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1. 发明授权

US08511151B2 Pressure sensor with semiconductor pressure measuring transducer 有权
标题翻译：带有半导体压力测量传感器的压力传感器
公开(公告)号：US08511151B2
公开(公告)日：2013-08-20
申请号：US13203002
申请日：2010-02-02
申请人： Raimund Becher , Ralf Nurnberger , Fred Haker , Olaf Krusemark , Olaf Textor
发明人： Raimund Becher , Ralf Nurnberger , Fred Haker , Olaf Krusemark , Olaf Textor
IPC分类号： G01L9/00
CPC分类号： G01L19/0046 , G01L19/04
摘要： A pressure sensor, comprising: a semiconductor pressure measuring transducer having a measuring membrane and a circuit for transducing a deformation of the measuring membrane into a signal; a pressure transfer structure having a hydraulic path, which extends through a solid body between a first a second opening. The first opening is sealed by an isolating diaphragm, which is contactable with a pressure, in order to introduce the pressure to be measured into the hydraulic path. The hydraulic path opens, at the second opening, into a transducer chamber, in which the pressure measuring transducer is arranged and which is sealed by the measuring membrane of the pressure measuring transducer. The hydraulic path contains a transfer liquid; a filling element, which is arranged in the transducer chamber, in order to fill hollow spaces between metal walls of the transducer chamber and the semiconductor pressure measuring transducer. An insulator plate, which is arranged in the transducer chamber between the measuring membrane and a wall of the transducer chamber lying opposite the measuring membrane; wherein the insulator plate is affixed to the filling element or is embodied as one piece with the filling element.
摘要翻译：一种压力传感器，包括：半导体压力测量换能器，具有测量膜和用于将所述测量膜变形为信号的电路; 具有液压路径的压力传递结构，其在第一第二开口之间延伸穿过固体。第一开口由可与压力接触的隔离膜密封，以将待测量的压力引入到液压路径中。液压通道在第二个开口处打开一个传感器腔室，其中压力测量传感器被布置在该传感器腔室中，并由压力测量传感器的测量膜密封。液压路径包含转移液体; 填充元件布置在换能器室中，以便填充换能器室的金属壁和半导体压力测量换能器之间的中空空间。绝缘板，布置在传感器室中，位于测量膜与位于测量膜相对的换能器室的壁之间; 其中所述绝缘板被固定到所述填充元件上，或者与所述填充元件实施为一体。

2. 发明申请

US20110303023A1 PRESSURE SENSOR WITH SEMICONDUCTOR PRESSURE MEASURING TRANSDUCER 有权
标题翻译：带半导体压力测量传感器的压力传感器
公开(公告)号：US20110303023A1
公开(公告)日：2011-12-15
申请号：US13203002
申请日：2010-02-02
申请人： Raimund Becher , Ralf Nurnberger , Fred Haker , Olaf Krusemark , Olaf Textor
发明人： Raimund Becher , Ralf Nurnberger , Fred Haker , Olaf Krusemark , Olaf Textor
IPC分类号： G01L1/02
CPC分类号： G01L19/0046 , G01L19/04
摘要： A pressure sensor, comprising: a semiconductor pressure measuring transducer having a measuring membrane and a circuit for transducing a deformation of the measuring membrane into a signal; a pressure transfer structure having a hydraulic path, which extends through a solid body between a first a second opening. The first opening is sealed by an isolating diaphragm, which is contactable with a pressure, in order to introduce the pressure to be measured into the hydraulic path. The hydraulic path opens, at the second opening, into a transducer chamber, in which the pressure measuring transducer is arranged and which is sealed by the measuring membrane of the pressure measuring transducer. The hydraulic path contains a transfer liquid; a filling element, which is arranged in the transducer chamber, in order to fill hollow spaces between metal walls of the transducer chamber and the semiconductor pressure measuring transducer. An insulator plate, which is arranged in the transducer chamber between the measuring membrane and a wall of the transducer chamber lying opposite the measuring membrane; wherein the insulator plate is affixed to the filling element or is embodied as one piece with the filling element.
摘要翻译：一种压力传感器，包括：半导体压力测量换能器，具有测量膜和用于将所述测量膜变形为信号的电路; 具有液压路径的压力传递结构，其在第一第二开口之间延伸穿过固体。第一开口由可与压力接触的隔离膜密封，以将待测量的压力引入到液压路径中。液压通道在第二个开口处打开一个传感器腔室，其中压力测量传感器被布置在该传感器腔室中，并由压力测量传感器的测量膜密封。液压路径包含转移液体; 填充元件布置在换能器室中，以便填充换能器室的金属壁和半导体压力测量换能器之间的中空空间。绝缘板，布置在传感器室中，位于测量膜与位于测量膜相对的换能器室的壁之间; 其中所述绝缘板被固定到所述填充元件上，或者与所述填充元件实施为一体。

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