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1. 发明授权

US06558471B2 Scrubber operation 有权
标题翻译：洗衣机操作
公开(公告)号：US06558471B2
公开(公告)日：2003-05-06
申请号：US09771087
申请日：2001-01-26
申请人： Brian J. Brown , Yufei Chen , David G. Andeen , Madhavi Chandrachood
发明人： Brian J. Brown , Yufei Chen , David G. Andeen , Madhavi Chandrachood
IPC分类号： B08B100
CPC分类号： H01L21/67046 , B08B1/04 , B08B3/02
摘要： Methods and apparatuses are provided that remove a scrubber brush from contact with a wafer surface prior to slowing down the scrubber brush's rotational rate. The scrubbing method may include rotating a scrubber brush at a non-reduced rate, while the scrubber brush is in contact with the wafer and removing the scrubber brush from contact with the wafer while rotating the scrubber brush at the non-reduced rate. The scrubbing apparatus has a controller programmed to perform the scrubbing method.
摘要翻译：提供了方法和装置，其在减缓洗涤器刷的旋转速率之前，将洗涤器刷与晶片表面接触。洗涤方法可以包括以非降低的速率旋转洗涤器刷子，同时洗涤器刷子与晶片接触并且在以非减小的速率旋转洗涤器刷子的同时，使洗涤器刷子与晶片接触。洗涤装置具有被编程为执行洗涤方法的控制器。

2. 发明授权

US06516816B1 Spin-rinse-dryer 失效
公开(公告)号：US06516816B1
公开(公告)日：2003-02-11
申请号：US09544660
申请日：2000-04-06
申请人： Anwar Husain , Brian J. Brown , David G. Andeen , Svetlana Sherman , John M. White , Michael Sugarman , Makoto Inagawa , Manoocher Birang
发明人： Anwar Husain , Brian J. Brown , David G. Andeen , Svetlana Sherman , John M. White , Michael Sugarman , Makoto Inagawa , Manoocher Birang
IPC分类号： B08B302
CPC分类号： H01L21/67028 , Y10S134/902
摘要： An inventive vertical spin-dryer is provided. The inventive spin-dryer may have a shield system positioned to receive fluid displaced from a substrate vertically positioned within the spin-dryer. The shield system may have one or more shields positioned to at least partially reflect fluid therefrom as the fluid impacts the shield. The one or more shields are angled to encourage the flow of fluid therealong, and are preferably hydrophilic to prevent droplets from forming. Preferably the shield system has three shields positioned in a horizontally and vertically staggered manner so that fluid is transferred from a substrate facing surface of a first shield to the top or non-substrate-facing surface of an adjacent shield, etc. A pressure gradient may be applied across the interior of the spin-dryer to create an air flow which encourages fluid to travel along the shield system in a desired direction. A sensor adapted to facilitate desired flywheel position, an openable gripper having a remote actuator, a radiused gripper and a source of inert drying gas are also provided in individual embodiments.

3. 发明授权

US07226514B2 Spin-rinse-dryer 失效
标题翻译：旋转干燥机
公开(公告)号：US07226514B2
公开(公告)日：2007-06-05
申请号：US10309832
申请日：2002-12-04
申请人： Anwar Husain , Brian J. Brown , David G. Andeen , Svetlana Sherman , John M. White , Michael Sugarman , Makoto Inagawa , Manoocher Birang
发明人： Anwar Husain , Brian J. Brown , David G. Andeen , Svetlana Sherman , John M. White , Michael Sugarman , Makoto Inagawa , Manoocher Birang
IPC分类号： B08B3/02
CPC分类号： H01L21/67028 , Y10S134/902
摘要： An inventive vertical spin-dryer is provided. The inventive spin-dryer may have a shield system positioned to receive fluid displaced from a substrate vertically positioned within the spin-dryer. The shield system may have one or more shields positioned to at least partially reflect fluid therefrom as the fluid impacts the shield. The one or more shields are angled to encourage the flow of fluid therealong, and are preferably hydrophilic to prevent droplets from forming. Preferably the shield system has three shields positioned in a horizontally and vertically staggered manner so that fluid is transferred from a substrate facing surface of a first shield to the top or non-substrate-facing surface of an adjacent shield, etc. A pressure gradient may be applied across the interior of the spin-dryer to create an air flow which encourages fluid to travel along the shield system in a desired direction. A sensor adapted to facilitate desired flywheel position, an openable gripper having a remote actuator, a radiused gripper and a source of inert drying gas are also provided in individual embodiments.
摘要翻译：提供了一种创造性的垂直旋转干燥器。本发明的旋转干燥器可以具有屏蔽系统，其被定位成接收从垂直定位在旋转干燥器内的衬底移位的流体。屏蔽系统可以具有一个或多个屏蔽件，其定位成当流体冲击屏蔽时至少部分地反射流体。一个或多个屏蔽件成角度以促使其流体流动，并且优选是亲水的以防止液滴形成。优选地，屏蔽系统具有以水平和垂直交错方式定位的三个屏蔽件，使得流体从第一屏蔽件的面向基板的表面转移到相邻屏蔽件的顶部或非基板面向表面等。压力梯度可以施加在旋转干燥器的内部以产生鼓风流体沿着屏蔽系统沿所需方向行进的空气流。在各个实施例中还提供了适于促进期望的飞轮位置的传感器，具有远程致动器的可打开夹具，圆角夹持器和惰性干燥气体源。

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