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    • 3. 发明申请
    • SPECTROSCOPIC MODULE
    • 光谱模块
    • US20100214563A1
    • 2010-08-26
    • US12377343
    • 2008-06-05
    • Tomofumi SuzukiKatsumi ShibayamaTakafumi YokinoMasashi ItoHelmut TeichmannDietmar HillerUlrich Starker
    • Tomofumi SuzukiKatsumi ShibayamaTakafumi YokinoMasashi ItoHelmut TeichmannDietmar HillerUlrich Starker
    • G01J3/02
    • G01J3/02G01J3/0208G01J3/0243G01J3/0259G01J3/04
    • The spectroscopy module 1 is provided with a body portion 2 for transmitting light L1, L2, a spectroscopic portion 3 for dispersing light L1 made incident from the front plane 2a of the body portion 2 into the body portion 2 to reflect the light on the front plane 2a, a light detecting element 4 having a light detecting portion 41 for detecting the light L2 dispersed and reflected by the spectroscopic portion 3 and electrically connected to a wiring 9 formed on the front plane 2a of the body portion 2 by face-down bonding, and an underfill material 12 filled in the body portion 2 side of the light detecting element 4 to transmit the light L1, L2. The light detecting element 4 is provided with a light-passing hole 42 through which the light L1 advancing into the spectroscopic portion 3 passes, and a reservoir portion 43 is formed on a rear plane 4a of the body portion 2 side in the light detecting element 4 so as to enclose a light outgoing opening 42b of the light-passing hole 42.
    • 光谱分析模块1设置有用于透射光L1,L2的主体部分2,用于将从主体部分2的前面平面2a入射的光L1分散到主体部分2中以将光反射到前面的光谱部分3 平面2a,光检测元件4,具有光检测部分41,用于检测由分光部分3分散和反射的光L2,并通过面朝下的接合电连接到形成在主体部分2的前平面2a上的布线9; 以及填充在光检测元件4的主体部分2侧的底部填充材料12以透射光L1,L2。 光检测元件4设置有通向分光部3的光L1通过的通光孔42,在光检测元件4的主体部2侧的背面4a上形成有储存部43 以便包围光通过孔42的光出射开口42b。