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1. 发明申请

US20130162102A1 TUNABLE ULTRASOUND TRANSDUCERS 有权
标题翻译：超声波超声波传感器
公开(公告)号：US20130162102A1
公开(公告)日：2013-06-27
申请号：US13337499
申请日：2011-12-27
申请人： Firas Sammoura , Sang-Gook Kim
发明人： Firas Sammoura , Sang-Gook Kim
IPC分类号： H01L41/02
CPC分类号： B06B1/0292 , B06B1/0603 , H01L41/0973
摘要： A variety of micromachined structures are disclosed for use in DC-tunable ultrasound transducers.
摘要翻译：公开了用于DC可调谐超声换能器的各种微加工结构。

2. 发明授权

US08267486B2 Apparatus and method of detecting microchip hermeticity 有权
标题翻译：检测微芯片气密性的装置和方法
公开(公告)号：US08267486B2
公开(公告)日：2012-09-18
申请号：US12342140
申请日：2008-12-23
申请人： Firas Sammoura , Kuang Yang
发明人： Firas Sammoura , Kuang Yang
IPC分类号： B60T8/88
CPC分类号： G01M3/226 , B81B2201/0235 , B81B2201/0242 , B81C99/0045
摘要： A microchip system has a package forming a hermetically sealed interior, and MEMS structure within the interior. The system also has a gas sensor for detecting the concentration of at least one of oxygen or hydrogen within the interior.
摘要翻译：微芯片系统具有形成密封内部的封装和内部的MEMS结构。该系统还具有用于检测内部的氧气或氢气中的至少一种的浓度的气体传感器。

3. 发明申请

US20070287634A1 Waveguide-based MEMS tunable filters and phase shifters 有权
标题翻译：基于波导的MEMS可调谐滤波器和移相器
公开(公告)号：US20070287634A1
公开(公告)日：2007-12-13
申请号：US11452114
申请日：2006-06-12
申请人： Liwei Lin , Firas Sammoura
发明人： Liwei Lin , Firas Sammoura
IPC分类号： C04B35/45
CPC分类号： H01P1/208 , H01P1/182
摘要： An actively tunable waveguide-based iris filter having a first part including a first portion of a deformable iris filter cavity having an inlet and an outlet; a second part operatively coupled with the first part and including a second portion of the deformable iris filter cavity having a deformable membrane operatively coupled with the first portion of a deformable iris filter cavity; the first portion and the second portion together forming the deformable iris filter cavity of the tunable waveguide-based iris filter; and means for moving the deformable membrane, whereby movement of the deformable membrane changes the geometry of the deformable iris filter cavity for causing a change in the frequency of a signal being filtered by the filter. The tunable filter is fabricated using a MEMS-based process including a plastic micro embossing process and a gold electroplating process. Prototype filters were fabricated and measured with bandwidth of 4.05 GHz centered at 94.79 GHz with a minimum insertion loss of 2.37 dB and return loss better than 15 dB. A total of 2.59 GHz center frequency shift was achieved when membranes deflected from −50 μm to +150 μm.
摘要翻译：一种可主动调谐的基于波导的虹膜滤光器，其具有第一部分，该第一部分包括具有入口和出口的可变形虹膜滤光腔的第一部分; 第二部分与第一部分可操作地联接并且包括可变形虹膜过滤器空腔的第二部分，其具有可操作地与可变形虹膜过滤器腔的第一部分耦合的可变形膜; 所述第一部分和所述第二部分一起形成所述可调谐波导基虹膜滤光器的可变形虹膜滤光腔; 以及用于移动可变形膜的装置，由此可变形膜的运动改变了可变形虹膜过滤腔的几何形状，以引起被过滤器过滤的信号频率的变化。可调滤波器使用基于MEMS的工艺制造，包括塑料微压花工艺和金电镀工艺。原型滤波器的制作和测量带宽为4.05 GHz，中心为94.79 GHz，插入损耗最小为2.37 dB，回波损耗优于15 dB。当膜从-50 mum偏转到+150 mum时，总共达到2.59 GHz的中心频移。

4. 发明授权

US08438923B2 MEMS device with opposite polarity spring bimorph 有权
标题翻译：具有相反极性的微机电装置弹簧双压电晶片
公开(公告)号：US08438923B2
公开(公告)日：2013-05-14
申请号：US12413196
申请日：2009-03-27
申请人： Firas Sammoura , Kuang Yang
发明人： Firas Sammoura , Kuang Yang
IPC分类号： G01P15/09
CPC分类号： G01P15/0922 , G01C19/5642 , G01P15/18 , G01P2015/084
摘要： A MEMS device has a mass supported at least in part by a spring. Among other things, the spring has first and second layers, and first and a second electrodes. The first and second layers are between the first and second electrodes, and the first and second layers, which are oppositely polarized, form a bimorph.
摘要翻译： MEMS器件具有至少部分由弹簧支撑的质量。其中，弹簧具有第一和第二层，以及第一和第二电极。第一和第二层位于第一和第二电极之间，并且相反极化的第一和第二层形成双压电晶片。

5. 发明申请

US20100214185A1 PLASTIC WAVEGUIDE-FED HORN ANTENNA 审中-公开
标题翻译：塑料波导天花板天线
公开(公告)号：US20100214185A1
公开(公告)日：2010-08-26
申请号：US12513496
申请日：2007-11-01
申请人： Firas Sammoura , Liwei Lin
发明人： Firas Sammoura , Liwei Lin
IPC分类号： H01Q13/02 , C25D3/48
CPC分类号： H01Q13/02 , C25D5/44 , C25D5/56 , H01Q13/0225
摘要： A plastic, waveguide-fed, horn antenna is manufactured using a three-dimensional (3D), polymeric micro hot embossing process. Two cavity resonators may be designed to reduce the impedance mismatch between the pyramidal horn antenna and the feeding waveguide. The waveguide-fed antenna may be fabricated using a self-aligned 3D plastic hot embossing process followed by a selective electroplating and sealing process to coat an approximately 8 μm-thick gold layer around the internal surfaces of the system. As such, this plastic, low-cost manufacturing process may be used to replace the expensive metallic components for millimeter-wave systems and provides a scalable and integrated process for manufacturing an array of antenna.
摘要翻译：使用三维（3D）聚合物微热压花工艺制造塑料波导管喇叭天线。可以设计两个腔谐振器以减少金字塔形喇叭天线和馈电波导之间的阻抗失配。波导馈电天线可以使用自对准3D塑料热压花工艺制造，随后是选择性电镀和密封工艺，以在系统的内表面周围涂覆约8μm厚的金层。因此，这种塑料低成本的制造工艺可用于代替用于毫米波系统的昂贵的金属部件，并提供用于制造天线阵列的可扩展和集成的工艺。

6. 发明申请

US20090294879A1 Method for Capping a MEMS Wafer 有权
标题翻译：封装MEMS晶圆的方法
公开(公告)号：US20090294879A1
公开(公告)日：2009-12-03
申请号：US12468185
申请日：2009-05-19
申请人： Milind Bhagavat , Erik Tarvin , Firas Sammoura , Kuang Yang , Andrew Sparks
发明人： Milind Bhagavat , Erik Tarvin , Firas Sammoura , Kuang Yang , Andrew Sparks
IPC分类号： H01L29/84 , H01L21/50
CPC分类号： H01L23/10 , B81C1/00269 , B81C1/00293 , B81C2203/0109 , H01L2924/0002 , H01L2924/00
摘要： A method for capping a MEMS wafer to form a hermetically sealed device. The method includes applying a glass bonding agent to the cap wafer and burning off organic material in the glass bonding agent. The cap wafer/glass bonding agent combination is then cleaned to reduce lead in the combination. The cleaning is preferably accomplished using an oxygen plasma. The MEMS device is coated with a WASA agent. The cap wafer is then bonded to the MEMS wafer by heating this combination in a capping gas atmosphere of hydrogen molecules in a gas such as nitrogen, argon or neon. This method of capping the MEMS wafer can reduce stiction in the MEMS device.
摘要翻译：一种用于封装MEMS晶片以形成密封装置的方法。该方法包括将玻璃粘合剂施加到盖晶片上并在玻璃粘合剂中烧掉有机材料。然后清洁盖片/玻璃粘合剂组合以减少组合中的铅。清洁优选使用氧等离子体实现。 MEMS器件涂覆有WASA试剂。然后通过在诸如氮气，氩气或氖气体中的氢分子的封盖气体气氛中加热该组合，将盖晶片结合到MEMS晶片。这种封装MEMS晶片的方法可以降低MEMS器件中的静电。

7. 发明授权

US08058144B2 Method for capping a MEMS wafer 有权
标题翻译：封装MEMS晶圆的方法
公开(公告)号：US08058144B2
公开(公告)日：2011-11-15
申请号：US12468185
申请日：2009-05-19
申请人： Milind Bhagavat , Erik Tarvin , Firas Sammoura , Kuang Yang , Andrew Sparks
发明人： Milind Bhagavat , Erik Tarvin , Firas Sammoura , Kuang Yang , Andrew Sparks
IPC分类号： H01L21/46 , C03B29/00
CPC分类号： H01L23/10 , B81C1/00269 , B81C1/00293 , B81C2203/0109 , H01L2924/0002 , H01L2924/00
摘要： A method for capping a MEMS wafer to form a hermetically sealed device. The method includes applying a glass bonding agent to the cap wafer and burning off organic material in the glass bonding agent. The cap wafer/glass bonding agent combination is then cleaned to reduce lead in the combination. The cleaning is preferably accomplished using an oxygen plasma. The MEMS device is coated with a WASA agent. The cap wafer is then bonded to the MEMS wafer by heating this combination in a capping gas atmosphere of hydrogen molecules in a gas such as nitrogen, argon or neon. This method of capping the MEMS wafer can reduce stiction in the MEMS device.
摘要翻译：一种用于封装MEMS晶片以形成密封装置的方法。该方法包括将玻璃粘合剂施加到盖晶片上并在玻璃粘合剂中烧掉有机材料。然后清洁盖片/玻璃粘合剂组合以减少组合中的铅。清洁优选使用氧等离子体实现。 MEMS器件涂覆有WASA试剂。然后通过在诸如氮气，氩气或氖气体中的氢分子的封盖气体气氛中加热该组合，将盖晶片结合到MEMS晶片。这种封装MEMS晶片的方法可以降低MEMS器件中的静电。

8. 发明授权

US07728701B2 Waveguide-based MEMS tunable filters and phase shifters 有权
标题翻译：基于波导的MEMS可调谐滤波器和移相器
公开(公告)号：US07728701B2
公开(公告)日：2010-06-01
申请号：US11452114
申请日：2006-06-12
申请人： Liwei Lin , Firas Sammoura
发明人： Liwei Lin , Firas Sammoura
IPC分类号： H01P1/208 , H01P1/18 , H01P7/06
CPC分类号： H01P1/208 , H01P1/182
摘要： An actively tunable waveguide-based iris filter having a first part including a first portion of a deformable iris filter cavity having an inlet and an outlet; a second part operatively coupled with the first part and including a second portion of the deformable iris filter cavity having a deformable membrane operatively coupled with the first portion of a deformable iris filter cavity; the first portion and the second portion together forming the deformable iris filter cavity of the tunable waveguide-based iris filter; and means for moving the deformable membrane, whereby movement of the deformable membrane changes the geometry of the deformable iris filter cavity for causing a change in the frequency of a signal being filtered by the filter. The tunable filter is fabricated using a MEMS-based process including a plastic micro embossing process and a gold electroplating process. Prototype filters were fabricated and measured with bandwidth of 4.05 GHz centered at 94.79 GHz with a minimum insertion loss of 2.37 dB and return loss better than 15 dB. A total of 2.59 GHz center frequency shift was achieved when membranes deflected from −50 μm to +150 μm.
摘要翻译：一种可主动调谐的基于波导的虹膜滤光器，其具有第一部分，该第一部分包括具有入口和出口的可变形虹膜滤光腔的第一部分; 第二部分与第一部分可操作地联接并且包括可变形虹膜过滤器空腔的第二部分，其具有可操作地与可变形虹膜过滤器腔的第一部分耦合的可变形膜; 所述第一部分和所述第二部分一起形成所述可调谐波导基虹膜滤光器的可变形虹膜滤光腔; 以及用于移动可变形膜的装置，由此可变形膜的运动改变了可变形虹膜过滤腔的几何形状，以引起被过滤器过滤的信号频率的变化。可调滤波器使用基于MEMS的工艺制造，包括塑料微压花工艺和金电镀工艺。原型滤波器的制作和测量带宽为4.05 GHz，中心为94.79 GHz，插入损耗最小为2.37 dB，回波损耗优于15 dB。当膜从-50μm偏转到+150μm时，总共获得2.59GHz的中心频移。

9. 发明授权

US08723399B2 Tunable ultrasound transducers 有权
标题翻译：可调谐超声波换能器
公开(公告)号：US08723399B2
公开(公告)日：2014-05-13
申请号：US13337499
申请日：2011-12-27
申请人： Firas Sammoura , Sang-Gook Kim
发明人： Firas Sammoura , Sang-Gook Kim
IPC分类号： H01L41/08
CPC分类号： B06B1/0292 , B06B1/0603 , H01L41/0973
摘要： A variety of micromachined structures are disclosed for use in DC-tunable ultrasound transducers.
摘要翻译：公开了用于DC可调谐超声换能器的各种微加工结构。

10. 发明申请

US20100242604A1 MEMS Device with Opposite Polarity Spring Bimorph 有权
标题翻译：具有相反极性的MEMS器件弹簧双压电晶片
公开(公告)号：US20100242604A1
公开(公告)日：2010-09-30
申请号：US12413196
申请日：2009-03-27
申请人： Firas Sammoura , Kuang Yang
发明人： Firas Sammoura , Kuang Yang
IPC分类号： G01P15/09 , H01L29/66
CPC分类号： G01P15/0922 , G01C19/5642 , G01P15/18 , G01P2015/084
摘要： A MEMS device has a mass supported at least in part by a spring. Among other things, the spring has first and second layers, and first and a second electrodes. The first and second layers are between the first and second electrodes, and the first and second layers, which are oppositely polarized, form a bimorph.
摘要翻译： MEMS器件具有至少部分由弹簧支撑的质量。其中，弹簧具有第一和第二层，以及第一和第二电极。第一和第二层位于第一和第二电极之间，并且相反极化的第一和第二层形成双压电晶片。

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