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    • 3. 发明授权
    • Evacuating device
    • 疏散装置
    • US07264439B2
    • 2007-09-04
    • US10517113
    • 2003-05-16
    • Ralf AdamietzRoland BlumenthalDirk Kalisch
    • Ralf AdamietzRoland BlumenthalDirk Kalisch
    • F01D5/00F01D1/36
    • F04D29/32F04D19/044
    • A device (1), for evacuating a chamber to pressures in the high vacuum range includes a suction-side vacuum pump (2) and an atmospheric-pressure-side vacuum pump (3). The suction-side vacuum pump (2) is a mechanical kinetic vacuum pump with a rotor (11) and a stator (10). The stator (10) has a rotationally-symmetrical inner surface which matches the outer rotor geometry. The rotor (11) in the mechanical kinetic vacuum pump (2) is provided with a structure (13) carrying out the gas pumping. Said gas pumping structure comprises webs (14), the angle and width of which decrease from the suction side to the pressure side. The gas throughflow is improved. The outer diameter of the rotor (11) and the inner diameter of the stator (10) of the suctnion-side pump decrease from the suction side to the pressure side.
    • 用于将室抽空到高真空范围内的压力的装置(1)包括吸入侧真空泵(2)和大气压侧真空泵(3)。 抽吸侧真空泵(2)是具有转子(11)和定子(10)的机械动力学真空泵。 定子(10)具有与外转子几何形状匹配的旋转对称的内表面。 机械动力学真空泵(2)中的转子(11)设置有执行气体抽吸的结构(13)。 所述气体抽吸结构包括腹板(14),其角度和宽度从吸力侧减压到压力侧。 气体通流得到改善。 转子(11)的外径和阀门侧定子(10)的内径从吸入侧减压到压力侧。
    • 4. 发明申请
    • Drag Vacuum Pump
    • 拖拉真空泵
    • US20080206041A1
    • 2008-08-28
    • US11664142
    • 2005-09-21
    • Ralf AdamietzRoland BlumenthalDirk Kalisch
    • Ralf AdamietzRoland BlumenthalDirk Kalisch
    • F04D19/00F01D1/36F04D29/52F04D3/02
    • F04D19/044F04D29/644
    • A friction vacuum pump (10) comprises a housing (12) defining a vaneless pump stator (30), a rotor drive and a rotor support which rotatably supports a pump rotor (16) provided with a vane (18). The housing (12) surrounds the overall axial length of the pump rotor (16), the rotor drive and the rotor support. Prior art housings are of multipart configuration and thus comprise seals between the housing portions. The seals are difficult to coat and may be or become locations where leaks occur. In contrast, the housing (12) is of one-piece configuration such that, in any case, the region of the housing (12) which is in contact with the vacuum gas is free of seals.
    • 摩擦真空泵(10)包括限定无叶泵定子(30)的壳体(12),转子驱动器和可旋转地支撑设置有叶片(18)的泵转子(16)的转子支撑件。 壳体(12)围绕泵转子(16),转子驱动器和转子支撑件的整个轴向长度。 现有技术的壳体具有多部分构造,因此包括壳体部分之间的密封。 密封件难以涂覆,并且可能是或成为泄漏发生的位置。 相反,外壳(12)是一体式构造,使得在任何情况下,与真空气体接触的壳体(12)的区域都没有密封。
    • 5. 发明申请
    • Evacuating device
    • 疏散装置
    • US20050220607A1
    • 2005-10-06
    • US10517113
    • 2003-05-16
    • Ralf AdamietzRoland BlumenthalDirk Kalisch
    • Ralf AdamietzRoland BlumenthalDirk Kalisch
    • F04D19/04F04D29/32F01D1/36
    • F04D29/32F04D19/044
    • A device (1), for evacuating a chamber to pressures in the high vacuum range includes a suction-side vacuum pump (2) and an atmospheric-pressure-side vacuum pump (3). The suction-side vacuum pump (2) is a mechanical kinetic vacuum pump with a rotor (11) and a stator (10). The stator (10) has a rotationally-symmetrical inner surface which matches the outer rotor geometry. The rotor (11) in the mechanical kinetic vacuum pump (2) is provided with a structure (13) carrying out the gas pumping. Said gas pumping structure comprises webs (14), the angle and width of which decrease from the suction side to the pressure side. The gas throughflow is improved. The outer diameter of the rotor (11) and the inner diameter of the stator (10) of the suctnion-side pump decrease from the suction side to the pressure side.
    • 用于将室抽空到高真空范围内的压力的装置(1)包括吸入侧真空泵(2)和大气压侧真空泵(3)。 抽吸侧真空泵(2)是具有转子(11)和定子(10)的机械动力学真空泵。 定子(10)具有与外转子几何形状匹配的旋转对称的内表面。 机械动力学真空泵(2)中的转子(11)设置有执行气体抽吸的结构(13)。 所述气体抽吸结构包括腹板(14),其角度和宽度从吸力侧减压到压力侧。 气体通流得到改善。 转子(11)的外径和阀门侧定子(10)的内径从吸入侧减压到压力侧。