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    • 1. 发明授权
    • Supporting system for a telescope mirror
    • 望远镜支持系统
    • US4632523A
    • 1986-12-30
    • US802227
    • 1985-11-26
    • Ernst-Dieter Knohl
    • Ernst-Dieter Knohl
    • G02B7/18G02B7/182G02B7/183G02B23/02G02B5/08
    • G02B7/183
    • A supporting system is disclosed for taking up the weight components of large astronomical telescopes. The weight components act in the mirror plane and load-relieving devices are arranged at the rear side of the mirror. The load-relieving devices are arranged in concentric circles and act on the outside of the rear surface of the mirror whereat supporting forces are introduced outside of the gravity plane of the mirror. Each load-relieving device applies a compensating moment to the particular portion of the mirror to which it corresponds which counteracts the disturbing moment resulting from the force of the weight of the particular portion and the supporting force.
    • 公开了用于占用大型天文望远镜的重量组件的支撑系统。 重量分量作用在镜面中,负载释放装置设置在反射镜的后侧。 负载释放装置以同心圆布置并作用在反射镜后表面的外侧,其中支撑力被引入反射镜重力平面外。 每个卸载装置向其对应的反射镜的特定部分施加补偿力矩,其抵消由特定部分的重量和支撑力产生的干扰力矩。
    • 2. 发明申请
    • Method of producing aspherical optical surfaces
    • 制造非球面光学表面的方法
    • US20050018311A1
    • 2005-01-27
    • US10888314
    • 2004-07-08
    • Ernst-Dieter KnohlAndreas FrommeyerHermann Schubert
    • Ernst-Dieter KnohlAndreas FrommeyerHermann Schubert
    • B24B13/005G02B3/00
    • B24B13/005Y10S425/808
    • In the case of a method of producing aspherical optical surfaces of optical elements (1), in particular for use in microlithography for producing semiconductor elements, the optical element (1) is ground for example in the form of a meniscus. In a first method step, the optical element (1) is introduced into a basic form (2), which has a spherical form bed and is being held at a distance over the form bed (3). After that, an intermediate medium (6) is introduced in the basic form (2) between the optical element (1) and the form bed (3) and, subsequently the optical element (1) being removed together with the intermediate medium (6) from the basic form. Then, the spherical form bed (3) of the basic form (2) or a second basic form is transformed into an aspherical form bed (3′) computationally determined in advance. The optical element (1) is then re-introduced with the intermediate medium (6) into the basic form (2) or the second basic form, the intermediate medium (6) being sucked against the form bed (3′) by applying a vacuum. Subsequently, the optical element (1) deformed by the vacuum applied is spherically machined on a surface (7). Finally, after removing the vacuum, the surface (7′) assumes the form of an aspherical surface.
    • 在制造光学元件(1)的非球面光学表面的方法的情况下,特别是用于制造半导体元件的微光刻中,光学元件(1)例如以弯液面的形式研磨。 在第一种方法步骤中,将光学元件(1)引入具有球形床的基本形式(2),并将其保持在成型床(3)的一定距离处。 之后,在光学元件(1)和成形床(3)之间的基本形式(2)中引入中间介质(6),随后将光学元件(1)与中间介质(6)一起被去除 )从基本形式。 然后,将基本形式(2)的球形床(3)或第二基本形状转换成预先计算确定的非球面形床(3')。 然后将光学元件(1)与中间介质(6)重新引入基本形式(2)或第二基本形式,中间介质(6)通过施加一个 真空。 随后,通过施加的真空变形的光学元件(1)在表面(7)上被球形加工。 最后,在去除真空之后,表面(7')呈现非球面的形式。
    • 3. 发明授权
    • Method of producing aspherical optical surfaces
    • 制造非球面光学表面的方法
    • US07540983B2
    • 2009-06-02
    • US10888314
    • 2004-07-08
    • Ernst-Dieter KnohlAndreas FrommeyerHermann Schubert
    • Ernst-Dieter KnohlAndreas FrommeyerHermann Schubert
    • B29D11/00G02B3/00
    • B24B13/005Y10S425/808
    • In the case of a method of producing aspherical optical surfaces of optical elements (1), in particular for use in microlithography for producing semiconductor elements, the optical element (1) is ground for example in the form of a meniscus. In a first method step, the optical element (1) is introduced into a basic form (2), which has a spherical form bed and is being held at a distance over the form bed (3). After that, an intermediate medium (6) is introduced in the basic form (2) between the optical element (1) and the form bed (3) and, subsequently the optical element (1) being removed together with the intermediate medium (6) from the basic form. Then, the spherical form bed (3) of the basic form (2) or a second basic form is transformed into an aspherical form bed (3′) computationally determined in advance. The optical element (1) is then re-introduced with the intermediate medium (6) into the basic form (2) or the second basic form, the intermediate medium (6) being sucked against the form bed (3′) by applying a vacuum. Subsequently, the optical element (1) deformed by the vacuum applied is spherically machined on a surface (7). Finally, after removing the vacuum, the surface (7′) assumes the form of an aspherical surface.
    • 在制造光学元件(1)的非球面光学表面的方法的情况下,特别是用于制造半导体元件的微光刻中,光学元件(1)例如以弯液面的形式研磨。 在第一种方法步骤中,将光学元件(1)引入具有球形床的基本形式(2),并将其保持在成型床(3)的一定距离处。 之后,在光学元件(1)和成形床(3)之间的基本形式(2)中引入中间介质(6),随后将光学元件(1)与中间介质(6)一起被去除 )从基本形式。 然后,将基本形式(2)的球形床(3)或第二基本形状转换成预先计算确定的非球面形床(3')。 然后将光学元件(1)与中间介质(6)重新引入基本形式(2)或第二基本形式,中间介质(6)通过施加一个 真空。 随后,通过施加的真空变形的光学元件(1)在表面(7)上被球形加工。 最后,在去除真空之后,表面(7')呈现非球面的形式。