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1. 发明申请

WO2013169872A1 IN SITU HOLDER ASSEMBLY 审中-公开
标题翻译：在SITU HOLDER ASSEMBLY
公开(公告)号：WO2013169872A1
公开(公告)日：2013-11-14
申请号：PCT/US2013/040095
申请日：2013-05-08
申请人： E.A. FISCHIONE INSTRUMENTS, INC.
发明人： DESHMUKH, Pushkarraj V. , GRONSKY, Jeffrey J. , FISCHIONE, Paul, E.
IPC分类号： G01N21/01 , G01N23/00
CPC分类号： G01N23/225 , G01N21/01 , G01N2223/309 , G01N2223/31 , H01J37/20 , H01J37/228 , H01J2237/2002 , H01J2237/2003 , H01J2237/2065
摘要： An in situ optical specimen holder is disclosed which allows imaging and analysis during dynamic experimentation. This holder assembly includes a set of focusing and reflection optics along with an environmental cell. Electromagnetic radiation can be used to optically excite the specimen in the presence or absence of fluid and the source of such radiation may be located within the body of the holder itself. The spot size of the irradiation at the specimen surface can be varied, thus exciting only a specific region on the specimen. The window type cell provides a variable fluid path length ranging from the specimen thickness to 500μm. The holder has the provision to continuously circulate fluids over the specimen. The pressure within the cell can be regulated by controlling the flow rate of the fluids and the speed of the pumps.
摘要翻译：公开了一种在动态实验中进行成像和分析的原位光学样本架。该支架组件包括一组聚焦和反射光学器件以及环境细胞。电磁辐射可以用于在存在或不存在流体的情况下光学激发样品，并且这种辐射源可以位于保持器本体的主体内。样品表面的照射点尺寸可以改变，从而仅激发样品上的特定区域。窗型电池提供从样品厚度到500umum的可变流体路径长度。支架具有使流体在试样上连续循环的条件。可以通过控制流体的流量和泵的速度来调节电池内的压力。

2. 发明申请

WO2003087018A3 SPECIMEN HOLDING APPARATUS 审中-公开
公开(公告)号：WO2003087018A3
公开(公告)日：2003-10-23
申请号：PCT/US2003/010670
申请日：2003-04-07
申请人： E.A. FISCHIONE INSTRUMENTS, INC.
发明人： FISCHIONE, Paul, E. , GRONSKY, Jeff
IPC分类号： G01N3/02
摘要： A specimen holding apparatus (225) includes a main body (208), a specimen supporting surface (200) provided on the main body (208), and a restraining element (203) movable along the main body (208) in a direction substantially parallel to the longitudinal axis of the main body (208) from a first position in which the restraining element (203) is removed from the specimen supporting (200) surface to a second position in which the restraining element (203) encroaches over the specimen supporting surface.(200) An alternate specimen holding apparatus (230) includes a main body (208), a specimen supporting surface (200) provided on the main body (208) in a first horizontal plane, and a restraining element (203) attached to the main body (208) that is rotatable in a second horizontal plane substantially parallel to the first horizontal plane between a first position in which the restraining element (203) is removed from the specimen supporting surface (200) and a second position in which the restraining element (203) encroaches over the specimen supporting surface (200).

3. 发明申请

WO2016014332A1 APPARATUS FOR PREPARING A SAMPLE FOR MICROSCOPY 审中-公开
标题翻译：用于制备显微镜样品的装置
公开(公告)号：WO2016014332A1
公开(公告)日：2016-01-28
申请号：PCT/US2015/040728
申请日：2015-07-16
申请人： E.A. FISCHIONE INSTRUMENTS, INC.
发明人： FISCHIONE, Paul, E. , BOCCABELLA, Michael, F.
IPC分类号： G01N1/32 , H01J37/26
CPC分类号： H01J37/3056 , H01J37/20 , H01J37/28 , H01J37/292 , H01J37/304 , H01J2237/30466 , H01J2237/31745 , H01J2237/31749
摘要： An apparatus for preparing a sample for microscopy is provided that has a milling device that removes material from a sample in order to thin the sample. An electron beam that is directed onto the sample is present along with a detector that detects when the electron beam has reached a preselected threshold transmitted through or immediately adjacent the sample. Once the detector detects the electron beam has reached this threshold, the milling device terminates the milling process.
摘要翻译：提供了一种用于制备用于显微镜的样品的装置，其具有从样品中除去材料的研磨装置以使样品变薄。引导到样品上的电子束与检测器一起存在，该检测器检测电子束何时达到通过或紧邻样品透射的预选阈值。一旦检测器检测到电子束达到该阈值，铣削装置终止铣削过程。

4. 发明申请

WO2011127394A1 IMPROVED ION SOURCE 审中-公开
标题翻译：改进的离子源
公开(公告)号：WO2011127394A1
公开(公告)日：2011-10-13
申请号：PCT/US2011/031763
申请日：2011-04-08
申请人： E.A. FISCHIONE INSTRUMENTS, INC. , MATESA, Joseph, M. , FISCHIONE, Paul, E.
发明人： MATESA, Joseph, M. , FISCHIONE, Paul, E.
IPC分类号： H01J37/08
CPC分类号： H01J37/08 , H01J27/04 , H01J37/3056 , H01J2237/061 , H01J2237/0815
摘要： An ion source utilizes independently powered electrodes isolated by a series of insulators. The ion source comprises an anode electrode with a hollow interior, where the anode is disposed between a cathode and an anti-cathode. A magnet imposes a magnetic field in an axial direction through the bore of the anode. The ion source includes a first voltage differential between the anode and cathode for the production of plasma and a second voltage differential between the anode and the anti-cathode for extraction of ions from the plasma, which ion beam is preferably of a narrow diameter at low beam energy. The voltage differential between the anti-cathode and anode is adjusted to control the initial beam divergence of extracted ions. An optional focus electrode with an independent power supply further focuses the ion beam.
摘要翻译：离子源利用由一系列绝缘体隔离的独立供电的电极。离子源包括具有中空内部的阳极电极，其中阳极设置在阴极和反阴极之间。磁体通过阳极的孔沿轴向施加磁场。离子源包括用于产生等离子体的阳极和阴极之间的第一电压差，以及用于从等离子体提取离子的阳极和反阴极之间的第二电压差，该离子束优选地在低的低直径处光束能量。调整反阴极和阳极之间的电压差以控制提取的离子的初始光束发散。具有独立电源的可选聚焦电极进一步聚焦离子束。

5. 发明申请

WO2006014986A2 DEVICE AND METHOD FOR MILLING OF MATERIAL USING IONS 审中-公开
标题翻译：使用离子切割材料的装置和方法
公开(公告)号：WO2006014986A2
公开(公告)日：2006-02-09
申请号：PCT/US2005/026542
申请日：2005-07-27
申请人： E.A. FISCHIONE INSTRUMENTS, INC.
发明人： FISCHIONE, Paul, E. , SMITH, David, W. , SCHEINFEIN, Michael, R. , MATESA, Joseph, M. , SWIHART, Thomas, C. , MARTIN, David
IPC分类号： H01J37/08
CPC分类号： H01J37/3002 , H01J37/08 , H01J37/20 , H01J37/22 , H01J37/244 , H01J37/305 , H01J2237/0822 , H01J2237/30477 , H01J2237/3174 , H01J2237/31745
摘要： A milling device is disclosed for the preparation of microscopy specimens or other surface science applications through the use of ion bombardment. The device provides the ability to utilize both gross and fine modification of the specimen surface through the use of high and low energy ion sources. Precise control of the location of the specimen within the impingement beams created by the ion sources provides the ability to tilt and rotate the specimen with respect thereto. Locational control also permits the translocation of the specimen between the various sources under programmatic control and under consistent vacuum conditions. A load lock mechanism is also provided to permit the introduction of specimens into the device without loss of vacuum and with the ability to return the specimen to ambient temperature during such load and unload operation. The specimen may be observed and imaged during all active phases of operation.
摘要翻译：公开了用于通过使用离子轰击制备显微镜试样或其它表面科学应用的研磨装置。该设备提供了通过使用高能量和低能量离子源来利用样品表面的粗略和细微改性的能力。由离子源产生的冲击波束内的样本位置的精确控制提供了使样本相对于其倾斜和旋转的能力。位置控制还允许在程序化控制下和在一致的真空条件下在各种来源之间移动试样。还提供了一种装载锁定机构，以允许将样品引入装置中而不会损失真空，并且能够在这种加载和卸载操作期间将样品返回到环境温度。可以在所有活动期间观察和成像样本。

6. 发明授权

US09779914B2 Apparatus for preparing a sample for microscopy 有权
公开(公告)号：US09779914B2
公开(公告)日：2017-10-03
申请号：US14341284
申请日：2014-07-25
申请人： E.A. Fischione Instruments, Inc.
发明人： Paul E. Fischione , Michael F. Boccabella
IPC分类号： H01J37/305 , H01J37/20 , H01J37/28 , H01J37/29 , H01J37/304
CPC分类号： H01J37/3056 , H01J37/20 , H01J37/28 , H01J37/292 , H01J37/304 , H01J2237/30466 , H01J2237/31745 , H01J2237/31749
摘要： An apparatus for preparing a sample for microscopy is provided that has a milling device that removes material from a sample in order to thin the sample. An electron beam that is directed onto the sample is present along with a detector that detects when the electron beam has reached a preselected threshold transmitted through or immediately adjacent the sample. Once the detector detects the electron beam has reached this threshold, the milling device terminates the milling process.

7. 发明申请

US20220262593A1 System and Method for Uniform Ion Milling 有权
公开(公告)号：US20220262593A1
公开(公告)日：2022-08-18
申请号：US17672248
申请日：2022-02-15
申请人： E.A. Fischione Instruments, Inc.
发明人： Paul E. Fischione , Joseph M. Matesa , Junhai Liu , Michael F. Boccabella
IPC分类号： H01J37/147 , H01J37/31 , H01J37/20
摘要： A system and method for the precise and uniform material removal or delayering of a large area of a sample is provided. The size of the milled area is controllable, ranging from sub-millimeter to multi-millimeter scale and the depth resolution is controllable on the nanometer scale. A controlled singularly charged ion beam is scanned across the sample surface in such a manner to normalize the ion density distribution from the sample center toward the periphery to realize uniform delayering.

8. 发明申请

WO2022174187A2 SYSTEM AND METHOD FOR UNIFORM ION MILLING 审中-公开
公开(公告)号：WO2022174187A2
公开(公告)日：2022-08-18
申请号：PCT/US2022/016448
申请日：2022-02-15
申请人： E.A. FISCHIONE INSTRUMENTS, INC.
发明人： FISCHIONE, Paul, E. , MATESA, Joseph, M. , LIU, Junhai , BOCCABELLA, Michael, F.
IPC分类号： H01J37/30 , H01J37/08 , H01J37/20 , H01J37/244 , H01J37/22 , H01J37/305 , H01J37/18 , H01J2237/2001 , H01J2237/20214 , H01J2237/20221 , H01J37/147 , H01J37/31
摘要： A system and method for the precise and uniform material removal or delayering of a large area of a sample is provided. The size of the milled area is controllable, ranging from sub-millimeter to multi-millimeter scale and the depth resolution is controllable on the nanometer scale. A controlled singularly charged ion beam is scanned across the sample surface in such a manner to normalize the ion density distribution from the sample center toward the periphery to realize uniform delayering.

9. 发明申请

WO2012016055A1 IMPROVED CRYOGENIC SPECIMEN HOLDER 审中-公开
标题翻译：改进的低温样品架
公开(公告)号：WO2012016055A1
公开(公告)日：2012-02-02
申请号：PCT/US2011/045741
申请日：2011-07-28
申请人： E.A. FISCHIONE INSTRUMENTS, INC. , STABACINSKIENE, Halina , GRONSKY, Jeffrey, J. , THOMAS, Christine, M. , DESHMUKH, Pushkarraj, V. , ROBINS, Alan, C. , FISCHIONE, Paul, E.
发明人： STABACINSKIENE, Halina , GRONSKY, Jeffrey, J. , THOMAS, Christine, M. , DESHMUKH, Pushkarraj, V. , ROBINS, Alan, C. , FISCHIONE, Paul, E.
IPC分类号： H01J37/20
CPC分类号： G01N23/20033 , H01J37/20 , H01J37/26 , H01J2237/2001 , H01J2237/20207 , H01J2237/204
摘要： An improved cryogenic specimen holder for imaging and analysis facilitates imaging at very high tilt angles with a large field of view. A retractable specimen holder tip protects the specimen during transport. An optimized Dewar design is positioned at a fixed, tilted angle with respect to the axis of the holder, providing a means of continuously cooling the specimen irrespective of the high tilt angle and the amount of liquid nitrogen present in the vessel. The Dewar neck design reduces the entrapment of nitrogen gas bubbles and its shape prevents the spilling of liquid nitrogen at high tilt angles. The specimen holder has a retractable tip that completely encapsulates the specimen within a shielded environment internal to the specimen holder body. The cooling and specimen transfer mechanisms reduce thermal drift and the detrimental effects of vibrations.
摘要翻译：用于成像和分析的改进的低温试样保持器便于在具有大视场的非常高的倾斜角下进行成像。可伸缩的样品架头在运输过程中保护样品。优化的杜瓦设计相对于保持器的轴线定位成固定的倾斜角度，提供连续冷却样品的手段，而不管存在于容器中的高倾斜角和液氮量。杜瓦瓶颈设计减少了氮气气泡的夹带，其形状可以防止液氮在高倾角下溢出。样品架具有可收缩的尖端，其将样品完全包封在样品保持体内部的屏蔽环境内。冷却和样品转移机制减少了热漂移和振动的有害影响。

10. 发明申请

WO2013022626A1 IMPROVED CRYOGENIC SPECIMEN HOLDER 审中-公开
标题翻译：改进的低温样品架
公开(公告)号：WO2013022626A1
公开(公告)日：2013-02-14
申请号：PCT/US2012/048716
申请日：2012-07-27
申请人： E.A. FISCHIONE INSTRUMENTS, INC. , STABACINSKIENE, Halina , GRONSKY, Jeffrey, J. , DESHMUKH, Pushkarraj, V. , ROBINS, Alan, C. , FISCHIONE, Paul, E.
发明人： STABACINSKIENE, Halina , GRONSKY, Jeffrey, J. , DESHMUKH, Pushkarraj, V. , ROBINS, Alan, C. , FISCHIONE, Paul, E.
IPC分类号： B01L3/00 , G01N37/00
CPC分类号： G01N23/20033 , B01L7/50 , G01N2223/612 , H01J37/20 , H01J37/26 , H01J2237/0216 , H01J2237/2001 , H01J2237/20207 , H01J2237/204
摘要： An improved cryogenic specimen holder for imaging and analysis facilitates imaging at very high tilt angles with a large field of view. A retractable specimen holder tip protects the specimen during transport. An optimized Dewar design is positioned at a fixed, tilted angle with respect to the axis of the holder, continuously cooling the specimen irrespective of the high tilt angle and the amount of liquid nitrogen present in the vessel. The Dewar neck design reduces entrapping nitrogen gas bubbles and its shape prevents the spilling of liquid nitrogen at high tilt angles. The specimen holder has a retractable tip that completely encapsulates the specimen within a shielded environment internal to the specimen holder body. The cooling and specimen transfer mechanisms reduce thermal drift and the detrimental effects of vibrations generated by both the evaporation of liquid nitrogen present in the Dewar as well as other environmental effects.
摘要翻译：用于成像和分析的改进的低温试样保持器便于在具有大视场的非常高的倾斜角下进行成像。可伸缩的样品架头在运输过程中保护样品。优化的杜瓦设计相对于保持器的轴线定位成固定的倾斜角度，连续地冷却样品，而不管存在于容器中的高倾斜角和液氮量。杜瓦瓶颈设计减少了夹带的氮气泡，其形状可防止液氮在高倾角下溢出。样品架具有可收缩的尖端，其将样品完全包封在样品保持体内部的屏蔽环境内。冷却和样品转移机制减少了热漂移和杜瓦瓶中存在的液氮蒸发产生的振动的不利影响以及其他环境影响。

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