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1. 发明授权

US08739702B2 Printing plate loading apparatus for loading plates from either a plate stack or cassette 失效
标题翻译：印版加载装置，用于从板堆或盒中装载板
公开(公告)号：US08739702B2
公开(公告)日：2014-06-03
申请号：US12269910
申请日：2008-11-13
申请人： Pavel Korolik , David Tulipman
发明人： Pavel Korolik , David Tulipman
IPC分类号： B41L47/14 , B41F27/12
CPC分类号： B41C1/1083 , B65H1/26 , B65H3/44 , B65H2301/14 , B65H2301/42254 , B65H2301/42256 , B65H2701/1928
摘要： A printing plate loading apparatus (10) configured to load plates into a printing plate imaging device (120) includes a plate pallet loading system (100) for loading plates from originally packed plate pallet into the printing plate imaging device. Additionally a plate cassette unit (110, 310) connected to the plate pallet loading system, which is configured to receive a single cassette (112) from the plate cassette unit and to load plates from the single cassette directly into the printing plate imaging device.
摘要翻译：构造成将印版装载到印版成像装置（120）中的印版装载装置（10）包括用于将印版从原来的包装板托板装载到印版成像装置中的板托盘装载系统（100）。另外，连接到平板托盘加载系统的印版盒单元（110,310）被配置为从印版盒单元接收单个盒（112）并且将印版从单个盒直接装载到印版成像装置中。

2. 发明申请

US20060280357A1 Use of overlay diagnostics for enhanced automatic process control 有权
标题翻译：使用覆盖诊断功能进行增强的自动过程控制
公开(公告)号：US20060280357A1
公开(公告)日：2006-12-14
申请号：US11510147
申请日：2006-08-24
申请人： Joel Seligson , Mark Ghinovker , John Robinson , Pavel Izikson , Michael Adel , Boris Simkin , David Tulipman , Vladimir Levinski
发明人： Joel Seligson , Mark Ghinovker , John Robinson , Pavel Izikson , Michael Adel , Boris Simkin , David Tulipman , Vladimir Levinski
IPC分类号： G06K9/00
CPC分类号： G03F7/705 , G03F7/70516 , G03F7/70633
摘要： Disclosed are apparatus and methods for obtaining and analyzing various unique metrics or “target diagnostics” from one or more semiconductor overlay targets. In one embodiment, an overlay target is measured to obtain one or both of two specific types of target diagnostic information, systematic error metrics and/or random noise metrics. The systematic error metrics generally quantify asymmetries of the overlay target, while the random noise metrics quantify and/or qualify the spatial noise that is proximate to or associated with the overlay target.
摘要翻译：公开了用于从一个或多个半导体覆盖目标获取和分析各种独特度量或“目标诊断”的装置和方法。在一个实施例中，测量覆盖目标以获得两种特定类型的目标诊断信息，系统误差度量和/或随机噪声度量中的一种或两种。系统误差度量通常量化覆盖目标的不对称性，而随机噪声度量量化和/或限定与覆盖目标邻近或相关联的空间噪声。

3. 发明申请

US20100116162A1 APPARATUS FOR CASSETTE LOADING VIA A PALLET LOADER 失效
标题翻译：用于通过托盘装载机装载的装置
公开(公告)号：US20100116162A1
公开(公告)日：2010-05-13
申请号：US12269910
申请日：2008-11-13
申请人： Pavel Korolik , David Tulipman
发明人： Pavel Korolik , David Tulipman
IPC分类号： B41L47/14
CPC分类号： B41C1/1083 , B65H1/26 , B65H3/44 , B65H2301/14 , B65H2301/42254 , B65H2301/42256 , B65H2701/1928
摘要： A printing plate loading apparatus (10) configured to load plates into a printing plate imaging device (120) includes a plate pallet loading system (100) for loading plates from originally packed plate pallet into the printing plate imaging device. Additionally a plate cassette unit (110, 310) connected to the plate pallet loading system, which is configured to receive a single cassette (112) from the plate cassette unit and to load plates from the single cassette directly into the printing plate imaging device.
摘要翻译：构造成将印版装载到印版成像装置（120）中的印版装载装置（10）包括用于将印版从原来的包装板托板装载到印版成像装置中的板托盘装载系统（100）。另外，连接到平板托盘加载系统的印版盒单元（110,310）被配置为从印版盒单元接收单个盒（112）并且将印版从单个盒直接装载到印版成像装置中。

4. 发明授权

US07310789B2 Use of overlay diagnostics for enhanced automatic process control 有权
标题翻译：使用覆盖诊断功能进行增强的自动过程控制
公开(公告)号：US07310789B2
公开(公告)日：2007-12-18
申请号：US11510147
申请日：2006-08-24
申请人： Joel L. Seligson , Mark Ghinovker , John Robinson , Pavel Izikson , Michael E. Adel , Boris Simkin , David Tulipman , Vladimir Levinski
发明人： Joel L. Seligson , Mark Ghinovker , John Robinson , Pavel Izikson , Michael E. Adel , Boris Simkin , David Tulipman , Vladimir Levinski
IPC分类号： G06F17/50
CPC分类号： G03F7/705 , G03F7/70516 , G03F7/70633
摘要： Disclosed are apparatus and methods for obtaining and analyzing various unique metrics or “target diagnostics” from one or more semiconductor overlay targets. In one embodiment, an overlay target is measured to obtain one or both of two specific types of target diagnostic information, systematic error metrics and/or random noise metrics. The systematic error metrics generally quantify asymmetries of the overlay target, while the random noise metrics quantify and/or qualify the spatial noise that is proximate to or associated with the overlay target.
摘要翻译：公开了用于从一个或多个半导体覆盖目标获取和分析各种独特度量或“目标诊断”的装置和方法。在一个实施例中，测量覆盖目标以获得两种特定类型的目标诊断信息，系统误差度量和/或随机噪声度量中的一种或两种。系统误差度量通常量化覆盖目标的不对称性，而随机噪声度量量化和/或限定与覆盖目标邻近或相关联的空间噪声。

5. 发明授权

US07111256B2 Use of overlay diagnostics for enhanced automatic process control 有权
标题翻译：使用覆盖诊断功能进行增强的自动过程控制
公开(公告)号：US07111256B2
公开(公告)日：2006-09-19
申请号：US10438963
申请日：2003-05-14
申请人： Joel L. Seligson , Mark Ghinovker , John Robinson , Pavel Izikson , Michael E. Adel , Boris Simkin , David Tulipman , Vladimir Levinski
发明人： Joel L. Seligson , Mark Ghinovker , John Robinson , Pavel Izikson , Michael E. Adel , Boris Simkin , David Tulipman , Vladimir Levinski
IPC分类号： G06F17/50
CPC分类号： G03F7/705 , G03F7/70516 , G03F7/70633
摘要： Disclosed are methods and apparatus for analyzing the quality of overlay targets. In one embodiment, a method of extracting data from an overlay target is disclosed. Initially, image information or one or more intensity signals of the overlay target are provided. An overlay error is obtained from the overlay target by analyzing the image information or the intensity signal(s) of the overlay target. A systematic error metric is also obtained from the overlay target by analyzing the image information or the intensity signal(s) of the overlay target. For example, the systematic error may indicate an asymmetry metric for one or more portions of the overlay target. A noise metric is further obtained from the overlay target by applying a statistical model to the image information or the intensity signal(s) of the overlay target. Noise metric characterizes noise, such as a grainy background, associated with the overlay target. In other embodiments, an overlay and/or stepper analysis procedure is then performed based on the systematic error metric and/or the noise metric, as well as the overlay data.
摘要翻译：公开了分析覆盖目标质量的方法和装置。在一个实施例中，公开了一种从覆盖目标提取数据的方法。首先，提供覆盖目标的图像信息或一个或多个强度信号。通过分析覆盖目标的图像信息或强度信号，从覆盖目标获得重叠错误。通过分析覆盖目标的图像信息或强度信号也可以从覆盖目标获得系统误差度量。例如，系统误差可以指示覆盖目标的一个或多个部分的不对称度量。通过将统计模型应用于覆盖目标的图像信息或强度信号，从覆盖目标进一步获得噪声度量。噪声度量表示与覆盖目标相关联的噪声，例如粒状背景。在其他实施例中，然后基于系统误差度量和/或噪声度量以及覆盖数据来执行覆盖和/或步进分析程序。

6. 发明授权

US06928628B2 Use of overlay diagnostics for enhanced automatic process control 有权
标题翻译：使用覆盖诊断功能进行增强的自动过程控制
公开(公告)号：US06928628B2
公开(公告)日：2005-08-09
申请号：US10438962
申请日：2003-05-14
申请人： Joel L. Seligson , Mark Ghinovker , John Robinson , Pavel Izikson , Michael E. Adel , Boris Simkin , David Tulipman
发明人： Joel L. Seligson , Mark Ghinovker , John Robinson , Pavel Izikson , Michael E. Adel , Boris Simkin , David Tulipman
IPC分类号： G03F7/20 , G06F17/50 , G06K9/00 , H01L21/66
CPC分类号： G03F7/705 , G03F7/70516 , G03F7/70633
摘要： Disclosed are methods and apparatus for analyzing the quality of overlay targets. In one embodiment, a method of extracting data from an overlay target is disclosed. Initially, image information or one or more intensity signals of the overlay target are provided. An overlay error is obtained from the overlay target by analyzing the image information or the intensity signal(s) of the overlay target. A systematic error metric is also obtained from the overlay target by analyzing the image information or the intensity signal(s) of the overlay target. For example, the systematic error may indicate an asymmetry metric for one or more portions of the overlay target. A noise metric is further obtained from the overlay target by applying a statistical model to the image information or the intensity signal(s) of the overlay target. Noise metric characterizes noise, such as a grainy background, associated with the overlay target. In other embodiments, an overlay and/or stepper analysis procedure is then performed based on the systematic error metric and/or the noise metric, as well as the overlay data.
摘要翻译：公开了分析覆盖目标质量的方法和装置。在一个实施例中，公开了一种从覆盖目标提取数据的方法。首先，提供覆盖目标的图像信息或一个或多个强度信号。通过分析覆盖目标的图像信息或强度信号，从覆盖目标获得重叠错误。通过分析覆盖目标的图像信息或强度信号也可以从覆盖目标获得系统误差度量。例如，系统误差可以指示覆盖目标的一个或多个部分的不对称度量。通过将统计模型应用于覆盖目标的图像信息或强度信号，从覆盖目标进一步获得噪声度量。噪声度量表示与覆盖目标相关联的噪声，例如粒状背景。在其他实施例中，然后基于系统误差度量和/或噪声度量以及覆盖数据来执行覆盖和/或步进分析程序。

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