WO2009105373A3
公开(公告)日：2010-01-28
申请号：PCT/US2009033818
申请日：2009-02-11
申请人： QUALCOMM MEMS TECHNOLOGIES INC , GUDLAVALLETI SAURI , CHUI CLARENCE
发明人： GUDLAVALLETI SAURI , CHUI CLARENCE
IPC分类号： B81B3/00 , G02B26/00
CPC分类号： B81B3/0072 , B81B2201/042 , G02B26/001 , Y10T29/49002
摘要： An interferometric modulating device is provided with a thermal expansion balancing layer on a side of the movable flexible layer opposite the movable reflector such that when temperature changes the distance between the movable reflector and the optical stack does not change significantly, thereby leading to stable color. Additionally, an interferometric modulating device is provided with a stiffening layer between the movable flexible layer and the movable reflector and at least one hollow void exists on the surface where the movable reflector and the stiffening layer contact each other so that the movable reflector is more rigid to bending, thereby reducing the temperature sensitivity of the movable reflector.
摘要翻译：干涉式调制装置在可移动柔性层的与可移动反射器相对的一侧上设置有热膨胀平衡层，使得当温度变化时，可移动反射器和光学堆叠之间的距离不会显着变化，从而导致稳定的颜色。此外，干涉式调制装置在可移动柔性层和可移动反射器之间设置有加强层，并且在可移动反射器和加强层彼此接触的表面上存在至少一个中空空隙，使得可移动反射器更刚性以弯曲，从而降低可移动反射器的温度灵敏度。

7. 发明申请

WO2009041952A1 METHODS FOR CHARACTERIZATION OF THE MECHANICAL PROPERTIES OF THIN FILMS AND TEST STRUCTURES FOR PERFORMING THE SAME 审中-公开
标题翻译：用于表征薄膜的机械性能的方法和用于实施其的测试结构
公开(公告)号：WO2009041952A1
公开(公告)日：2009-04-02
申请号：PCT/US2007/021004
申请日：2007-09-28
申请人： QUALCOMM MEMS TECHNOLOGIES, INC. , KOTHARI, Manish , GUDLAVALLETI, Sauri , PATEL, Satyadev Rajesh
发明人： KOTHARI, Manish , GUDLAVALLETI, Sauri , PATEL, Satyadev Rajesh
IPC分类号： G01N3/00
CPC分类号： G01N3/32 , G01N2203/005 , G01N2203/0286 , G01N2203/0682 , G02B26/001
摘要： A test structure allows one or more deposited thin film layers to be moved such that mechanical properties of the thin film layer or layers may be determined. Methods for characterizing the mechanical properties of the deposited thin film layer include the determination of a transition voltage of the movable thin film layer in the test structure, or the mechanical stiffness of the movable layer, and/or a determination of residual stress within the movable layer. Methods may also include the determination of creep rate or fatigue, as well as the variance in mechanical properties of the movable layer at various temperatures. Test structures used with the testing methods may include structures which interferometrically modulate incident light, enabling electrical or optical determination of the state of the test structures.
摘要翻译：测试结构允许移动一个或多个沉积的薄膜层，使得可以确定薄膜层的机械性能。表征沉积的薄膜层的机械性能的方法包括确定测试结构中可移动薄膜层的转变电压或可移动层的机械刚度，和/或确定可移动层内的残余应力层。方法还可以包括确定蠕变速率或疲劳，以及可移动层在各种温度下的机械性能的变化。与测试方法一起使用的测试结构可以包括对入射光进行干涉测量的结构，使得能够电或光学地确定测试结构的状态。

8. 发明申请

WO2012018483A1 MEMS-BASED APERTURE AND SHUTTER 审中-公开
标题翻译：基于MEMS的光孔和快门
公开(公告)号：WO2012018483A1
公开(公告)日：2012-02-09
申请号：PCT/US2011/043567
申请日：2011-07-11
申请人： QUALCOMM MEMS TECHNOLOGIES, INC. , KOTHARI, Manish , GUDLAVALLETI, Sauri
发明人： KOTHARI, Manish , GUDLAVALLETI, Sauri
IPC分类号： G02B26/00 , G03B9/02 , G03B9/08
CPC分类号： G02B26/001 , G02F1/19 , G03B7/097 , G03B7/18 , G03B9/02 , G03B9/08 , G03B15/05 , G03B2215/05
摘要： Some embodiments comprise at least one array that includes microelectromechanical systems ("MEMS")-based light-modulating devices. Elements of the array(s) may be configured to absorb and/or reflect light when in a first configuration and to transmit light when in a second position. Such an array may be controlled to function as a camera aperture and/or as a camera shutter. For example, a controller may cause the array to function as a shutter by causing the MEMS devices to open for a predetermined period of time. The predetermined period of time may be based, at least in part, on input received from a user, the intensity of ambient light, the intensity of a flash, the size of the camera aperture, etc. Some embodiments provide a variable aperture device that does not add significant thickness or cost to a camera module. Such embodiments may enable a camera to function well in both bright and dark light, to control depth of field, etc.
摘要翻译：一些实施例包括至少一个包括基于微机电系统（“MEMS”）的光调制装置的阵列。阵列的元件可以被配置为在处于第一配置时吸收和/或反射光，并且当处于第二位置时透射光。这样的阵列可以被控制为用作相机孔径和/或用作相机快门。例如，控制器可以通过使MEMS器件打开预定时间段而使阵列用作快门。该预定时间段可以至少部分地基于从用户接收的输入，环境光的强度，闪光的强度，照相机孔径的大小等。一些实施例提供了一种可变光圈装置，其中对相机模块不会增加显着的厚度或成本。这样的实施例可以使照相机在亮光和暗光中都能良好地工作，以控制景深等。

9. 发明申请

WO2012009279A1 CAMERA FLASH SYSTEM CONTROLLED VIA MEMS ARRAY 审中-公开
标题翻译：通过MEMS阵列控制的摄像机闪光系统
公开(公告)号：WO2012009279A1
公开(公告)日：2012-01-19
申请号：PCT/US2011/043572
申请日：2011-07-11
申请人： QUALCOMM MEMS TECHNOLOGIES, INC. , KOTHARI, Manish , GUDLAVALLETI, Sauri
发明人： KOTHARI, Manish , GUDLAVALLETI, Sauri
IPC分类号： G03B15/05
CPC分类号： G03B15/05 , G03B2215/05 , G03B2215/0592
摘要： A camera flash system including a light source and an array (100) that includes MEMS -based light -modulating devices (12a, 12b) disposed in front the light source. The camera flash system controls the array to transmit light through, or substantially prevent the transmission of light through, predetermined areas of the array. In some embodiments, the array may be controlled in response to input from a user, in response to detected ambient light conditions and/or in response to the proximity of a detected subject or other detected features. For example, the camera flash system may control the array to substantially prevent the transmission of light through an area of the array that is between the light source and the eyes of a detected subject.
摘要翻译：一种包括光源和阵列（100）的相机闪光灯系统，包括设置在光源前面的基于MEMS的光调制装置（12a，12b）。相机闪光灯系统控制阵列以透射光线，或基本上防止光线穿过阵列的预定区域。在一些实施例中，可以响应于检测到的环境光条件和/或响应于检测到的对象或其他检测到的特征的接近度而响应于来自用户的输入来控制阵列。例如，相机闪光灯系统可以控制阵列以基本上防止光通过阵列的位于被检测物体的光源和眼睛之间的区域的透射。

10. 发明申请

WO2009105373A2 MICROELECTROMECHANICAL DEVICE WITH THERMAL EXPANSION BALANCING LAYER OR STIFFENING LAYER 审中-公开
标题翻译：具有热膨胀平衡层或强化层的微电子器件
公开(公告)号：WO2009105373A2
公开(公告)日：2009-08-27
申请号：PCT/US2009/033818
申请日：2009-02-11
申请人： QUALCOMM MEMS TECHNOLOGIES, INC. , GUDLAVALLETI, Sauri , CHUI, Clarence
发明人： GUDLAVALLETI, Sauri , CHUI, Clarence
IPC分类号： B81B3/00
CPC分类号： B81B3/0072 , B81B2201/042 , G02B26/001 , Y10T29/49002
摘要： An interferometric modulating device is provided with a thermal expansion balancing layer on a side of the movable flexible layer opposite the movable reflector such that when temperature changes the distance between the movable reflector and the optical stack does not change significantly, thereby leading to stable color. Additionally, an interferometric modulating device is provided with a stiffening layer between the movable flexible layer and the movable reflector and at least one hollow void exists on the surface where the movable reflector and the stiffening layer contact each other so that the movable reflector is more rigid to bending, thereby reducing the temperature sensitivity of the movable reflector.
摘要翻译：干涉式调制装置在可移动柔性层的与可移动反射器相对的一侧上设置有热膨胀平衡层，使得当温度变化时，可移动反射器和光学堆叠之间的距离不会显着变化，从而导致稳定的颜色。此外，干涉式调制装置在可移动柔性层和可移动反射器之间设置有加强层，并且在可移动反射器和加强层彼此接触的表面上存在至少一个中空空隙，使得可移动反射器更刚性以弯曲，从而降低可移动反射器的温度灵敏度。

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