会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 3. 发明专利
    • WAFER CARRIER
    • JPH10326825A
    • 1998-12-08
    • JP10676998
    • 1998-04-16
    • FLUOROWARE INC
    • BHATT SANJIV MEGGUM SHAWN DOLSON WAYNE C
    • B65D85/86H01L21/673H01L21/68
    • PROBLEM TO BE SOLVED: To provide a wafer carrier of superior quality which can easily cope with the charges in specification, while causing no problem in structure. SOLUTION: A wafer carrier 30 is provided with an upper part 42 with an opening and a bottom part 44 with an opening for inserting/taking out a wafer disk, a vertical front-end part member 32 equipped with such interface part 34 as an H bar, a vertical rear-end part member 36, and a pair of sidewall members 41 provided with a vertical sidewall slot 46 extending backwards from the front-end part member 32 to the rear-end part member 36. At least one of them is molded separately from other ember of the wafer carrier, and jointed with an jointing part cooperating without using an external fastener. With the rear-end part member 36 provided with another interface, the carrier is interfaced with a device while the upper side of the wafer faces upward or inverted. Members are separately formed to enable different materials to be used, while different static electricity dissipation characteristics are provided.
    • 10. 发明专利
    • WEIR VALVE
    • JPH074540A
    • 1995-01-10
    • JP3997094
    • 1994-03-10
    • FLUOROWARE INC
    • JIEFURII JIEI MATSUKENJII
    • F16K7/17F16K7/12F16K11/02F16K11/20F16K31/122
    • PURPOSE: To quickly change the flow direction of fluid by coaxially arranging two diaphragms on the upper side and the lower side of a weir, in a valve in which the diaphragms are arranged to traverse the weir so as to limit fluid flowing over the weir. CONSTITUTION: A weir 22 having two end edges 27, 28 on the upper and lower positions and an isolation plate 42 are formed in the inner chamber 14 of a valve housing 12, and a common flow duct 16 is formed on the valve housing 12 opposite to the weir 22. Further the valve housing 12 is formed with two flow ducts 18, 20 communicated to the inner chamber 14 on the opposite position to the common flow duct 16, and both 18, 20 are isolated from each other with the isolation plate 42. Two diaphragms 34, 36 are provided capable of abutting on and separating from the respective end edges 27, 28, the respective diaphragms 34, 36 are vertically moved through pressing members 38, 40 combined with pistons 55, 57, and the respective pistons 55, 57 are driven by air pressure fed/exhausted to respective expansion chambers 58, 60.