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1. 发明申请

WO2011133417A2 COATED GRAPHITE ARTICLE AND REACTIVE ION ETCH MANUFACTURING AND REFURBISHMENT OF GRAPHITE ARTICLE 审中-公开
标题翻译：涂层石墨制品和石墨制品的反应离子生产和改造
公开(公告)号：WO2011133417A2
公开(公告)日：2011-10-27
申请号：PCT/US2011/032662
申请日：2011-04-15
申请人： ENTEGRIS, INC. , COOKE, Richard, A. , GUNDA, Nilesh , DONNELL, Steven , LIU, Yan
发明人： COOKE, Richard, A. , GUNDA, Nilesh , DONNELL, Steven , LIU, Yan
IPC分类号： H01B5/14 , H01J37/317
CPC分类号： C23C14/48 , H01B5/14 , H01J37/16 , H01J37/3171 , Y10T428/265 , Y10T428/30
摘要： In accordance with an embodiment of the invention, there is provided a coated graphite article. The article comprises graphite; and a conductive coating overlaying at least a portion of the graphite. The conductive coating comprises a through-thickness resistance of less than about 50 ohms as measured through the thickness of the graphite and the conductive coating. In accordance with another embodiment of the invention, there is provided a method for manufacturing a graphite article comprising a conductive coating. The method comprises treating graphite of the article with a reactive ion etch process; and after treating the graphite with the reactive ion etch process, applying the conductive coating over at least a portion of the graphite. In a further embodiment according to the invention, there is provided a method for refurbishing a graphite article comprising graphite and an overlaying conductive coating. The method comprises removing the overlaying conductive coating of the graphite article with a reactive ion etch process; and applying a new conductive coating over at least a portion of the graphite.
摘要翻译：根据本发明的实施例，提供了一种涂覆石墨制品。该物品包括石墨; 以及覆盖至少一部分石墨的导电涂层。导电涂层包括通过石墨和导电涂层的厚度测量的小于约50欧姆的贯穿厚度电阻。根据本发明的另一个实施例，提供了一种用于制造包括导电涂层的石墨制品的方法。该方法包括用反应离子蚀刻工艺处理制品的石墨; 并且在用反应离子蚀刻工艺处理石墨之后，将导电涂层施加在石墨的至少一部分上。在根据本发明的另一实施例中，提供了一种用于翻新包含石墨和覆盖导电涂层的石墨制品的方法。该方法包括用反应离子蚀刻工艺去除石墨制品的覆盖导电涂层; 以及在所述石墨的至少一部分上施加新的导电涂层。

2. 发明申请

WO2010132640A3 ELECTROSTATIC CHUCK WITH POLYMER PROTRUSIONS 审中-公开
标题翻译：具有聚合物促进作用的静电切片
公开(公告)号：WO2010132640A3
公开(公告)日：2011-03-31
申请号：PCT/US2010034667
申请日：2010-05-13
申请人： ENTEGRIS INC , COOKE RICHARD A , RICHARD NATE , DONNELL STEVEN , VOSE MARK , LIU YAN
发明人： COOKE RICHARD A , RICHARD NATE , DONNELL STEVEN , VOSE MARK , LIU YAN
IPC分类号： H01L21/687 , B23Q3/15 , H02N13/00
CPC分类号： H01L21/6831 , H01L21/6875
摘要： In accordance with an embodiment of the invention, there is provided an electrostatic chuck. The electrostatic chuck comprises a surface layer activated by a voltage in an electrode to form an electric charge to electrostatically clamp a substrate to the electrostatic chuck. The surface layer includes a plurality of polymer protrusions and a charge control layer to which the plurality of polymer protrusions adhere, the plurality of polymer protrusions extending to a height above portions of the charge control layer surrounding the plurality of polymer protrusions to support the substrate upon the plurality of polymer protrusions during electrostatic clamping of the substrate.
摘要翻译：根据本发明的实施例，提供一种静电卡盘。静电卡盘包括由电极中的电压激活的表面层，以形成电荷以将基板静电夹持到静电卡盘。表面层包括多个聚合物突起和多个聚合物突起粘附到其上的电荷控制层，多个聚合物突起延伸到围绕多个聚合物突起的电荷控制层的部分上方的高度，以将基底支撑在在基板的静电夹持期间的多个聚合物突起。

3. 发明申请

WO2012033922A3 HIGH CONDUCTIVITY ELECTROSTATIC CHUCK 审中-公开
公开(公告)号：WO2012033922A3
公开(公告)日：2012-03-15
申请号：PCT/US2011/050841
申请日：2011-09-08
申请人： ENTEGRIS, INC. , VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. , SUURONEN, David , STONE, Lyudmila , BLAKE, Julian , STONE, Dale, K. , COOKE, Richard, A. , DONNELL, Steven , VENKATRAMAN, Chandra
发明人： SUURONEN, David , STONE, Lyudmila , BLAKE, Julian , STONE, Dale, K. , COOKE, Richard, A. , DONNELL, Steven , VENKATRAMAN, Chandra
IPC分类号： H01L21/683 , H01L21/687 , B23Q3/15 , H02N13/00
摘要： In accordance with an embodiment of the invention, there is provided an electrostatic chuck comprising a conductive path covering at least a portion of a workpiece-contacting surface of a gas seal ring of the electrostatic chuck, the conductive path comprising at least a portion of an electrical path to ground; and a main field area of a workpiece-contacting surface of the electrostatic chuck comprising a surface resistivity in the range of from about 10 8 to about 10 12 ohms per square.

4. 发明申请

WO2012033922A2 HIGH CONDUCTIVITY ELECTROSTATIC CHUCK 审中-公开
标题翻译：高电导率静电卡盘
公开(公告)号：WO2012033922A2
公开(公告)日：2012-03-15
申请号：PCT/US2011050841
申请日：2011-09-08
申请人： ENTEGRIS INC , VARIAN SEMICONDUCTOR EQUIPMENT , SUURONEN DAVID , STONE LYUDMILA , BLAKE JULIAN , STONE DALE K , COOKE RICHARD A , DONNELL STEVEN , VENKATRAMAN CHANDRA
发明人： SUURONEN DAVID , STONE LYUDMILA , BLAKE JULIAN , STONE DALE K , COOKE RICHARD A , DONNELL STEVEN , VENKATRAMAN CHANDRA
IPC分类号： H01L21/683 , B23Q3/15 , H01L21/687 , H02N13/00
CPC分类号： H02N13/00 , B23Q3/152 , H01L21/6831 , H01L21/6833
摘要： In accordance with an embodiment of the invention, there is provided an electrostatic chuck comprising a conductive path covering at least a portion of a workpiece-contacting surface of a gas seal ring of the electrostatic chuck, the conductive path comprising at least a portion of an electrical path to ground; and a main field area of a workpiece-contacting surface of the electrostatic chuck comprising a surface resistivity in the range of from about 108 to about 1012 ohms per square.
摘要翻译：根据本发明的实施例，提供了一种静电卡盘，其包括覆盖静电卡盘的气体密封环的工件接触表面的至少一部分的导电路径，该导电路径包括至少一部分电路到地面; 以及静电卡盘的工件接触表面的主场区域，其表面电阻率范围为约108至约1012欧姆/平方。

5. 发明申请

WO2011133417A3 COATED GRAPHITE ARTICLE AND REACTIVE ION ETCH MANUFACTURING AND REFURBISHMENT OF GRAPHITE ARTICLE 审中-公开
标题翻译：涂层石墨制品和石墨制品的反应离子生产和改造
公开(公告)号：WO2011133417A3
公开(公告)日：2012-01-05
申请号：PCT/US2011032662
申请日：2011-04-15
申请人： ENTEGRIS INC , COOKE RICHARD A , GUNDA NILESH , DONNELL STEVEN , LIU YAN
发明人： COOKE RICHARD A , GUNDA NILESH , DONNELL STEVEN , LIU YAN
IPC分类号： H01B5/14 , H01J37/317
CPC分类号： C23C14/48 , H01B5/14 , H01J37/16 , H01J37/3171 , Y10T428/265 , Y10T428/30
摘要： In accordance with an embodiment of the invention, there is provided a coated graphite article. The article comprises graphite; and a conductive coating overlaying at least a portion of the graphite. The conductive coating comprises a through-thickness resistance of less than about 50 ohms as measured through the thickness of the graphite and the conductive coating. In accordance with another embodiment of the invention, there is provided a method for manufacturing a graphite article comprising a conductive coating. The method comprises treating graphite of the article with a reactive ion etch process; and after treating the graphite with the reactive ion etch process, applying the conductive coating over at least a portion of the graphite. In a further embodiment according to the invention, there is provided a method for refurbishing a graphite article comprising graphite and an overlaying conductive coating. The method comprises removing the overlaying conductive coating of the graphite article with a reactive ion etch process; and applying a new conductive coating over at least a portion of the graphite.
摘要翻译：根据本发明的实施例，提供了一种涂覆石墨制品。该物品包括石墨; 以及覆盖至少一部分石墨的导电涂层。导电涂层包括通过石墨和导电涂层的厚度测量的小于约50欧姆的贯穿厚度电阻。根据本发明的另一个实施例，提供了一种用于制造包括导电涂层的石墨制品的方法。该方法包括用反应离子刻蚀工艺处理制品的石墨; 并且在用反应离子蚀刻工艺处理石墨之后，将导电涂层施加在石墨的至少一部分上。在根据本发明的另一实施例中，提供了一种用于翻新包含石墨和覆盖导电涂层的石墨制品的方法。该方法包括用反应离子蚀刻工艺去除石墨制品的覆盖导电涂层; 以及在所述石墨的至少一部分上施加新的导电涂层。

6. 发明申请

WO2010132640A2 ELECTROSTATIC CHUCK WITH POLYMER PROTRUSIONS 审中-公开
标题翻译：具有聚合物促进作用的静电切片
公开(公告)号：WO2010132640A2
公开(公告)日：2010-11-18
申请号：PCT/US2010/034667
申请日：2010-05-13
申请人： ENTEGRIS, INC. , COOKE, Richard, A. , RICHARD, Nate , DONNELL, Steven , VOSE, Mark , LIU, Yan
发明人： COOKE, Richard, A. , RICHARD, Nate , DONNELL, Steven , VOSE, Mark , LIU, Yan
IPC分类号： H01L21/687 , B23Q3/15 , H02N13/00
CPC分类号： H01L21/6831 , H01L21/6875
摘要： In accordance with an embodiment of the invention, there is provided an electrostatic chuck. The electrostatic chuck comprises a surface layer activated by a voltage in an electrode to form an electric charge to electrostatically clamp a substrate to the electrostatic chuck. The surface layer includes a plurality of polymer protrusions and a charge control layer to which the plurality of polymer protrusions adhere, the plurality of polymer protrusions extending to a height above portions of the charge control layer surrounding the plurality of polymer protrusions to support the substrate upon the plurality of polymer protrusions during electrostatic clamping of the substrate.
摘要翻译：根据本发明的实施例，提供一种静电卡盘。静电卡盘包括由电极中的电压激活的表面层，以形成电荷以将基板静电夹持到静电卡盘。表面层包括多个聚合物突起和多个聚合物突起粘附到其上的电荷控制层，多个聚合物突起延伸到围绕多个聚合物突起的电荷控制层的部分上方的高度，以将基底支撑在在基板的静电夹持期间的多个聚合物突起。

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