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1. 发明申请

WO2006062987A2 APPARATUS, SYSTEM AND METHOD FOR OPTICALLY ANALYZING SUBSTRATE 审中-公开
标题翻译：用于光学分析基板的装置，系统和方法
公开(公告)号：WO2006062987A2
公开(公告)日：2006-06-15
申请号：PCT/US2005044146
申请日：2005-12-07
申请人： INNEROPTIC TECHNOLOGY INC , KELLER KURTIS PIERCE , GREEN CAROLINE KELLY , STATE ANDREI , WAX ADAM
发明人： KELLER KURTIS PIERCE , GREEN CAROLINE KELLY , STATE ANDREI , WAX ADAM
IPC分类号： A61B6/00
CPC分类号： G01N21/47 , A61B5/0059 , A61B5/0086 , A61B5/14532 , A61B5/445
摘要： An apparatus for optically analyzing a substrate. The apparatus includes: (a) a light source for directing light onto the substrate; (b) optics for creating an optical path from light reflected from the substrate; and (c) a multiple wavelength imaging optical subsystem positioned in the optical path. The multiple wavelength imaging optical subsystem includes: (i) one or more filters which are capable of one or both of: (1) being alternatively or sequentially interposed in the optical path to extract one or more of wavelengths or wavelength bands of interest; or (2) having their wavelength selectivity adjusted to extract one or more wavelengths or wavelength bands of interest; and (ii) one or more imaging devices positioned to image the extracted wavelengths or wavelength bands of interest from the one or more filters; (d) an imaging device positioned in the optical path. Also a method with the apparatus.
摘要翻译：一种用于光学分析衬底的装置。该装置包括：（a）用于将光引导到基板上的光源; （b）用于从基板反射的光产生光路的光学元件; 和（c）位于光路中的多波长成像光学子系统。多波长成像光学子系统包括：（i）能够具有以下之一或两者的一个或多个滤波器：（1）交替地或顺序插入在光路中以提取感兴趣的波长或波长带中的一个或多个; 或（2）调节其波长选择性以提取感兴趣的一个或多个波长或波长带; 以及（ii）一个或多个成像装置，其定位成从所述一个或多个滤光片成像所提取的所述感兴趣的波长或波长带; （d）位于光路中的成像装置。也是该装置的方法。

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