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1. 发明授权

US07085122B2 MEMS tunable capacitor based on angular vertical comb drives 失效
标题翻译：基于角度垂直梳齿驱动的MEMS可调电容器
公开(公告)号：US07085122B2
公开(公告)日：2006-08-01
申请号：US10850958
申请日：2004-05-21
申请人： Ming C. Wu , Hung D. Nguyen , Doo-Young Hah , Pamela R. Patterson
发明人： Ming C. Wu , Hung D. Nguyen , Doo-Young Hah , Pamela R. Patterson
IPC分类号： H01G7/00
CPC分类号： H01G5/06 , B81B2201/0221 , B81B2203/0136 , B81C1/00007
摘要： A MEMS tunable capacitor with angular vertical comb-drive (AVC) actuators is described where high capacitances and a wide continuous tuning range is achieved in a compact space. The comb fingers rotate through a small vertical angle which allows a wider tuning range than in conventional lateral comb drive devices. Fabrication of the device is straightforward, and involves a single deep reactive ion etching step followed by release and out-of-plane assembly of the angular combs.
摘要翻译：描述了具有角度垂直梳驱动（AVC）致动器的MEMS可调谐电容器，其中在紧凑的空间中实现高电容和宽的连续调谐范围。梳指旋转一个较小的垂直角度，这允许比常规侧梳驱动装置更宽的调谐范围。该装置的制造是直接的，并涉及单个深反应离子蚀刻步骤，随后释放和平面外组装角梳。

2. 发明授权

US06791731B2 Micro-optical switch and method for manufacturing the same 失效
标题翻译：微光开关及其制造方法
公开(公告)号：US06791731B2
公开(公告)日：2004-09-14
申请号：US10329702
申请日：2002-12-27
申请人： Ho Jun Ryu , Doo Young Hah , Chi Hoon Jun , Yun Tae Kim
发明人： Ho Jun Ryu , Doo Young Hah , Chi Hoon Jun , Yun Tae Kim
IPC分类号： G02B2608
CPC分类号： G02B26/085 , Y10S359/90
摘要： The present invention relates to a micro-optical switch and comprises an external frame having a plurality of holes inside; an internal frame positioned in the plurality of holes and having holes inside; light reflecting means positioned inside the holes of the internal frame; external magnetic substances positioned at both sides of the external frame; outside torsion hinge for connecting the external frame to the internal frame and having 45° to the magnetic field produced by the external magnetic substances; inside torsion hinge for connecting the internal frame to the light reflecting means and for being perpendicular to said outside torsion hinge; an outside coil wired in the internal frame; and an inside coil wired in the light reflecting means, and is characterized in that the light reflecting means and the internal frame are preferably rotated by the inside torsion hinge and the outside torsion hinge as an axis when a current is applied to the inside coil and the outside coil.
摘要翻译：微型光开关技术领域本发明涉及一种微型光开关，其包括：内部具有多个孔的外框; 定位在所述多个孔中并在其内部具有孔的内部框架; 位于内部框架的孔内的光反射装置; 位于外框架两侧的外部磁性物质; 外部扭转铰链，用于将外部框架连接到内部框架，并且与由外部磁性物质产生的磁场成45°; 内部扭转铰链，用于将内部框架连接到光反射装置并且用于垂直于所述外部扭转铰链; 外部线圈连接在内部框架中; 以及布线在光反射装置中的内部线圈，其特征在于，当电流施加到内侧线圈时，光反射装置和内部框架优选地通过内部扭转铰链和外部扭转铰链作为轴线旋转，外线圈。

3. 发明申请

US20050013087A1 MEMS tunable capacitor based on angular vertical comb drives 失效
标题翻译：基于角度垂直梳齿驱动的MEMS可调电容器
公开(公告)号：US20050013087A1
公开(公告)日：2005-01-20
申请号：US10850958
申请日：2004-05-21
申请人： Ming Wu , Hung Nguyen , Doo-Young Hah , Pamela Patterson
发明人： Ming Wu , Hung Nguyen , Doo-Young Hah , Pamela Patterson
IPC分类号： B81B5/00 , H01G5/06 , H01G5/00
CPC分类号： H01G5/06 , B81B2201/0221 , B81B2203/0136 , B81C1/00007
摘要： A MEMS tunable capacitor with angular vertical comb-drive (AVC) actuators is described where high capacitances and a wide continuous tuning range is achieved in a compact space. The comb fingers rotate through a small vertical angle which allows a wider tuning range than in conventional lateral comb drive devices. Fabrication of the device is straightforward, and involves a single deep reactive ion etching step followed by release and out-of-plane assembly of the angular combs.
摘要翻译：描述了具有角度垂直梳驱动（AVC）致动器的MEMS可调谐电容器，其中在紧凑的空间中实现高电容和宽的连续调谐范围。梳指旋转一个较小的垂直角度，这允许比常规侧梳驱动装置更宽的调谐范围。该装置的制造是直接的，并涉及单个深反应离子蚀刻步骤，随后释放和平面外组装角梳。

4. 发明授权

US06822776B2 Scanning micromirror for optical communication systems and method of manufacturing the same 有权
公开(公告)号：US06822776B2
公开(公告)日：2004-11-23
申请号：US10308137
申请日：2002-12-03
申请人： Doo-Young Hah , Ho-Jun Ryu , Chang-Auck Choi , Chi-Hoon Jun , Youn Tae Kim
发明人： Doo-Young Hah , Ho-Jun Ryu , Chang-Auck Choi , Chi-Hoon Jun , Youn Tae Kim
IPC分类号： G02B2608
CPC分类号： G02B6/3518 , G02B6/3556 , G02B6/357 , G02B6/3584 , G02B26/0841 , Y10S359/90
摘要： The present invention relates to a scanning micromirror for optical communications. The scanning micromirror comprises an outer frame having an aperture therein, an inner frame located within the aperture of the outer frame and having an aperture therein, an optical reflecting means located within the aperture of the inner frame, a plurality of first torsion springs connected between an inner wall of the outer frame and an outer wall of the inner frame, for supporting the inner frame, a plurality of second torsion springs connected between the inner wall of the inner frame and the optical reflecting means, for supporting the optical reflecting means, first comb-type electrostatic actuators for applying electrostatic torque by which the inner frame is rotated about an axis of the first torsion springs, and second comb-type electrostatic actuators for applying electrostatic torque by which the optical reflecting means is rotated about an axis of the second torsion springs. Therefore, as the present invention uses vertical comb-type electrostatic actuators, an available rotation angle can be made large compared to a conventional case using a parallel-plate type electrostatic actuator. As the vertical asymmetry of the fixed combs and the movable combs are large, a large rotation angle can be obtained in non-resonant mode as well as resonant mode.

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