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1. 发明申请

US20130154203A1 DEVICE FOR TREATING SURFACES OF WAFER-SHAPED ARTICLES AND GRIPPING PIN FOR USE IN THE DEVICE 有权
标题翻译：用于处理波形文章表面的设备和用于设备中的传送PIN
公开(公告)号：US20130154203A1
公开(公告)日：2013-06-20
申请号：US13328212
申请日：2011-12-16
申请人： Ulrich TSCHINDERLE , Andreas GLEISSNER , Thomas WIRNSBERGER , Franz KUMNIG , Rainer OBWEGER
发明人： Ulrich TSCHINDERLE , Andreas GLEISSNER , Thomas WIRNSBERGER , Franz KUMNIG , Rainer OBWEGER
IPC分类号： B23B31/18
CPC分类号： H01L21/68728 , H01L21/67051 , H01L21/68785 , Y10T279/17213
摘要： A device for processing wafer-shaped articles comprises a rotary chuck having a series of pins adapted to hold a wafer shaped article on the rotary chuck. Each of the pins comprises a cylindrical body and a projecting gripping portion formed integrally therewith. The cylindrical body and gripping portion are made from a ceramic material. The gripping portion comprises cylindrical surfaces having a common generatrix with surfaces of the cylindrical body.
摘要翻译：用于处理晶片状物品的装置包括具有适于将晶片成形物品保持在旋转卡盘上的一系列销的旋转卡盘。每个销包括圆柱体和与其一体形成的突出抓握部分。圆柱体和夹持部分由陶瓷材料制成。抓握部分包括具有与圆柱体的表面共同母线的圆柱形表面。

2. 发明授权

US09633890B2 Device for treating surfaces of wafer-shaped articles and gripping pin for use in the device 有权
公开(公告)号：US09633890B2
公开(公告)日：2017-04-25
申请号：US13328212
申请日：2011-12-16
申请人： Ulrich Tschinderle , Andreas Gleissner , Thomas Wirnsberger , Franz Kumnig , Rainer Obweger
发明人： Ulrich Tschinderle , Andreas Gleissner , Thomas Wirnsberger , Franz Kumnig , Rainer Obweger
IPC分类号： B23B31/18 , H01L21/687 , H01L21/67
CPC分类号： H01L21/68728 , H01L21/67051 , H01L21/68785 , Y10T279/17213
摘要： A device for processing wafer-shaped articles comprises a rotary chuck having a series of pins adapted to hold a wafer shaped article on the rotary chuck. Each of the pins comprises a cylindrical body and a projecting gripping portion formed integrally therewith. The cylindrical body and gripping portion are made from a ceramic material. The gripping portion comprises cylindrical surfaces having a common generatrix with surfaces of the cylindrical body.

3. 发明申请

US20130233356A1 PROCESS AND APPARATUS FOR TREATING SURFACES OF WAFER-SHAPED ARTICLES 审中-公开
标题翻译：用于处理波浪形文字表面的方法和装置
公开(公告)号：US20130233356A1
公开(公告)日：2013-09-12
申请号：US13418034
申请日：2012-03-12
申请人： Rainer OBWEGER , Michael BRUGGER , Franz KUMNIG
发明人： Rainer OBWEGER , Michael BRUGGER , Franz KUMNIG
IPC分类号： B08B3/02 , B08B3/04
CPC分类号： B08B3/02 , B08B3/04
摘要： An apparatus and method for processing wafer-shaped articles comprises an array of nozzles that are stationary in use, and are individually controlled to simulate the action of a moving boom arm without the actual need for such an arm. Preferably three such arrays are provided, for dispensing three different types of liquid at various process stages. The computer control of the nozzle valves may cause only one nozzle of each array to be open at any given time, or may cause a pair of adjacent nozzles to be open simultaneously.
摘要翻译：用于处理晶片形物品的装置和方法包括在使用中是静止的喷嘴阵列，并且被单独控制以模拟移动臂臂的动作，而不需要这种臂。优选地，提供三个这样的阵列，用于在各种工艺阶段分配三种不同类型的液体。喷嘴阀的计算机控制可能导致每个阵列只有一个喷嘴在任何给定的时间打开，或者可能导致一对相邻的喷嘴同时打开。

4. 发明申请

US20110304107A1 DEVICE FOR TREATING DISC-LIKE ARTICLES 有权
公开(公告)号：US20110304107A1
公开(公告)日：2011-12-15
申请号：US13217808
申请日：2011-08-25
申请人： Rainer OBWEGER , Franz KUMNIG , Thomas WIRNSBERGER
发明人： Rainer OBWEGER , Franz KUMNIG , Thomas WIRNSBERGER
IPC分类号： B23B31/16
CPC分类号： H01L21/68707 , H01L21/68728 , Y10T279/17615
摘要： A device for treating a disc-like article with a fluid, includes elements for dispensing a fluid onto the article and a chuck for holding and rotating the article around an axis perpendicular thereto. The chuck includes a base body, a drive ring, and gripping members for contacting the article at its edge. The gripping members are eccentrically movable with respect to the center of the article. The eccentric movement of the gripping members is driven by a drive ring rotatably mounted to the base body, so that the drive ring is rotatable against the base body around the axis. The relative rotational movement of the drive ring against the base body is carried out by either holding the base body and rotating the drive ring or by holding the drive ring and rotating the base body, whereby the to-be-held-part (drive ring or base body) is held without touching the respective to-be-held-part by magnetic force.

5. 发明申请

US20110253181A1 DEVICE FOR TREATING DISC-LIKE ARTICLES 有权
标题翻译：用于处理类似文章的设备
公开(公告)号：US20110253181A1
公开(公告)日：2011-10-20
申请号：US13133277
申请日：2010-03-25
申请人： Rainer Obweger , Franz Kumnig , Thomas Wirnsberger
发明人： Rainer Obweger , Franz Kumnig , Thomas Wirnsberger
IPC分类号： B08B3/00
CPC分类号： H01L21/68707 , H01L21/68728 , Y10T279/17615
摘要： A device for treating a disc-like article with a fluid, includes elements for dispensing a fluid onto the article and a chuck for holding and rotating the article around an axis perpendicular thereto. The chuck includes a base body, a drive ring, and gripping members for contacting the article at its edge. The gripping members are eccentrically movable with respect to the center of the article. The eccentric movement of the gripping members is driven by a drive ring rotatably mounted to the base body, so that the drive ring is rotatable against the base body around the axis. The relative rotational movement of the drive ring against the base body is carried out by either holding the base body and rotating the drive ring or by holding the drive ring and rotating the base body, whereby the to-be-held-part (drive ring or base body) is held without touching the respective to-be-held-part by magnetic force.
摘要翻译：用于用流体处理盘状物品的装置包括用于将流体分配到物品上的元件和用于围绕垂直于其的轴保持和旋转物品的卡盘。卡盘包括基体，驱动环和用于在其边缘处接触物品的夹持构件。夹持构件相对于制品的中心偏心移动。夹持构件的偏心运动由可旋转地安装到基体的驱动环驱动，使得驱动环可围绕轴线转动抵靠基体。驱动环相对于基体的相对旋转运动通过保持基体并旋转驱动环来实现，或者通过保持驱动环并旋转基体，由此被保持部（驱动环或基体）被保持而不通过磁力接触相应的被保持部件。

6. 发明授权

US08668777B2 Process for treating a semiconductor wafer 有权
标题翻译：处理半导体晶片的方法
公开(公告)号：US08668777B2
公开(公告)日：2014-03-11
申请号：US12976510
申请日：2010-12-22
申请人： Harald Okorn-Schmidt , Dieter Frank , Franz Kumnig
发明人： Harald Okorn-Schmidt , Dieter Frank , Franz Kumnig
IPC分类号： C23G1/02
CPC分类号： H01L21/02052 , C03C23/0075 , C11D7/08 , C11D11/0035 , C11D11/0047 , C11D11/0064 , H01L21/02057
摘要： Mixtures containing concentrated sulfuric acid used for stripping photoresist from semiconductor wafer, such as SOM and SPM mixtures, are more quickly removed from a wafer surface using another liquid also containing high concentration of sulfuric acid, with the second liquid furthermore containing controlled small amounts of fluoride ion. The second liquid renders the wafer surface hydrophobic, which permits easy removal of the sulfuric acid therefrom by spinning and/or rinsing.
摘要翻译：用于从半导体晶片剥离光致抗蚀剂如SOM和SPM混合物的浓硫酸的混合物使用另外还含有高浓度硫酸的液体从晶片表面更快速地除去，第二种液体还含有受控的少量氟化物离子。第二液体使晶片表面疏水，这允许通过旋转和/或漂洗从其中容易地除去硫酸。

7. 发明授权

US08646767B2 Device for holding wafer shaped articles 有权
标题翻译：用于保持晶圆形物品的装置
公开(公告)号：US08646767B2
公开(公告)日：2014-02-11
申请号：US12842836
申请日：2010-07-23
申请人： Franz Kumnig , Thomas Wirnsberger , Rainer Obweger
发明人： Franz Kumnig , Thomas Wirnsberger , Rainer Obweger
IPC分类号： B25B5/08
CPC分类号： H01L21/68728
摘要： A device for holding wafer-shaped articles, such as semiconductor wafers, is equipped with a series of pins that are brought into contact with a peripheral edge of the wafer-shaped article, under control of a common gear ring or a series of conjointly operated gear sectors. In the regions of the gear ring or gear sectors engaging the pin assemblies, those elements are designed to yield more readily than other regions of the gear ring or gear sectors, to accommodate differential thermal expansion of the chuck components in the vicinity of the pin assemblies.
摘要翻译：用于保持诸如半导体晶片的晶片状物品的装置配备有一系列销，其在与普通齿圈或一系列联合操作的一系列控制下与晶片状物品的周缘接触齿轮行业。在啮合销组件的齿圈或齿轮部分的区域中，这些元件被设计成比齿圈或齿轮部分的其它区域更容易产生，以适应销组件附近的卡盘部件的不同热膨胀。

8. 发明授权

US08490634B2 Device for treating disc-like articles 有权
标题翻译：用于治疗椎间盘状物品的装置
公开(公告)号：US08490634B2
公开(公告)日：2013-07-23
申请号：US13133277
申请日：2010-03-25
申请人： Rainer Obweger , Franz Kumnig , Thomas Wirnsberger
发明人： Rainer Obweger , Franz Kumnig , Thomas Wirnsberger
IPC分类号： B08B3/00
CPC分类号： H01L21/68707 , H01L21/68728 , Y10T279/17615
摘要： A device for treating a disc-like article with a fluid, includes elements for dispensing a fluid onto the article and a chuck for holding and rotating the article around an axis perpendicular thereto. The chuck includes a base body, a drive ring, and gripping members for contacting the article at its edge. The gripping members are eccentrically movable with respect to the center of the article and driven by a drive ring rotatably mounted to the base body, so that the drive ring is rotatable against the base body around the axis. The relative rotational movement of the drive ring against the base body is carried out by either holding the base body and rotating the drive ring or by holding the drive ring and rotating the base body, whereby the to-be-held-part (drive ring or base body) is held without touching the respective to-be-held-part by magnetic force.
摘要翻译：用于用流体处理盘状物品的装置包括用于将流体分配到物品上的元件和用于围绕垂直于其的轴保持和旋转物品的卡盘。卡盘包括基体，驱动环和用于在其边缘处接触物品的夹持构件。夹持构件相对于制品的中心可偏心移动，并由可旋转地安装到基体的驱动环驱动，使得驱动环能绕基体旋转抵靠基体。驱动环相对于基体的相对旋转运动通过保持基体并旋转驱动环来实现，或者通过保持驱动环并旋转基体，由此被保持部（驱动环或基体）被保持而不通过磁力接触相应的被保持部件。

9. 发明授权

US08833380B2 Device for treating disc-like articles 有权
标题翻译：用于治疗椎间盘状物品的装置
公开(公告)号：US08833380B2
公开(公告)日：2014-09-16
申请号：US13217808
申请日：2011-08-25
申请人： Rainer Obweger , Franz Kumnig , Thomas Wirnsberger
发明人： Rainer Obweger , Franz Kumnig , Thomas Wirnsberger
IPC分类号： B23B31/16 , H01L21/687
CPC分类号： H01L21/68707 , H01L21/68728 , Y10T279/17615
摘要： A device for treating a disc-like article with a fluid, including elements for dispensing a fluid onto the article and a chuck for holding and rotating the article around an axis perpendicular thereto, the chuck including a base body, a drive ring, and gripping members for contacting the article at its edge. The gripping members are eccentrically movable with respect to the center of the article and driven by a drive ring rotatably mounted to the base body so that the drive ring is rotatable against the base body around the axis. The relative rotational movement of the drive ring against the base body is carried out by either holding the base body and rotating the drive ring or by holding the drive ring and rotating the base body, whereby the to-be-held-part (drive ring or base body) is held without touching the respective to-be-held-part by magnetic force.
摘要翻译：一种用于用流体处理盘状物品的装置，包括用于将物体分配到物品上的元件和用于将制品围绕垂直于其的轴保持和旋转的卡盘，卡盘包括基体，驱动环和夹紧成员联系文章的边缘。夹持构件相对于制品的中心偏心移动，并由可旋转地安装在基体上的驱动环驱动，使得驱动环能绕基体旋转抵靠基体。驱动环相对于基体的相对旋转运动通过保持基体并旋转驱动环来实现，或者通过保持驱动环并旋转基体，由此被保持部（驱动环或基体）被保持而不通过磁力接触相应的被保持部件。

10. 发明申请

US20120160276A1 PROCESS FOR TREATING A SEMICONDUCTOR WAFER 有权
标题翻译：用于处理半导体波形的方法
公开(公告)号：US20120160276A1
公开(公告)日：2012-06-28
申请号：US12976510
申请日：2010-12-22
申请人： Harald OKORN-SCHMIDT , Dieter FRANK , Franz KUMNIG
发明人： Harald OKORN-SCHMIDT , Dieter FRANK , Franz KUMNIG
IPC分类号： B08B3/00
CPC分类号： H01L21/02052 , C03C23/0075 , C11D7/08 , C11D11/0035 , C11D11/0047 , C11D11/0064 , H01L21/02057
摘要： Mixtures containing concentrated sulfuric acid used for stripping photoresist from semiconductor wafer, such as SOM and SPM mixtures, are more quickly removed from a wafer surface using another liquid also containing high concentration of sulfuric acid, with the second liquid furthermore containing controlled small amounts of fluoride ion. The second liquid renders the wafer surface hydrophobic, which permits easy removal of the sulfuric acid therefrom by spinning and/or rinsing.
摘要翻译：用于从半导体晶片剥离光致抗蚀剂如SOM和SPM混合物的浓硫酸的混合物使用另外还含有高浓度硫酸的液体从晶片表面更快速地除去，第二种液体还含有受控的少量氟化物离子。第二液体使晶片表面疏水，这允许通过旋转和/或漂洗从其中容易地除去硫酸。

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