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    • 1. 发明授权
    • Method and apparatus for switching an optical beam in a semiconductor substrate
    • 用于切换半导体衬底中的光束的方法和装置
    • US06603893B1
    • 2003-08-05
    • US09819160
    • 2001-03-27
    • Ansheng LiuMario J. PanicciaDean A. Samara-RubioChi Chu
    • Ansheng LiuMario J. PanicciaDean A. Samara-RubioChi Chu
    • G02B626
    • G02F1/3136G02B6/2813G02F2001/217
    • An optical switching method and apparatus. In one aspect of the present invention, the disclosed apparatus includes first and second multi-mode interference (MMI) splitting devices in a semiconductor substrate. First and second outputs of the first MMI splitting device are optically coupled to first and second inputs, respectively, of the second MMI splitting device. First and second phase control devices are included in the semiconductor substrate. The first input of the second MMI splitting device is optically coupled to the first output of the first MMI splitting device through the first phase control device. The second input of the second MMI splitting device is optically coupled to the second output of the first MMI splitting device through the second phase control device. The first input of the first MMI splitting device is selectively optically coupled to the first and second outputs of the second MMI splitting device in response to the first and second phase control devices. The second input of the first MMI splitting device is selectively optically coupled to the first and second outputs of the second MMI splitting device in response to the first and second phase control devices.
    • 一种光学切换方法和装置。 在本发明的一个方面,所公开的设备包括半导体衬底中的第一和第二多模干涉(MMI)分离器件。 第一MMI分割装置的第一和第二输出分别光耦合到第二MMI分割装置的第一和第二输入。 第一和第二相位控制装置包括在半导体衬底中。 第二MMI分割装置的第一输入通过第一相位控制装置光耦合到第一MMI分配装置的第一输出端。 第二MMI分配装置的第二输入通过第二相位控制装置光耦合到第一MMI分配装置的第二输出端。 响应于第一和第二相位控制装置,第一MMI分配装置的第一输入选择性地光耦合到第二MMI分配装置的第一和第二输出端。 响应于第一和第二相位控制装置,第一MMI分配装置的第二输入被选择性地光耦合到第二MMI分配装置的第一和第二输出端。
    • 3. 发明授权
    • Method and apparatus for sensing a temperature along an optical path in semiconductor material
    • 用于感测半导体材料中沿着光路的温度的方法和装置
    • US07231150B2
    • 2007-06-12
    • US10279398
    • 2002-10-23
    • Dean A. Samara-RubioAndrew C. AlduinoChristina A. Frost
    • Dean A. Samara-RubioAndrew C. AlduinoChristina A. Frost
    • H04J14/02
    • G01K7/22
    • A temperature sensing and control method and apparatus. In one aspect of the present invention, an apparatus according to the teachings of the present invention includes an optical path disposed in semiconductor material. A four-terminal resistor is defined in the semiconductor material. At least a portion of the optical path is directed through the four-terminal resistor. The four-terminal resistor includes a first pair of terminals between which a probe current is to be injected. The four-terminal resistor also includes a second pair of terminals between which a voltage drop is to be measured so as to determine a resistance along the portion of the optical path directed through the four-terminal resistor. Temperature may be derived from the determined resistance of the four-terminal resistor. In one embodiment, the temperature of the semiconductor material may then be controlled with a heater in response to the derived temperature.
    • 一种温度检测和控制方法及装置。 在本发明的一个方面,根据本发明的教导的装置包括设置在半导体材料中的光路。 半导体材料中限定了四端电阻。 光路的至少一部分被引导通过四端电阻。 四端电阻器包括第一对端子,在该第一对端子之间要注入探针电流。 四端电阻器还包括第二对端子,在其之间测量电压降,以便确定沿着通过四端电阻器的光路部分的电阻。 温度可以来自确定的四端电阻的电阻。 在一个实施例中,半导体材料的温度然后可以响应于所导出的温度用加热器来控制。
    • 5. 发明授权
    • Method and apparatus for adjusting the phase of an optical beam
    • 用于调整光束相位的方法和装置
    • US06775425B2
    • 2004-08-10
    • US10183103
    • 2002-06-26
    • Dean A. Samara-RubioSean M. Koehl
    • Dean A. Samara-RubioSean M. Koehl
    • G02F1035
    • G02F1/025G02F1/2257G02F2001/0152G02F2201/16G02F2203/50
    • Method and apparatus for adjusting the phase of an optical beam. In one aspect of the present invention, an optical device includes a substrate through which an optical beam is to be directed along an optical path. In one embodiment, the optical device includes an array of segments of optical phase-shifting structures along the path. In one embodiment, each respective one of the segments is to be selectively switched on or off to adjust a phase of the optical beam. In one embodiment, the optical phase-shifting structures include capacitive structures to induce the plasma optical effect to adjust the phase of an optical beam. In another embodiment, the optical phase-shifting structures include an electro-optic material such as Lithium Niobate.
    • 用于调整光束相位的方法和装置。 在本发明的一个方面中,一种光学器件包括一个基片,一个光束通过该基片沿光路被引导。 在一个实施例中,光学装置包括沿着路径的光学相移结构的阵列阵列。 在一个实施例中,每个段中的每一个将被选择性地接通或关闭以调整光束的相位。 在一个实施例中,光学相移结构包括用于诱导等离子体光学效应来调整光束的相位的电容结构。 在另一个实施例中,光学相移结构包括诸如铌酸锂的电光材料。
    • 8. 发明授权
    • Method and apparatus for phase-shifting an optical beam in a semiconductor substrate
    • 用于使半导体衬底中的光束相移的方法和装置
    • US06628450B2
    • 2003-09-30
    • US10011216
    • 2001-11-15
    • Dean A. Samara-Rubio
    • Dean A. Samara-Rubio
    • G02F101
    • G02F1/3133G02F1/025G02F2201/063
    • A semiconductor-based gain optical phase-shifting device, method and apparatus. In one aspect of the present invention, an apparatus according to an embodiment of the present invention includes a semiconductor substrate through which an optical beam is to be directed along an optical path through the semiconductor substrate. A plurality of floating charge modulated regions are disposed along the optical path. A phase of the optical beam is responsive to a charge concentration in each of the plurality of floating charge modulated regions. A plurality of tunneling insulation layers are disposed between each of the plurality of floating charge modulated regions and the semiconductor substrate. A plurality of control nodes are disposed proximate to the plurality of floating charge modulated regions. Each of the control nodes control the charge concentration in a respective one of the plurality of floating charge modulated regions. A plurality of blocking insulation layers disposed between each of the plurality of control nodes and the plurality of floating charge modulated regions.
    • 一种基于半导体的增益光学相移装置,方法和装置。 在本发明的一个方面中,根据本发明的实施例的装置包括半导体衬底,通过该半导体衬底,光束将沿着通过半导体衬底的光路被引导。 多个浮动电荷调制区域沿光路设置。 光束的相位响应于多个浮动电荷调制区域中的每一个中的电荷浓度。 多个隧穿绝缘层设置在多个浮动电荷调制区域和半导体衬底之间。 多个控制节点设置在多个浮动电荷调制区域附近。 每个控制节点控制多个浮动电荷调制区域中的相应一个中的电荷浓度。 多个阻挡绝缘层设置在多个控制节点和多个浮动电荷调制区域中的每一个之间。