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    • 1. 发明授权
    • Burner manifold apparatus for use in a chemical vapor deposition process
    • 用于化学气相沉积工艺的燃烧器歧管装置
    • US06736633B1
    • 2004-05-18
    • US09830512
    • 2001-04-26
    • David F. Dawson-ElliXiaodong FuDaniel W. HawtofWilliam J. KieferJohn F. Wight, Jr.John Stone, III
    • David F. Dawson-ElliXiaodong FuDaniel W. HawtofWilliam J. KieferJohn F. Wight, Jr.John Stone, III
    • F23D1400
    • F23D14/583C03B19/1423C03B37/0142C03B2207/02C03B2207/04C03B2207/42C23C16/453F23D14/22F23D2203/101F23D2203/104F23D2212/10F23D2213/00F23D2900/14001
    • A burner manifold apparatus (10) for delivering reactants to a combustion site of a chemical vapor deposition process includes fluid inlets (32a, 32b), fluid outlets (49), and a plurality of fluid passages (50) extending therebetween. The fluid passages (50) converge toward each other from the fluid inlets to the fluid outlets. One embodiment includes a manifold base (12), a pressure plate (14), and a manifold burner mount (16) for mounting thereto a micromachined burner (58). The fluid passages (50) internal to the manifold base are configured to distribute symmetrically the fluid to the manifold burner mount. The fluid is then channeled through fluid passages in the manifold burner mount. The fluid passages converge, yet remain fluidly isolated from each other, and the fluid passages create a linear array for producing linear streams of fluid. Alternatively, the burner manifold apparatus may include a plurality of manifold elements in a stacked arrangement. In this alternative embodiment, the manifold elements are configured to produce a linear array of fluid passages at the top of the stack, increasing the number of fluid passages at each level of the stack closer to the top. As yet a further alternative, the burner manifold may be produced by extruding a particulate composite through a die to produce a manifold having fluid passages therein. This extruded manifold generally has a tapered section to which a burner may be mounted.
    • 用于将反应物输送到化学气相沉积工艺的燃烧部位的燃烧器歧管装置(10)包括流体入口(32a,32b),流体出口(49)和在它们之间延伸的多个流体通道(50)。 流体通道(50)从流体入口朝向流体出口彼此会聚。 一个实施例包括歧管基座(12),压力板(14)和用于安装到微加工燃烧器(58)上的歧管燃烧器支架(16)。 歧管基座内部的流体通道(50)被构造为将流体对称地分布到歧管燃烧器安装座。 然后将流体通过歧管燃烧器安装座中的流体通道引导。 流体通道汇合,但保持流体彼此隔离,并且流体通道产生用于产生线性流体流的线性阵列。 或者,燃烧器歧管装置可以包括堆叠布置的多个歧管元件。 在该替代实施例中,歧管元件构造成在堆叠的顶部产生流体通道的线性阵列,从而增加靠近顶部的堆叠的每个层级处的流体通道的数量。 作为另一替代方案,燃烧器歧管可以通过将颗粒状复合材料挤出通过模具来制造,以产生其中具有流体通道的歧管。 该挤出歧管通常具有可安装燃烧器的锥形部分。
    • 3. 发明授权
    • Athermalization techniques for fiber gratings and temperature sensitive components
    • 光纤光栅和温度敏感元件的热化技术
    • US06243527B1
    • 2001-06-05
    • US09203084
    • 1998-12-01
    • David F. Dawson-Elli
    • David F. Dawson-Elli
    • G02B600
    • G02B6/0218
    • An athermalization attachment for countering changes in optical characteristics of an optical fiber or other temperature sensitive optical device in response to changes in temperature. According to one aspect of the invention, a curved composite beam is attached to the fiber. The beam comprises two layers of dissimilar materials. The layer on the outside radius has a coefficient of expansion greater than that of the layer on the inside radius, such that increases in temperature cause the outside layer to expand more rapidly than the inside layer, thereby decreasing the radius of curvature of the beam. The coefficients of expansion of the layers are chosen such that the beam's temperature response counters optical changes which would otherwise occur in the fiber in response to temperature changes. In another approach, one point on a low-expansion block is attached to a point along an optical fiber. A high-expansion bar is attached to another point along the fiber, and positioned with respect to the fiber and the low-expansion block such that expansion of the high-expansion bar compensates for the temperature response of the fiber. A variety of additional geometries are disclosed.
    • 一种用于响应于温度变化来抵抗光纤或其他温度敏感光学器件的光学特性变化的非热化附件。 根据本发明的一个方面,弯曲的复合梁附接到纤维上。 梁包括两层不同的材料。 外半径上的层的膨胀系数大于内半径层的膨胀系数,使得温度升高导致外层比内层更快地膨胀,从而减小梁的曲率半径。 选择层的膨胀系数,使得光束的温度响应反映了响应于温度变化而在光纤中将发生的光学变化。 在另一种方法中,低膨胀块上的一个点附着在沿着光纤的点上。 高膨胀杆附着在沿着纤维的另一点上,并相对于纤维和低膨胀块定位,使得高膨胀杆的膨胀补偿纤维的温度响应。 公开了各种额外的几何形状。