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    • 1. 发明公开
    • Substrate imprint apparatus
    • 基板印刷装置
    • KR20120070268A
    • 2012-06-29
    • KR20100131752
    • 2010-12-21
    • DMS CO LTD
    • KIM JUNG KWON
    • H01L21/027
    • H01L21/0274G03F7/0002
    • PURPOSE: An apparatus for imprinting a substrate is provided to conveniently imprint a substrate by using a stamp. CONSTITUTION: A stage(2) includes a loading plane on which a substrate is placed. A stamp(4) is arranged above the stage. A holder(6) holds the stamp to be attached to the substrate. A uniform attaching unit(8) generates compression pressure with ambient pressure in a chamber by supplying a fluid to the inside of the chamber so that an attaching side is pressed in a side contacting state while the substrate and the stamp are attached to each other.
    • 目的:提供一种用于压印基板的装置,以便通过使用印模方便地印刷基板。 构成:阶段(2)包括其上放置基板的装载平面。 在舞台上方布置有邮票(4)。 保持器(6)保持要附着到基板上的印模。 均匀的附着单元(8)通过向腔室的内部供给流体而在室内产生环境压力的压缩压力,使得在基板和印模彼此附接的同时侧面接触的状态下被按压。
    • 4. 发明公开
    • Imprint apparatus
    • IMPRINT APPARATUS
    • KR20120033500A
    • 2012-04-09
    • KR20100095048
    • 2010-09-30
    • DMS CO LTD
    • SEO JU HWANPARK CHUN SEONGCHOI JUNG WOOKKIM DUCK SOOKIM YONG TAE
    • B29C33/42B29C33/38B29C59/02
    • B29C59/022B29C59/002G03F7/0002
    • PURPOSE: An imprint device is provided to enhance imprint quality since bubble is smoothly discharged to the outside of the adhered surface of a substrate and a stamp. CONSTITUTION: An imprint device comprises a stage(2), a stamp(4), a division fixing unit(6), and a division control unit(8). A substrate(G) is placed on the loading surface(F) of the stage. The imprint surface(S1) of the stamp faces the substrate on the stage. The stamp is arranged in on the stage. The chuck members(C) of the division fixing unit divide the entire back side of the imprint surface on the stamp and fix the divided surfaces respectively. The division control unit controls the operating state of the chuck members of the division fixing unit respectively.
    • 目的:提供压印装置以增强压印质量,因为气泡被平滑地排放到衬底的粘附表面和印模的外部。 构成:压印装置包括台(2),印章(4),分割定影单元(6)和分割控制单元(8)。 将衬底(G)放置在工作台的装载表面(F)上。 印模的印记表面(S1)面向载物台上的基材。 邮票安排在舞台上。 分割固定单元的卡盘构件(C)将压印表面的整个背面划分在印模上并分别固定分开的表面。 分割控制单元分别控制分割定影单元的卡盘构件的操作状态。
    • 7. 发明公开
    • Imprint apparatus
    • IMPRINT APPARATUS
    • KR20120033499A
    • 2012-04-09
    • KR20100095047
    • 2010-09-30
    • DMS CO LTD
    • KIM DUCK SOOPARK CHUN SEONGCHOI JUNG WOOKSEO JU HWANCHOI YOUN HEE
    • B29C33/42B29C33/38B29C59/02
    • B29C59/002B29C59/022G03F7/0002
    • PURPOSE: An imprint device is provided to stably separate a stamp from a substrate since after the edge of the stamp is first lift, the middle part of the stamp is pulled up. CONSTITUTION: An imprint device comprises a stage(2), a stamp(4), a holder unit(6), a flexible connecting unit(8), and a first driving unit(10). In a state the imprinting surface(S1) of the stamp faces a substrate(G), the stamp is arranged on the stage. A plurality of holders(H) of the holder unit are arranged on opposite edges on the stamp. The holders hold the stamp to correspond to the substrate of the stage. Connectors(C1-C3) of the flexible connecting unit connect the holders of the holder unit maintaining vertical clearance.
    • 目的:提供一种压印装置,用于将印模与基板稳定分离,因为在印模的边缘首次提升之后,印章的中间部分被拉起。 构成:压印装置包括台(2),印章(4),保持单元(6),柔性连接单元(8)和第一驱动单元(10)。 在印模的压印表面(S1)处于基板(G)的状态下,印模布置在平台上。 保持器单元的多个保持器(H)布置在印模上的相对边缘上。 持有者持有邮票以对应于舞台的底座。 柔性连接单元的连接器(C1-C3)连接保持器单元的保持器,保持垂直间隙。
    • 10. 发明专利
    • Injector for glass substrate of for wafer treatment
    • 玻璃基材注射器用于水处理
    • JP2003017462A
    • 2003-01-17
    • JP2001195951
    • 2001-06-28
    • Dms Co Ltdディ.エム.エス カンパニー リミテッド
    • JUM LYUL HAN
    • G02F1/1333B08B3/02B08B3/08B08B7/00H01L21/00H01L21/304
    • H01L21/67034B08B3/022B08B7/00
    • PROBLEM TO BE SOLVED: To provide an injector for glass substrate treatment that can treat, especially dry a glass substrate, without damaging the substrate by utilizing mechanical force and chemical force.
      SOLUTION: The injector comprises a jet section 120 for jetting vaporized IPA and solvent vapor, a supply section 111 for recycling fluid that was allowed to remain after use or new fluid (new liquid), and a generator 109 for vaporizing the IPA and solvents. At the jet section, a pressure tank 103 is provided. In the pressure tank 103, a discharge port 101 for discharging the IPA that has been vaporized once and solvent vapor is formed, and at the same time, entrance guides 105a and 105b are formed at both side ends, so that a glass substrate 100 can freely move in and out. The supply section conveys the fluid remaining, on the side of the outlet guide of the pressure tank via a pump 117 and comprises a boiling machine 113 for boiling the conveyed fluid and a condenser 115. In the generator, a heating machine and a supply apparatus are arranged in the inside, the IPA and solvent are heated and supplied, thus carrying out the supply to the glass substrate via the discharge port.
      COPYRIGHT: (C)2003,JPO
    • 要解决的问题:提供一种可以通过利用机械力和化学力对玻璃基板进行处理,特别是干燥玻璃基板而不损坏基板的喷射器。 解决方案:喷射器包括用于喷射蒸发的IPA和溶剂蒸气的喷射部分120,用于再循环使用后残留的流体的供应部分111或新流体(新液体)和用于汽化IPA和溶剂的发生器109。 在喷射部分设有压力罐103。 在压力罐103中,在两侧形成有用于排出已经蒸发一次并且形成溶剂蒸汽的IPA的排出口101,同时在两侧形成入口导向件105a和105b,从而玻璃基板100可以 自由进出。 供应部分经由泵117在压力罐的出口引导件的侧面上剩余的流体输送,并且包括用于沸腾被输送的流体的沸腾机113和冷凝器115.在发电机中,加热机和供给装置 布置在内部,IPA和溶剂被加热和供应,从而通过排出口对玻璃基板进行供给。