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1. 发明授权

US09046795B2 Optical element unit for exposure processes having sealing element 有权
标题翻译：用于具有密封元件的曝光工艺的光学元件单元
公开(公告)号：US09046795B2
公开(公告)日：2015-06-02
申请号：US12046186
申请日：2008-03-11
申请人： Tilman Schwertner , Ulrich Bingel , Guido Limbach , Julian Kaller , Hans-Juergen Scherle , Jens Kugler , Dirk Schaffer , Bernhard Gellrich
发明人： Tilman Schwertner , Ulrich Bingel , Guido Limbach , Julian Kaller , Hans-Juergen Scherle , Jens Kugler , Dirk Schaffer , Bernhard Gellrich
IPC分类号： G03F7/20
CPC分类号： G03F7/7015 , G02B27/0006 , G03F7/70808 , G03F7/70825 , G03F7/70883 , G03F7/70908 , G03F7/70916 , G03F7/70933 , Y10T29/49
摘要： An optical element unit includes a first optical element module and a sealing arrangement. The first optical element module occupies a first module space and includes a first module component of a first component type and an associated second module component of a second component type. The first component type is optical elements and the second component type being different from the first component type. The sealing arrangement separates the first module space into a first space and a second space and substantially pre-vents, at least in a first direction, the intrusion of substances from one of the first space and the second space into the other one of the first space and the second space. The first module component at least partially contacts the first space and, at least in its area optically used, not contacting the second space. The second module component at least partially contacts the second space.
摘要翻译：光学元件单元包括第一光学元件模块和密封装置。第一光学元件模块占据第一模块空间并且包括第一组件类型的第一模块组件和第二组件类型的相关联的第二模块组件。第一部件类型是光学元件，第二部件类型与第一部件类型不同。密封装置将第一模块空间分隔成第一空间和第二空间，并且至少在第一方向上基本上预先将物质从第一空间和第二空间中的一个进入另一个第一空间空间和第二空间。第一模块部件至少部分地接触第一空间，并且至少在其光学使用的区域中不接触第二空间。第二模块组件至少部分地接触第二空间。

2. 发明授权

US08351139B2 Optical element module with minimized parasitic loads 有权
标题翻译：具有最小化寄生负载的光学元件模块
公开(公告)号：US08351139B2
公开(公告)日：2013-01-08
申请号：US12708034
申请日：2010-02-18
申请人： Jens Kugler , Ulrich Weber , Dirk Schaffer
发明人： Jens Kugler , Ulrich Weber , Dirk Schaffer
IPC分类号： G02B7/02
CPC分类号： G02B7/02 , G02B7/021 , G03F7/70825
摘要： An optical element module is provided. The optical module includes an optical element unit that includes an optical element and a support structure that supports the optical element unit. The support structure includes a support device and a contact device mounted to the support device. The contact device exerts a force on the optical element unit in a first direction via a first contact surface of the contact device. The first contact surface contacts a second contact surface of the optical element unit. The contact device includes a first linking section and a second linking section extending along a second direction running transverse to the first direction and arranged kinematically in series between the first contact surface and the support device. The first linking section and the second linking section are elastically deformed in response to a bending moment resulting from the force. The first linking section and the second linking section are arranged on opposite sides of a reference plane. The reference plane includes the force and runs transverse to the second direction.
摘要翻译：提供了一种光学元件模块。光学模块包括光学元件单元，其包括光学元件和支撑光学元件单元的支撑结构。支撑结构包括支撑装置和安装到支撑装置的接触装置。接触装置经由接触装置的第一接触面沿第一方向在光学元件单元上施加力。第一接触表面接触光学元件单元的第二接触表面。接触装置包括第一连接部分和第二连接部分，该第二连接部分沿着横向于第一方向的第二方向延伸并且在运动学上串联布置在第一接触表面和支撑装置之间。第一连接部分和第二连接部分响应于由力产生的弯矩而弹性变形。第一连接部分和第二连接部分布置在参考平面的相对侧上。参考平面包括力并横向于第二方向延伸。

3. 发明申请

US20090147229A1 Optical element unit and method of supporting an optical element 有权
标题翻译：光学元件单元和支撑光学元件的方法
公开(公告)号：US20090147229A1
公开(公告)日：2009-06-11
申请号：US11901131
申请日：2007-09-14
申请人： Dirk Schaffer , Willi Heintel , Hagen Federau , Joachim Hartjes , Harald Kirchner
发明人： Dirk Schaffer , Willi Heintel , Hagen Federau , Joachim Hartjes , Harald Kirchner
IPC分类号： G03B27/54 , G02B7/02
CPC分类号： G02B7/026 , G02B7/008 , G03F7/70825
摘要： There is provided an optical element unit comprising an optical element, a connector element, and an optical element holder. The optical element has a plane of main extension as well as an outer circumference and defines a radial direction. The connector element connects the optical element and the optical element holder, the connector element having a first connector part connected to the optical element at the outer circumference and a second connector part connected to the optical element holder. The first connector part and the second connector part are connected via at least one coupling part, the coupling part being compliant in the radial direction and substantially preventing rotation between the first connector part and the second connector part in a plane substantially parallel to the plane of main extension.
摘要翻译：提供了包括光学元件，连接器元件和光学元件保持器的光学元件单元。光学元件具有主要延伸的平面以及外圆周并限定径向方向。连接器元件连接光学元件和光学元件保持器，连接器元件具有在外周连接到光学元件的第一连接器部分和连接到光学元件保持器的第二连接器部件。第一连接器部分和第二连接器部分经由至少一个联接部分连接，联接部分在径向上是柔性的，并且基本上防止第一连接器部分和第二连接器部分之间在基本上平行于主要延伸。

4. 发明申请

US20120082823A1 METHOD FOR BONDING BODIES AND COMPOSITE BODY 有权
标题翻译：用于接合体和复合体的方法
公开(公告)号：US20120082823A1
公开(公告)日：2012-04-05
申请号：US13248987
申请日：2011-09-29
申请人： Hin Yiu Anthony CHUNG , Dirk SCHAFFER
发明人： Hin Yiu Anthony CHUNG , Dirk SCHAFFER
IPC分类号： B32B3/00 , B32B37/14 , B32B37/12
CPC分类号： C09J5/00 , B29C63/02 , B29C2063/485 , C09J2463/00 , F16B11/006 , G03F7/70716 , G03F7/7095 , Y10T156/10 , Y10T403/47 , Y10T403/473 , Y10T428/24752 , Y10T428/24777
摘要： A method for bonding a first body (2) to a second, panel-shaped body (3) at bonding surfaces (2a, 3a) lying opposite each other, the second body (3) projecting in at least one direction (X) beyond an edge (2′) of the first body (2). The method includes: producing a plurality of spacers (4a to 4e, 4a′ to 4e′) on at least one of the bonding surfaces (2a), applying adhesive (5) into intermediate spaces (6a to 6d) between the spacers beyond an outer spacer (4e, 4e′) as far as an adhesive periphery (5a), which is formed at an edge (2′) of the first body (2), and bonding the bodies (2, 3) by bringing the bonding surfaces (2a, 3a) into contact at the spacers (4a′ to 4e′). A prescribed distance (d) between the adhesive periphery (5a) and the outermost spacer (4e) is set to provide a desired state of deformation of the panel-shaped body (3) after a shrinkage of the applied adhesive (5) (e.g. minimized bending of the body.) In an associated composite body (1), the prescribed distance (d) lies between 20 μm and 250 μm, preferably between 30 μm and 200 μm, in particular between 40 μm and 150 μm.
摘要翻译：一种在彼此相对的接合表面（2a，3a）处将第一主体（2）接合到第二板状主体（3）的方法，所述第二主体（3）在至少一个方向（X）上突出超过第一主体（2）的边缘（2'）。该方法包括：在至少一个接合表面（2a）上产生多个间隔物（4a至4e，4a'至4e'），将粘合剂（5）施加到隔离件之间的中间空间（6a至6d）中，外部间隔件（4e，4e'）直到形成在第一主体（2）的边缘（2'）处的粘合周边（5a），并且通过使粘合表面（2a，3a）在间隔件（4a'至4e'）处接触。在粘合剂周边（5a）和最外侧间隔物（4e）之间的规定距离（d）被设定为在所施加的粘合剂（5）收缩之后提供所述面板状体（3）的期望变形状态（例如，最小化身体的弯曲。）在相关联的复合体（1）中，规定距离（d）在20μm和250μm之间，优选在30μm和200μm之间，特别是在40μm和150μm之间。

5. 发明申请

US20120044473A1 OPTICAL ELEMENT FOR UV OR EUV LITHOGRAPHY 有权
标题翻译：用于UV或EUV光刻的光学元件
公开(公告)号：US20120044473A1
公开(公告)日：2012-02-23
申请号：US13208823
申请日：2011-08-12
申请人： Johannes LIPPERT , Dirk SCHAFFER
发明人： Johannes LIPPERT , Dirk SCHAFFER
IPC分类号： G03B27/54 , G03B27/70 , F21V9/06
CPC分类号： G02B1/10 , G03F7/7015 , G03F7/70316
摘要： To reduce deformations which may be caused by a functional coating on a substrate in an optical element for UV or EUV lithography, an optical element is suggested comprising a functional coating (46) on a first surface (42) of a substrate (41), wherein the substrate (41) comprises a second surface (43) having a common edge (45) with the first surface (42), and the second surface (43) also has a coating (47) and the thickness t2 and the stress σ2 of the coating (47) on the second surface (33, 43) are chosen such that, in combination with the thickness t1 and the stress σ1 of the functional coating (36, 46) on the first surface (32, 42), the condition t 1 · σ 1 t 2 · σ 2 = X is fulfilled, wherein X has a value between 0.8 and 5.0.
摘要翻译：为了减少可能由用于UV或EUV光刻的光学元件中的基底上的功能性涂层引起的变形，建议在基底（41）的第一表面（42）上包括功能性涂层（46）的光学元件，其中所述基底（41）包括具有所述第一表面（42）的共同边缘（45）的第二表面（43），并且所述第二表面（43）还具有涂层（47），并且所述厚度t2和所述应力选择第二表面（33,43）上的涂层（47）中的两个，使得与第一表面（32,41）上的功能涂层（36,46）的厚度t1和应力σ1结合， 42），条件t 1·＆sgr; 1 t 2·＆sgr 2 = X满足，其中X具有在0.8和5.0之间的值。

6. 发明申请

US20090122288A1 DEVICE FOR THE LOW-DEFORMATION REPLACEABLE MOUNTING OF AN OPTICAL ELEMENT 有权
标题翻译：用于光学元件的低变形可更换安装的装置
公开(公告)号：US20090122288A1
公开(公告)日：2009-05-14
申请号：US12274583
申请日：2008-11-20
申请人： Franz Sorg , Andreas Wurmbrand , Thomas Petasch , Dirk Schaffer , Siegfried Wahl
发明人： Franz Sorg , Andreas Wurmbrand , Thomas Petasch , Dirk Schaffer , Siegfried Wahl
IPC分类号： G03B27/42
CPC分类号： G02B7/00 , G02B7/025 , G02B7/026 , G03F7/70825
摘要： The invention relates to a device for the low-deformation replaceable mounting of an optical element, in particular a closure plate of an objective of a projection exposure system for microlithography for the production of semiconductor components, in a mount (12). The optical element is connected to the mount (12) at least partly via an adhesive connection. This is located between the adjacent circumferential walls of mount (12) and optical element. The mount (12) is provided with at least three support feet (14) distributed over the circumference, by means of which the optical element is mounted laterally and axially. The mount (12) is connected to the housing of the objective in an at least approximately deformation-decoupled manner via three mount bearing points (15).
摘要翻译：本发明涉及一种用于光学元件的低变形可替换安装的装置，特别是用于在安装件（12）中生产半导体部件的用于微光刻的投影曝光系统的目标的封闭板。光学元件至少部分地通过粘合剂连接连接到安装件（12）。它位于安装件（12）的相邻圆周壁和光学元件之间。安装件（12）设置有分布在圆周上的至少三个支撑脚（14），光学元件通过该支撑脚侧向和轴向安装。安装件（12）经由三个安装支承点（15）以至少近似变形 - 解耦的方式连接到物镜的壳体。

7. 发明申请

US20060158749A1 Device for the low-deformation replaceable mounting of an optical element 有权
标题翻译：用于光学元件的低变形可替换安装的装置
公开(公告)号：US20060158749A1
公开(公告)日：2006-07-20
申请号：US11233846
申请日：2005-09-22
申请人： Franz Sorg , Andreas Wurmbrand , Thomas Petasch , Dirk Schaffer , Siegfried Wahl
发明人： Franz Sorg , Andreas Wurmbrand , Thomas Petasch , Dirk Schaffer , Siegfried Wahl
IPC分类号： G02B7/02
CPC分类号： G02B7/00 , G02B7/025 , G02B7/026 , G03F7/70825
摘要： The invention relates to a device for the low-deformation replaceable mounting of an optical element, in particular a closure plate of an objective of a projection exposure system for microlithography for the production of semiconductor components, in a mount (12). The optical element is connected to the mount (12) at least partly via an adhesive connection. This is located between the adjacent circumferential walls of mount (12) and optical element. The mount (12) is provided with at least three support feet (14) distributed over the circumference, by means of which the optical element is mounted laterally and axially. The mount (12) is connected to the housing of the objective in an at least approximately deformation-decoupled manner via three mount bearing points (15).
摘要翻译：本发明涉及一种用于光学元件的低变形可替换安装的装置，特别是用于在安装件（12）中生产半导体部件的用于微光刻的投影曝光系统的目标的封闭板。光学元件至少部分地通过粘合剂连接连接到安装件（12）。它位于安装件（12）的相邻圆周壁和光学元件之间。安装件（12）设置有分布在圆周上的至少三个支撑脚（14），光学元件通过该支撑脚侧向和轴向安装。安装件（12）经由三个安装支承点（15）以至少近似变形 - 解耦的方式连接到物镜的壳体。

8. 发明授权

US09134501B2 Optical element unit and method of supporting an optical element 有权
公开(公告)号：US09134501B2
公开(公告)日：2015-09-15
申请号：US11901131
申请日：2007-09-14
申请人： Dirk Schaffer , Willi Heintel , Hagen Federau , Joachim Hartjes , Harald Kirchner
发明人： Dirk Schaffer , Willi Heintel , Hagen Federau , Joachim Hartjes , Harald Kirchner
IPC分类号： G03B27/68 , G03B27/52 , G03B27/54 , G02B7/02 , G03F7/20 , G03B27/42 , G02B7/00
CPC分类号： G02B7/026 , G02B7/008 , G03F7/70825
摘要： There is provided an optical element unit comprising an optical element, a connector element, and an optical element holder. The optical element has a plane of main extension as well as an outer circumference and defines a radial direction. The connector element connects the optical element and the optical element holder, the connector element having a first connector part connected to the optical element at the outer circumference and a second connector part connected to the optical element holder. The first connector part and the second connector part are connected via at least one coupling part, the coupling part being compliant in the radial direction and substantially preventing rotation between the first connector part and the second connector part in a plane substantially parallel to the plane of main extension.

9. 发明授权

US08582081B2 Device for the low-deformation replaceable mounting of an optical element 有权
标题翻译：用于光学元件的低变形可替换安装的装置
公开(公告)号：US08582081B2
公开(公告)日：2013-11-12
申请号：US12274583
申请日：2008-11-20
申请人： Franz Sorg , Andreas Wurmbrand , Thomas Petasch , Dirk Schaffer , Siegfried Wahl
发明人： Franz Sorg , Andreas Wurmbrand , Thomas Petasch , Dirk Schaffer , Siegfried Wahl
IPC分类号： G03B27/42
CPC分类号： G02B7/00 , G02B7/025 , G02B7/026 , G03F7/70825
摘要： The invention relates to a device for the low-deformation replaceable mounting of an optical element, in particular a closure plate of an objective of a projection exposure system for microlithography for the production of semiconductor components, in a mount (12). The optical element is connected to the mount (12) at least partly via an adhesive connection. This is located between the adjacent circumferential walls of mount (12) and optical element. The mount (12) is provided with at least three support feet (14) distributed over the circumference, by means of which the optical element is mounted laterally and axially. The mount (12) is connected to the housing of the objective in an at least approximately deformation-decoupled manner via three mount bearing points (15).
摘要翻译：本发明涉及一种用于光学元件的低变形可替换安装的装置，特别是用于在安装件（12）中生产半导体部件的用于微光刻的投影曝光系统的目标的封闭板。光学元件至少部分地通过粘合剂连接连接到安装件（12）。它位于安装件（12）的相邻圆周壁和光学元件之间。安装件（12）设置有分布在圆周上的至少三个支撑脚（14），光学元件通过该支撑脚侧向和轴向安装。安装件（12）经由三个安装支承点（15）以至少近似变形 - 解耦的方式连接到物镜的壳体。

10. 发明申请

US20120300183A1 OPTICAL ARRANGEMENT IN A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS 有权
标题翻译：微波投影曝光装置中的光学布置
公开(公告)号：US20120300183A1
公开(公告)日：2012-11-29
申请号：US13467760
申请日：2012-05-09
申请人： Dirk Schaffer , Stefan Hembacher , Jens Kugler
发明人： Dirk Schaffer , Stefan Hembacher , Jens Kugler
IPC分类号： G03B27/70 , G02B5/08
CPC分类号： G02B7/182 , G02B7/1827 , G03F7/70316
摘要： The disclosure relates to optical arrangements in a microlithographic projection exposure apparatus. In accordance with one aspect, an optical arrangement has at least one mirror segment arrangement including a plurality of separate mirror segments. The mirror segments are connected to a carrying structure of the projection exposure apparatus via mounting elements. At least one of the mounting elements, which is assigned to a first one of the mirror segments, extends, on the opposite side to the optically active surface of the mirror segment arrangement, at least partly into the region of a second mirror segment of the mirror segment arrangement. The second mirror segment is adjacent to the first mirror segment.
摘要翻译：本公开涉及微光刻投影曝光装置中的光学装置。根据一个方面，一种光学装置具有至少一个包括多个分离镜片段的镜片段布置。镜片段通过安装元件连接到投影曝光设备的承载结构。分配给第一反射镜段的安装元件中的至少一个在反射镜分段装置的与光学有效表面相反的一侧上至少部分地延伸到第二反射镜段的区域中镜片段布置。第二镜片段与第一镜片段相邻。

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