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    • 5. 发明授权
    • Method of fabrication of programmable memory microelectric device
    • 可编程存储器微电子器件的制造方法
    • US08501525B2
    • 2013-08-06
    • US13150351
    • 2011-06-01
    • Faiz Dahmani
    • Faiz Dahmani
    • H01L21/00G11C11/24
    • H01L45/085H01L45/141H01L45/142H01L45/1658
    • A method of fabricating a programmable memory microelectronic device includes depositing onto a first electrode an intermediate layer of a material having a chalcogenide; depositing an ionizable metallic layer on the intermediate layer; irradiating with ultraviolet radiation the ionizable metallic layer so that metallic ions from the ionizable metallic layer diffuse into the intermediate layer to form a chalcogenide material containing metallic ions, and depositing a second electrode on the layer of chalcogenide material containing metallic ions obtained in the prior step. The second and third steps are repeated at least n times, where n is an integer greater than or equal to 1. The ionizable metallic layer deposited during the second step has a sufficiently small thickness that the metallic ions may be diffused totally during the irradiation (third) step.
    • 制造可编程存储器微电子器件的方法包括在第一电极上沉积具有硫族化物的材料的中间层; 在中间层上沉积可电离的金属层; 用紫外线照射可电离金属层,使得可离子化金属层的金属离子扩散到中间层,形成含有金属离子的硫族化物材料,并在第一步中获得的含有金属离子的硫族化物材料层上沉积第二电极 。 第二和第三步骤重复至少n次,其中n是大于或等于1的整数。在第二步骤期间沉积的可离子化金属层具有足够小的厚度,使得在照射期间金属离子可能完全扩散( 第三)步骤。
    • 8. 发明申请
    • METHOD OF FABRICATION OF PROGRAMMABLE MEMORY MICROELECTRIC DEVICE
    • 可编程存储器微电子器件的制造方法
    • US20110297910A1
    • 2011-12-08
    • US13150351
    • 2011-06-01
    • Faiz Dahmani
    • Faiz Dahmani
    • H01L21/62H01L45/00
    • H01L45/085H01L45/141H01L45/142H01L45/1658
    • A method of fabricating a programmable memory microelectronic device includes depositing onto a first electrode an intermediate layer of a material having a chalcogenide; depositing an ionizable metallic layer on the intermediate layer; irradiating with ultraviolet radiation the ionizable metallic layer so that metallic ions from the ionizable metallic layer diffuse into the intermediate layer to form a chalcogenide material containing metallic ions, and depositing a second electrode on the layer of chalcogenide material containing metallic ions obtained in the prior step. The second and third steps are repeated at least n times, where n is an integer greater than or equal to 1. The ionizable metallic layer deposited during the second step has a sufficiently small thickness that the metallic ions may be diffused totally during the irradiation (third) step.
    • 一种制造可编程存储器微电子器件的方法包括:在第一电极上沉积具有硫族化物的材料的中间层; 在中间层上沉积可电离的金属层; 用紫外线照射可电离金属层,使得可离子化金属层的金属离子扩散到中间层,形成含有金属离子的硫族化物材料,并在第一步中获得的含有金属离子的硫族化物材料层上沉积第二电极 。 第二和第三步骤重复至少n次,其中n是大于或等于1的整数。在第二步骤期间沉积的可离子化金属层具有足够小的厚度,使得在照射期间金属离子可能完全扩散( 第三)步骤。