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1. 发明授权

US08632168B2 Piezoelectric element, liquid ejecting head, liquid ejecting apparatus, and methods for the manufacture thereof 有权
标题翻译：压电元件，液体喷射头，液体喷射装置及其制造方法
公开(公告)号：US08632168B2
公开(公告)日：2014-01-21
申请号：US13225301
申请日：2011-09-02
申请人： Chikara Kojima , Eiju Hirai
发明人： Chikara Kojima , Eiju Hirai
IPC分类号： H01L41/00 , H02N2/00 , B41J2/045
CPC分类号： H01L41/0973 , B41J2/14233 , B41J2/161 , B41J2/1631 , B41J2/1642 , B41J2/1645 , B41J2/1646 , H01L41/047 , H01L41/29
摘要： A piezoelectric element, a liquid ejecting head and a liquid ejecting apparatus that have improved reliability are provided. Methods for the manufacture thereof are also provided. A piezoelectric element includes a vibration plate having a recess in a first surface, a first electrode formed in the recess, a piezoelectric layer formed on the vibration plate and the first electrode, and a second electrode formed on the piezoelectric layer, wherein an upper surface of the first electrode forms a continuous flat surface together with the first surface.
摘要翻译：提供了具有改进的可靠性的压电元件，液体喷射头和液体喷射装置。还提供了制造方法。压电元件包括在第一表面具有凹陷的振动板，形成在凹部中的第一电极，形成在振动板上的压电层和第一电极，以及形成在压电层上的第二电极，的第一电极与第一表面一起形成连续的平坦表面。

2. 发明申请

US20120007929A1 LIQUID EJECTING HEAD AND LIQUID EJECTING APPARATUS 有权
标题翻译：液体喷射和液体喷射装置
公开(公告)号：US20120007929A1
公开(公告)日：2012-01-12
申请号：US13178378
申请日：2011-07-07
申请人： Eiju Hirai , Hiroshi Ito , Toshihiro Shimizu , Jiro Kato
发明人： Eiju Hirai , Hiroshi Ito , Toshihiro Shimizu , Jiro Kato
IPC分类号： B41J2/045
CPC分类号： B41J2/14233 , B41J2/161 , B41J2/1626 , B41J2/1631 , B41J2/1646 , B41J2002/14241 , B41J2202/18
摘要： A liquid ejecting head comprising: a pressure chamber substrate where pressure chambers that communicates with nozzle holes are provided, and a piezoelectric element including a first conductive layer, a piezoelectric material layer, and a second conductive layer, wherein the piezoelectric element has an overlap area that overlaps the pressure chamber, the first conductive layer, the piezoelectric material layer, and the second conductive layer, wherein the second conductive layers overlap a plurality of the pressure chambers continuously, wherein, the first conductive layer is provided in each of the overlap areas and has an end portion area at one end side of the overlap area in the longitudinal direction, and wherein a width of the end portion area gets narrow in the lateral direction as the end portion area directs to the end of the longitudinal direction.
摘要翻译：一种液体喷射头，包括：压力室基板，其中设置有与喷嘴孔连通的压力室;以及压电元件，包括第一导电层，压电材料层和第二导电层，其中压电元件具有重叠区域其与所述压力室，所述第一导电层，所述压电材料层和所述第二导电层重叠，其中所述第二导电层连续地与多个所述压力室重叠，其中，所述第一导电层设置在每个所述重叠区域并且在纵向方向上的重叠区域的一端侧具有端部区域，并且其中当端部区域指向纵向方向的末端时，端部区域的宽度在横向方向上变窄。

3. 发明申请

US20120005871A1 METHOD FOR MANUFACTURING PIEZOELECTRIC ELEMENT AND METHOD FOR MANUFACTURING LIQUID EJECTION HEAD 有权
标题翻译：制造压电元件的方法和制造液体喷射头的方法
公开(公告)号：US20120005871A1
公开(公告)日：2012-01-12
申请号：US13178389
申请日：2011-07-07
申请人： Eiju HIRAI , Hiroshi ITO , Toshihiro SHIMIZU , Jiro KATO
发明人： Eiju HIRAI , Hiroshi ITO , Toshihiro SHIMIZU , Jiro KATO
IPC分类号： H01L41/22
CPC分类号： H01L41/332 , B41J2/14233 , B41J2/161 , B41J2/1628 , B41J2/1629 , B41J2/1642 , B41J2/1645 , B41J2/1646 , H01L41/29 , Y10T29/42 , Y10T29/49005 , Y10T29/4908
摘要： A method for manufacturing a piezoelectric element includes a process for forming a first conductive layer, a process for forming a piezoelectric layer having a region serving as an active region, a process for forming a second conductive layer, which overlaps with the region, a process for forming a third conductive layer, which overlaps with the region, on the second conductive layer, a process for forming an opening portion that divides the third conductive layer into a first portion and a second portion, a process for forming a resist layer that covers the opening portion and a peripheral portion at the side of the opening portion of the first portion and the second portion; a process for etching the third conductive layer to form a first conductive portion and a second conductive portion, and a process for etching the second conductive layer to form a third conductive portion.
摘要翻译：压电元件的制造方法包括形成第一导电层的工序，形成具有作为有源区的区域的压电层的工序，与该区域重叠的第二导电层的形成工序，工序用于在所述第二导电层上形成与所述区域重叠的第三导电层，形成将所述第三导电层分成第一部分和第二部分的开口部分的工艺，形成覆盖所述第三导电层的抗蚀剂层的工艺所述开口部分和在所述第一部分的开口部分和所述第二部分的一侧的周边部分; 用于蚀刻第三导电层以形成第一导电部分和第二导电部分的工艺，以及用于蚀刻第二导电层以形成第三导电部分的工艺。

4. 发明申请

US20080157629A1 Piezoelectric element, piezoelectric actuator, ink jet recording head, ink jet printer, surface acoustic wave element, frequency filter, oscillator, electronic circuit, thin film piezoelectric resonator, and electronic apparatus 失效
标题翻译：压电元件，压电致动器，喷墨记录头，喷墨打印机，表面声波元件，频率滤波器，振荡器，电子电路，薄膜压电谐振器和电子设备
公开(公告)号：US20080157629A1
公开(公告)日：2008-07-03
申请号：US12070737
申请日：2008-02-21
申请人： Motohisa Noguchi , Eiju Hirai
发明人： Motohisa Noguchi , Eiju Hirai
IPC分类号： H01L41/187 , H01L41/08
CPC分类号： B41J2/161 , B41J2/1628 , B41J2/1629 , B41J2/1642 , B41J2/1645 , B41J2/1646 , B41J2202/03 , C04B35/499 , C04B2235/3206 , C04B2235/3224 , C04B2235/3251 , C04B2235/3258 , C04B2235/3272 , C04B2235/3275 , C04B2235/3279 , C04B2235/3284 , C04B2235/3286 , C04B2235/768 , H01L41/1875 , H01L41/317 , H03H3/02 , H03H3/08 , H03H9/02015 , H03H9/02031 , H03H9/02574 , H03H9/0542 , H03H9/173 , H03H9/174 , H03H2003/021 , H03H2003/023
摘要： A piezoelectric element is provided that is equipped with a seed layer formed on a base substrate and a piezoelectric film formed on the seed layer. The seed layer is formed of a perovskite type piezoelectric material preferentially oriented to pseudo cubic (100). The piezoelectric film is formed of a relaxor material that has a perovskite type rhombohedral structure, and is preferentially oriented to pseudo cubic (100).
摘要翻译：提供一种压电元件，其配备有形成在基底基板上的种子层和形成在种子层上的压电膜。种子层由优先取向为假立方（100）的钙钛矿型压电材料形成。压电膜由具有钙钛矿型菱方晶结构的弛豫材料形成，并优先取向为假立方（100）。

5. 发明授权

US08506057B2 Liquid droplet ejecting head and liquid droplet ejecting apparatus 有权
标题翻译：液滴喷射头和液滴喷射装置
公开(公告)号：US08506057B2
公开(公告)日：2013-08-13
申请号：US12905470
申请日：2010-10-15
申请人： Eiju Hirai
发明人： Eiju Hirai
IPC分类号： B41J2/045
CPC分类号： B41J2/14233 , B41J2002/14241 , B41J2002/14491 , B41J2202/11
摘要： A liquid droplet ejecting head including a pressure chamber substrate that is provided with a pressure chamber communicating with a nozzle orifice, an oscillating plate formed over the pressure chamber at a first area surface; a plurality of first conductive layers formed over the oscillating plate which completely overlap and extend beyond the first area surface; a piezoelectric layer formed over the first conductive layers so as to overlap at least over the first area surface; and a second conductive layer, which is continuously formed so as to cover the piezoelectric layer and completely overlap and extend beyond the first area surface at extending portions, which extend in at least a part of an area between the first conductive layers adjacent to each other.
摘要翻译：一种液滴喷射头，包括设置有与喷嘴孔连通的压力室的压力室基板，在第一区域表面上形成在压力室上的振荡板; 形成在振荡板上方的多个第一导电层，其完全重叠并延伸超过第一区域表面; 压电层，形成在所述第一导电层上，以便至少在所述第一区域表面上重叠; 以及第二导电层，其连续地形成为覆盖压电层并且在延伸部分处完全重叠并延伸超过第一区域表面，延伸部分在彼此相邻的第一导电层之间的区域的至少一部分中延伸。

6. 发明授权

US08292410B2 Liquid ejecting head, liquid ejecting apparatus, and actuator device 有权
标题翻译：液体喷射头，液体喷射装置和致动器装置
公开(公告)号：US08292410B2
公开(公告)日：2012-10-23
申请号：US12723803
申请日：2010-03-15
申请人： Shiro Yazaki , Eiju Hirai
发明人： Shiro Yazaki , Eiju Hirai
IPC分类号： B41J2/045
CPC分类号： B41J2/14233 , B41J2/055 , B41J2002/14241 , B41J2002/14419
摘要： A liquid ejecting head includes a flow passage substrate having a pressure generation chamber in communication with a nozzle opening. A piezoelectric element includes first and second electrode and a piezoelectric substance layer and is positioned over one surface of the flow passage substrate. The piezoelectric element is deformed to form a convex toward the pressure generation chamber when the piezoelectric element is driven. A protection film formed from an inorganic material covers the piezoelectric element and has an opening through which an upper surface of the second electrode is exposed. An end of the opening in the protection film viewed in a direction of the length of the pressure generation chamber is located closer to the center than is an area at which the center of curvature of a curve of the piezoelectric element that forms near a wall around the pressure generation chamber during deformation operation.
摘要翻译：液体喷射头包括具有与喷嘴开口连通的压力产生室的流路基板。压电元件包括第一和第二电极和压电体层，并且位于流路基板的一个表面上。当压电元件被驱动时，压电元件变形以朝向压力产生室凸出。由无机材料形成的保护膜覆盖压电元件，并且具有露出第二电极的上表面的开口。在压力发生室的长度方向上观察的保护膜中的开口的端部比靠近壁周围的压电元件的曲线的曲率中心更靠近中心在变形操作期间的压力发生室。

7. 发明申请

US20120056946A1 PIEZOELECTRIC ELEMENT, LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS, AND METHODS FOR THE MANUFACTURE THEREOF 有权
标题翻译：压电元件，液体喷射头，液体喷射装置及其制造方法
公开(公告)号：US20120056946A1
公开(公告)日：2012-03-08
申请号：US13225301
申请日：2011-09-02
申请人： Chikara Kojima , Eiju Hirai
发明人： Chikara Kojima , Eiju Hirai
IPC分类号： B41J2/045 , H04R17/00 , H01L41/047
CPC分类号： H01L41/0973 , B41J2/14233 , B41J2/161 , B41J2/1631 , B41J2/1642 , B41J2/1645 , B41J2/1646 , H01L41/047 , H01L41/29
摘要： A piezoelectric element, a liquid ejecting head and a liquid ejecting apparatus that have improved reliability are provided. Methods for the manufacture thereof are also provided. A piezoelectric element includes a vibration plate having a recess in a first surface, a first electrode formed in the recess, a piezoelectric layer formed on the vibration plate and the first electrode, and a second electrode formed on the piezoelectric layer, wherein an upper surface of the first electrode forms a continuous flat surface together with the first surface.
摘要翻译：提供了具有改进的可靠性的压电元件，液体喷射头和液体喷射装置。还提供了制造方法。压电元件包括在第一表面具有凹陷的振动板，形成在凹部中的第一电极，形成在振动板上的压电层和第一电极，以及形成在压电层上的第二电极，的第一电极与第一表面一起形成连续的平坦表面。

8. 发明申请

US20120030915A1 MANUFACTURING METHOD OF A PIEZOELECTRIC ELEMENT AND A LIQUID EJECTING HEAD 有权
标题翻译：压电元件和液体喷射头的制造方法
公开(公告)号：US20120030915A1
公开(公告)日：2012-02-09
申请号：US13197464
申请日：2011-08-03
申请人： Toshihiro Shimizu , Jiro Kato , Eiju Hirai , Hiroshi Ito
发明人： Toshihiro Shimizu , Jiro Kato , Eiju Hirai , Hiroshi Ito
IPC分类号： H01L41/22
CPC分类号： H01L41/29 , B41J2/161 , B41J2/1628 , B41J2/1631 , B41J2002/14491 , H01L41/314 , Y10T29/42 , Y10T29/49002 , Y10T29/49401
摘要： A manufacturing method of a piezoelectric element includes: forming a first conductive layer upon a substrate; forming a piezoelectric layer upon the first conductive layer; forming a second conductive layer upon the piezoelectric layer; forming a third conductive layer upon the second conductive layer; forming a first portion, a second portion, and an opening portion provided between the first portion and the second portion by patterning the third conductive layer; forming a resist layer that covers the opening portion and covers the edges of the first portion and the second portion that face the opening portion side; and forming a first conductive portion and a second conductive portion configured from the first portion and the second portion, and forming a third conductive portion configured from the second conductive layer, by dry-etching the second conductive layer using the first portion, the second portion, and the resist layer as a mask.
摘要翻译：压电元件的制造方法包括：在基板上形成第一导电层; 在所述第一导电层上形成压电层; 在所述压电层上形成第二导电层; 在所述第二导电层上形成第三导电层; 通过对第三导电层进行构图而形成第一部分，第二部分和设置在第一部分和第二部分之间的开口部分; 形成覆盖所述开口部并且覆盖所述第一部分和面向所述开口部侧的所述第二部分的边缘的抗蚀剂层; 以及形成由所述第一部分和所述第二部分构成的第一导电部分和第二导电部分，以及通过使用所述第一部分干蚀刻所述第二导电层，形成由所述第二导电层构成的第三导电部分，所述第二部分，抗蚀剂层作为掩模。

9. 发明申请

US20110193916A1 ACTUATOR, LIQUID DROPLET EJECTING HEAD, AND MANUFACTURING METHOD THEREOF, AND LIQUID DROPLET EJECTING APPARATUS 有权
标题翻译：致动器，液体喷射头及其制造方法和液体喷射装置
公开(公告)号：US20110193916A1
公开(公告)日：2011-08-11
申请号：US13024023
申请日：2011-02-09
申请人： Eiju HIRAI , Shiro YAZAKI
发明人： Eiju HIRAI , Shiro YAZAKI
IPC分类号： B41J2/045 , H01L41/22 , B41J2/16 , H01L41/04
CPC分类号： B41J2/14233 , Y10T29/42 , Y10T29/49346 , Y10T29/49401
摘要： An actuator that includes a substrate; first conductive layers provided so as to extend in a first direction and to be disposed adjacent to each other on the substrate; a piezoelectric body layer having a first portion formed so as to cover the first conductive layers and openings between the first conductive layers, a second portion other than the first portions, and a contact to the first conductive layer; a second conductive layer having a third portion which overlap with the first conductive layers in the second direction, a fourth portion connected to the third portion being formed over the second portion of the piezoelectric body layer, and a fifth portion connected to the first conductive layer in the contact ; and a wiring having a sixth portion which is formed over the fourth portion of the second conductive layer and a seventh portion connected to the fifth portion.
摘要翻译：一种包括基板的致动器; 第一导电层设置成在第一方向上延伸并且在基板上彼此相邻设置; 压电体层，其具有形成为覆盖第一导电层的第一部分和第一导电层之间的开口，除第一部分之外的第二部分和与第一导电层的接触; 第二导电层，具有在第二方向上与第一导电层重叠的第三部分，连接到第三部分的第四部分形成在压电体层的第二部分上，第五部分连接到第一导电层在联系中; 以及布线，其具有形成在第二导电层的第四部分上的第六部分和连接到第五部分的第七部分。

10. 发明申请

US20110169897A1 LIQUID EJECTING HEAD AND LIQUID EJECTING APPARATUS 审中-公开
标题翻译：液体喷射和液体喷射装置
公开(公告)号：US20110169897A1
公开(公告)日：2011-07-14
申请号：US12983494
申请日：2011-01-03
申请人： Naoto YOKOYAMA , Eiju HIRAI
发明人： Naoto YOKOYAMA , Eiju HIRAI
IPC分类号： B41J2/045
CPC分类号： B41J2/14233 , B41J2/055 , B41J2002/14241 , B41J2002/14306 , B41J2002/14419 , B41J2202/05
摘要： Since a piezoelectric element that changes a volume of a pressure generating chamber through a vibrating plate, changes a flow passage cross-sectional area of an ink supplying passage through the vibrating plate, it is possible that according to a volume variation of the pressure generating chamber, the flow passage cross-sectional area of the ink supplying passage is changed and a flow rate of the ink which flows between a reservoir and the pressure generating chamber is controlled. Therefore, when the ink that is filled within the pressure generating chamber is ejected from a nozzle opening that communicates with the pressure generating chamber, the amount of the ink returned to the reservoir via the ink supplying passage can be decreased, ejection quantity of ink can be ensured, and an ink jet type recording head which limits the decrease of ejection performance, can be obtained.
摘要翻译：由于通过振动板改变压力发生室的体积的压电元件改变通过振动板的供墨通道的流路横截面积，所以可以根据压力发生室的体积变化墨水供给通路的流路横截面积变化，并且控制在储存器与压力发生室之间流动的墨的流量。因此，当从压力发生室内填充的油墨从与压力发生室连通的喷嘴开口排出时，可以减少通过供墨通道返回储存器的油墨量，油墨的喷射量并且可以获得限制喷射性能降低的喷墨式记录头。

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