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    • 1. 发明申请
    • Method of Forming an Antifuse and a Conductive Interconnect, and Methods of Forming DRAM Circuitry
    • 形成防静电和导电互连的方法以及形成DRAM电路的方法
    • US20100203719A1
    • 2010-08-12
    • US12762766
    • 2010-04-19
    • Jasper GibbonsDarren Young
    • Jasper GibbonsDarren Young
    • H01L21/44
    • H01L21/76831H01L23/5252H01L27/10814H01L27/10894H01L27/10897H01L2924/0002H01L2924/00
    • A first via opening is formed to a first conductor and a second via opening is formed to a second conductor. The first and second via openings are formed through insulative material. Then, the first conductor is masked from being exposed through the first via opening and to leave the second conductor outwardly exposed through the second via opening. An antifuse dielectric is formed within the second via opening over the exposed second conductor while the first conductor is masked. Then, the first conductor is unmasked to expose it through the first via opening. Then, conductive material is deposited to within the first via opening in conductive connection with the first conductor to form a conductive interconnect within the first via opening to the first conductor and to within the second via opening over the antifuse dielectric to form an antifuse comprising the second conductor, the antifuse dielectric within the second via opening and the conductive material deposited to within the second via opening. Other aspects are contemplated.
    • 第一通孔开口形成于第一导体,第二通孔开口形成于第二导体。 第一和第二通孔开口通过绝缘材料形成。 然后,第一导体被掩蔽不被暴露穿过第一通孔开口并且使第二导体通过第二通孔开口向外露出。 在暴露的第二导体上的第二通孔开口内形成反熔丝电介质,同时第一导体被掩蔽。 然后,第一导体被揭开以暴露它通过第一通孔开口。 然后,导电材料沉积到第一通孔开口内,与第一导体导电连接,以在通向第一导体的第一通孔开口内并且在反熔丝电介质的第二通孔开口内形成导电互连,以形成反熔丝, 第二导体,第二通孔开口内的反熔丝电介质和沉积到第二通孔内的导电材料。 考虑其他方面。
    • 2. 发明授权
    • Methods of forming an antifuse and a conductive interconnect, and methods of forming DRAM circuitry
    • 形成反熔丝和导电互连的方法以及形成DRAM电路的方法
    • US07713857B2
    • 2010-05-11
    • US12052607
    • 2008-03-20
    • Jasper GibbonsDarren Young
    • Jasper GibbonsDarren Young
    • H01L21/44H01L21/82
    • H01L21/76831H01L23/5252H01L27/10814H01L27/10894H01L27/10897H01L2924/0002H01L2924/00
    • A first via opening is formed to a first conductor and a second via opening is formed to a second conductor. The first and second via openings are formed through insulative material. Then, the first conductor is masked from being exposed through the first via opening and to leave the second conductor outwardly exposed through the second via opening. An antifuse dielectric is formed within the second via opening over the exposed second conductor while the first conductor is masked. Then, the first conductor is unmasked to expose it through the first via opening. Then, conductive material is deposited to within the first via opening in conductive connection with the first conductor to form a conductive interconnect within the first via opening to the first conductor and to within the second via opening over the antifuse dielectric to form an antifuse comprising the second conductor, the antifuse dielectric within the second via opening and the conductive material deposited to within the second via opening. Other aspects are contemplated.
    • 第一通孔开口形成于第一导体,第二通孔开口形成于第二导体。 第一和第二通孔开口通过绝缘材料形成。 然后,第一导体被掩蔽不被暴露穿过第一通孔开口并且使第二导体通过第二通孔开口向外暴露。 在暴露的第二导体上的第二通孔开口内形成反熔丝电介质,同时第一导体被掩蔽。 然后,第一导体被揭开以暴露它通过第一通孔开口。 然后,导电材料沉积到第一通孔开口内,与第一导体导电连接,以在通向第一导体的第一通孔开口内并且在反熔丝电介质的第二通孔开口内形成导电互连,以形成反熔丝, 第二导体,第二通孔开口内的反熔丝电介质和沉积到第二通孔内的导电材料。 考虑其他方面。
    • 3. 发明申请
    • Methods Of Forming An Antifuse And A Conductive Interconnect, And Methods Of Forming DRAM Circuitry
    • 形成防静电和导电互连的方法以及形成DRAM电路的方法
    • US20090239370A1
    • 2009-09-24
    • US12052607
    • 2008-03-20
    • Jasper GibbonsDarren Young
    • Jasper GibbonsDarren Young
    • H01L21/44
    • H01L21/76831H01L23/5252H01L27/10814H01L27/10894H01L27/10897H01L2924/0002H01L2924/00
    • A first via opening is formed to a first conductor and a second via opening is formed to a second conductor. The first and second via openings are formed through insulative material. Then, the first conductor is masked from being exposed through the first via opening and to leave the second conductor outwardly exposed through the second via opening. An antifuse dielectric is formed within the second via opening over the exposed second conductor while the first conductor is masked. Then, the first conductor is unmasked to expose it through the first via opening. Then, conductive material is deposited to within the first via opening in conductive connection with the first conductor to form a conductive interconnect within the first via opening to the first conductor and to within the second via opening over the antifuse dielectric to form an antifuse comprising the second conductor, the antifuse dielectric within the second via opening and the conductive material deposited to within the second via opening. Other aspects are contemplated.
    • 第一通孔开口形成于第一导体,第二通孔开口形成于第二导体。 第一和第二通孔开口通过绝缘材料形成。 然后,第一导体被掩蔽不被暴露穿过第一通孔开口并且使第二导体通过第二通孔开口向外露出。 在暴露的第二导体上的第二通孔开口内形成反熔丝电介质,同时第一导体被掩蔽。 然后,第一导体被揭开以暴露它通过第一通孔开口。 然后,导电材料沉积到第一通孔开口内,与第一导体导电连接,以在通向第一导体的第一通孔开口内并且在反熔丝电介质的第二通孔开口内形成导电互连,以形成反熔丝, 第二导体,第二通孔开口内的反熔丝电介质和沉积到第二通孔内的导电材料。 考虑其他方面。
    • 6. 发明授权
    • Method of forming an antifuse and a conductive interconnect, and methods of forming DRAM circuitry
    • 形成反熔丝和导电互连的方法,以及形成DRAM电路的方法
    • US07888255B2
    • 2011-02-15
    • US12762766
    • 2010-04-19
    • Jasper GibbonsDarren Young
    • Jasper GibbonsDarren Young
    • H01L21/44H01L21/3205H01L21/4763H01L21/82H01L21/336
    • H01L21/76831H01L23/5252H01L27/10814H01L27/10894H01L27/10897H01L2924/0002H01L2924/00
    • A first via opening is formed to a first conductor and a second via opening is formed to a second conductor. The first and second via openings are formed through insulative material. Then, the first conductor is masked from being exposed through the first via opening and to leave the second conductor outwardly exposed through the second via opening. An antifuse dielectric is formed within the second via opening over the exposed second conductor while the first conductor is masked. Then, the first conductor is unmasked to expose it through the first via opening. Then, conductive material is deposited to within the first via opening in conductive connection with the first conductor to form a conductive interconnect within the first via opening to the first conductor and to within the second via opening over the antifuse dielectric to form an antifuse comprising the second conductor, the antifuse dielectric within the second via opening and the conductive material deposited to within the second via opening. Other aspects are contemplated.
    • 第一通孔开口形成于第一导体,第二通孔开口形成于第二导体。 第一和第二通孔开口通过绝缘材料形成。 然后,第一导体被掩蔽不被暴露穿过第一通孔开口并且使第二导体通过第二通孔开口向外露出。 在暴露的第二导体上的第二通孔开口内形成反熔丝电介质,同时第一导体被掩蔽。 然后,第一导体被揭开以暴露它通过第一通孔开口。 然后,导电材料沉积到第一通孔开口内,与第一导体导电连接,以在通向第一导体的第一通孔开口内并且在反熔丝电介质的第二通孔开口内形成导电互连,以形成反熔丝, 第二导体,第二通孔开口内的反熔丝电介质和沉积到第二通孔内的导电材料。 考虑其他方面。