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1. 发明申请

WO2012106246A2 INTERFEROMETRIC HETERODYNE OPTICAL ENCODER SYSTEM 审中-公开
标题翻译：干涉光学编码器系统
公开(公告)号：WO2012106246A2
公开(公告)日：2012-08-09
申请号：PCT/US2012023126
申请日：2012-01-30
申请人： ZYGO CORP , DE GROOT PETER , SCHROEDER MICHAEL
发明人： DE GROOT PETER , SCHROEDER MICHAEL
IPC分类号： G01D5/26 , G01B11/00
CPC分类号： G01B9/02059 , G01B9/02003 , G01B9/02007 , G01B9/02076 , G01B2290/15 , G01B2290/70 , G01D5/266 , G01D5/347 , G01D5/34723 , G03F7/70775
摘要： An encoder interferometry system includes an interferometer positioned to receive first and second beams having different frequencies, in which the interferometer has at least one polarizing beam splitting element for directing the first beam along a measurement path to define a measurement beam and the second beam along a reference path to define a reference beam. The encoder interferometry system further includes a encoder scale positioned to diffract the measurement beam at least once, a detector positioned to receive the measurement and reference beams after the measurement beam diffracts from the encoder scale, and an output component positioned to receive the measurement and reference beams before they reach the detector and deflect spurious portions of the first and second beam away from the detector.
摘要翻译：编码器干涉测量系统包括干涉仪，定位成接收具有不同频率的第一和第二波束，其中干涉仪具有至少一个偏振分束元件，用于沿测量路径引导第一光束以限定测量光束，并且第二光束沿着参考路径来定义参考光束。编码器干涉测量系统还包括一个定位成将至少一次衍射测量光束的编码器刻度，位于测量光束从编码器尺度衍射的接收测量和参考光束的检测器以及定位成接收测量和参考的输出部件光束在它们到达检测器并且使第一和第二光束的杂散部分远离检测器。

2. 发明申请

WO2008151266A2 INTERFEROMETRY FOR DETERMINING CHARACTERISTICS OF AN OBJECT SURFACE, WITH SPATIALLY COHERENT ILLUMINATION 审中-公开
标题翻译：用于确定对象表面特征的空间相干照明的干涉
公开(公告)号：WO2008151266A2
公开(公告)日：2008-12-11
申请号：PCT/US2008/065863
申请日：2008-06-05
申请人： ZYGO CORPORATION , DE LEGA, Xavier Colonna , DE GROOT, Peter
发明人： DE LEGA, Xavier Colonna , DE GROOT, Peter
IPC分类号： G01J3/00 , G01B9/02
CPC分类号： G01B9/02043 , G01B9/02057 , G01B9/02072 , G01B9/02084 , G01B9/02088 , G01B9/0209 , G01B2290/70
摘要： Disclosed is an apparatus which includes: an interferometer configured to direct broadband spatially coherent test light to a test surface of a test object over a range of illumination angles and subsequently combine it with reference light to form an interference pattern, the test and reference light being derived from a common source; a multi-element detector; and one or more optics configured to direct at least a portion of the combined light to the detector so that different elements of the detector correspond to different illumination angles of a region of the test surface illuminated by the test light.
摘要翻译：公开了一种装置，其包括：干涉仪，其被配置为在宽度范围的照射角度下将宽带空间相干测试光引导到测试对象的测试表面，并随后将其与参考光组合以形成干涉图案，所述测试和参考光为源自一个共同的来源; 多元素检测器; 以及一个或多个光学器件，被配置为将组合的光的至少一部分引导到检测器，使得检测器的不同元件对应于由测试光照射的测试表面的区域的不同照明角度。

3. 发明申请

WO2007087301A2 INTERFEROMETER SYSTEM FOR MONITORING AN OBJECT 审中-公开
标题翻译：用于监测对象的干扰仪系统
公开(公告)号：WO2007087301A2
公开(公告)日：2007-08-02
申请号：PCT/US2007/001772
申请日：2007-01-23
申请人： ZYGO CORPORATION , DE GROOT, Peter , DECK, Leslie, L. , ZANONI, Carl
发明人： DE GROOT, Peter , DECK, Leslie, L. , ZANONI, Carl
IPC分类号： G01B9/02 , G01B11/02
CPC分类号： G01B9/02004 , G01B9/02002 , G01B9/02007 , G01B9/02027 , G01B9/0209 , G01B2290/15 , G01B2290/45 , G03F7/70775
摘要： A system is disclosed that includes a plurality of interferometers each configured to derive a first wavefront and a second wavefront from input radiation and to combine the first and second wavefronts to provide output radiation including information about an optical path length difference between the paths of the first and second wavefronts, each interferometer including a reflective element positioned in the path of the first wavefront, and at least one of the interferometer's reflective element is mounted on a first object. The system also includes a plurality of fiber waveguides and an electronic controller. Each fiber waveguide delivers the input radiation to a corresponding interferometer or deliver the output radiation from the corresponding interferometer to a corresponding detector. The electronic controller monitors an absolute displacement of the first object relative to a second object based on the information from at least one of the interferometers.
摘要翻译：公开了一种系统，其包括多个干涉仪，每个干涉仪被配置为从输入辐射导出第一波前和第二波前，并且组合第一和第二波前以提供输出辐射，其包括关于第一波前和第二波前的光路长度差的信息和第二波前，每个干涉仪包括位于所述第一波前的路径中的反射元件，并且所述干涉仪的反射元件中的至少一个安装在第一物体上。该系统还包括多个光纤波导和电子控制器。每个光纤波导将输入辐射传送到相应的干涉仪，或将来自相应干涉仪的输出辐射传送到相应的检测器。电子控制器基于来自至少一个干涉仪的信息监测第一物体相对于第二物体的绝对位移。

4. 发明申请

WO2006125131A2 METHOD AND SYSTEM FOR ANALYZING LOW-COHERENCE INTERFEROMETRY SIGNALS FOR INFORMATION ABOUT THIN FILM STRUCTURES 审中-公开
标题翻译：用于分析薄膜结构信息的低相干干涉信号的方法和系统
公开(公告)号：WO2006125131A2
公开(公告)日：2006-11-23
申请号：PCT/US2006/019350
申请日：2006-05-18
申请人： ZYGO CORPORATION , DE GROOT, Peter
发明人： DE GROOT, Peter
IPC分类号： G01B9/02 , G01B11/02
CPC分类号： G01B11/2441 , G01B9/02084 , G01B9/02087 , G01B9/02088 , G01B9/0209 , G01N21/8422
摘要： Methods and systems are disclosed for analyzing a scanning interferometry signal. Steps include: providing a scanning interferometry signal produced by a scanning interferometer for a first location of a test object (e.g., a sample having a thin film); providing a model function of the scanning interferometry signal produced by the scanning interferometer, wherein the model function is parametrized by one or more parameter values; fitting the model function to the scanning interferometry signal for each of a series of shifts in scan position between the model function and the scanning interferometry signal by varying the parameter values; and determining information about the test object (e.g., a surface height or height profile, and/or a thickness or thickness profile for a thin film in the test object) at the first location based on the fitting.
摘要翻译：公开了用于分析扫描干涉测量信号的方法和系统。步骤包括：提供由扫描干涉仪产生的用于测试对象（例如，具有薄膜的样本）的第一位置的扫描干涉测量信号; 提供由扫描干涉仪产生的扫描干涉测量信号的模型函数，其中所述模型函数由一个或多个参数值参数化; 通过改变参数值，将模型函数与模型函数和扫描干涉测量信号之间的扫描位置的一系列移位中的每一个拟合到扫描干涉测量信号; 以及基于所述拟合来确定关于所述第一位置处的所述测试对象的信息（例如，表面高度或高度分布，以及/或所述测试对象中的薄膜的厚度或厚度分布）。

5. 发明申请

WO2005029193A3 INTERFEROMETRIC ANALYSIS OF SURFACES. 审中-公开
标题翻译：表面的平均分析。
公开(公告)号：WO2005029193A3
公开(公告)日：2005-10-06
申请号：PCT/US2004030196
申请日：2004-09-15
申请人： ZYGO CORP , DE GROOT PETER J
发明人： DE GROOT PETER J
IPC分类号： G01B9/02 , G01B11/00 , G01B11/06 , G03F7/20 , G03F9/00
CPC分类号： G03F7/70491 , G01B9/02019 , G01B9/02022 , G01B9/02084 , G01B9/02087 , G01B9/0209 , G01B11/0675 , G01B2290/30 , G01B2290/70 , G03F7/70608 , G03F7/70641 , G03F7/70775 , G03F9/7003 , G03F9/7049 , G03F9/7088
摘要： A method for determining a spatial property of an object includes obtaining a scanning low coherence interference signal from a measurement object that includes two or more interfaces. The scanning low coherence interference signal includes two or more overlapping low coherence interference signals, each of which results from a respective interface. Based on the low coherence interference signal, a spatial property of at least one of the interfaces is determined. In some cases, the determination is based on a subset of the low coherence interference signal rather than on the entirety of the signal. Alternatively, or in addition, the determination can be based on a template, which may be indicative of an instrument response of the interferometer used to obtain the low coherence interference signal.
摘要翻译：用于确定对象的空间属性的方法包括从包括两个或多个接口的测量对象获得扫描低相干干扰信号。扫描低相干干涉信号包括两个或更多个重叠的低相干干扰信号，每个干涉信号由相应的接口产生。基于低相干干涉信号，确定至少一个界面的空间属性。在一些情况下，该确定基于低相干干扰信号的子集，而不是整个信号。或者或另外，该确定可以基于模板，其可以指示用于获得低相干干涉信号的干涉仪的仪器响应。

6. 发明申请

WO2004079294A3 CHARACTERIZING AND PROFILING COMPLEX SURFACE STRUCTURES USING SCANNING INTERFEROMETRY 审中-公开
标题翻译：使用扫描干涉法表征和分析复杂的表面结构
公开(公告)号：WO2004079294A3
公开(公告)日：2005-05-19
申请号：PCT/US2004007014
申请日：2004-03-08
申请人： ZYGO CORP , DE GROOT PETER J , STONER ROBERT , DE LEGA XAVIER COLONNA
发明人： DE GROOT PETER J , STONER ROBERT , DE LEGA XAVIER COLONNA
IPC分类号： G01B9/02 , G01B11/06 , G01B11/24
CPC分类号： G01B9/0201 , G01B9/02057 , G01B9/02084 , G01B9/02088 , G01B9/0209 , G01B11/0675 , G01B2290/70
摘要： A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test objects, wherein the multiple models are parametrized by a series of characteristics for the test object. The information corresponding to the multiple models may include information about at least one amplitude component of a transform (eg. A Fourier transform) of a scanning interferometry signal corresponding to each of the models of the test object. In a second aspect the models correspond to a fixed surface height and they are parametrized by a series of characteristics different from the fixed surface height. In a third aspect the comparing comprises accounting for systematic contributions to the interferometry signal.
摘要翻译：一种方法，包括将来自测试对象的第一表面位置的扫描干涉测量信号的信息与对应于测试对象的多个模型的信息进行比较，其中所述多个模型由所述测试对象的一系列特征参数化。对应于多个模型的信息可以包括关于与测试对象的每个模型相对应的扫描干涉测量信号的变换的至少一个幅度分量（例如，傅里叶变换）的信息。在第二方面，模型对应于固定的表面高度，并且它们由与固定表面高度不同的一系列特征参数化。在第三方面，比较包括考虑对干涉测量信号的系统贡献。

7. 发明申请

WO2005029192A2 TRIANGULATION METHODS AND SYSTEMS FOR PROFILING SURFACES THROUGH A THIN FILM COATING 审中-公开
标题翻译：通过薄膜涂层分类表面的三角法和系统
公开(公告)号：WO2005029192A2
公开(公告)日：2005-03-31
申请号：PCT/US2004030051
申请日：2004-09-15
申请人： ZYGO CORP , DE LEGA XAVIER COLONNA , DE GROOT PETER J , KUCHEL MICHAEL
发明人： DE LEGA XAVIER COLONNA , DE GROOT PETER J , KUCHEL MICHAEL
IPC分类号： G01B9/02 , G01B11/00 , G01B11/06 , G03F7/20 , G03F9/00 , G01B11/02
CPC分类号： G03F7/70491 , G01B9/02019 , G01B9/02022 , G01B9/02084 , G01B9/02087 , G01B9/0209 , G01B11/0675 , G01B2290/30 , G01B2290/70 , G03F7/70608 , G03F7/70641 , G03F7/70775 , G03F9/7003 , G03F9/7049 , G03F9/7088
摘要： An apparatus for positioning an object having a substrate and an overlying film and a portion of a photolithography apparatus relative to one another includes a photolithography apparatus relative to one another includes a photolithography system, a positioner, an optical system, and a processor. The photolithography system is configured to illuminate a portion of an object with an first light pattern and includes a reference surface. The positioner can change a relative position between the photolithography system and the object. The light projector is configured to project a second light pattern on the overlying thin film of the object. The optical system images light of the second light pattern that is diffusely scattered by the substrate. The processor is configured to determine a spatial property of the object based on the diffusely scatterd light and operate the positioner to change the relative position between the photolitography system and the object.
摘要翻译：一种用于定位具有基板和上覆膜的对象的设备以及光刻设备的一部分相对于彼此包括的光刻设备包括光刻系统，定位器，光学系统和处理器。光刻系统被配置为用第一光图案照亮物体的一部分并且包括参考表面。定位器可以改变光刻系统和物体之间的相对位置。光投影仪被配置为将第二光图案投影在物体的上覆薄膜上。光学系统对由基板漫反射散射的第二光图案的光进行成像。处理器被配置为基于漫散射的光来确定对象的空间属性，并且操作定位器以改变光学照相系统和对象之间的相对位置。

8. 发明申请

WO2003093759A3 PHASE GAP ANALYSIS FOR SCANNING INTERFEROMETRY 审中-公开
公开(公告)号：WO2003093759A3
公开(公告)日：2003-11-13
申请号：PCT/US2003/013878
申请日：2003-05-02
申请人： ZYGO CORPORATION , DE GROOT, Peter, J.
发明人： DE GROOT, Peter, J.
IPC分类号： G01B9/02
摘要： A method including: providing a coherence profile and a phase profile derived from interferometry data for a test surface (120); calculating a phase gap map (130), wherein the phase gap map is related to a difference between the coherence profile and the phase profile; fitting an expression including a term based on the coherence profile to the phase gap map (140); and determining a height profile (170) for the test surface using information derived from the fit.

9. 发明申请

WO03093759A2 PHASE GAP ANALYSIS FOR SCANNING INTERFEROMETRY 审中-公开
标题翻译：扫描干涉仪的相位差分析
公开(公告)号：WO03093759A2
公开(公告)日：2003-11-13
申请号：PCT/US0313878
申请日：2003-05-02
申请人： ZYGO CORP , DE GROOT PETER J
发明人： DE GROOT PETER J
IPC分类号： G01B9/02 , G01B11/02 , G01B11/06 , G01B11/24 , G01B
CPC分类号： G01B11/0608 , G01B9/02044 , G01B9/02078 , G01B9/02085 , G01B9/02087 , G01B9/0209 , G01B11/2441
摘要： A method including: providing a coherence profile and a phase profile derived from interferometry data for a test surface; calculating a phase gap map, wherein the phase gap map is related to a difference between the coherence profile and the phase profile; fitting an expression including a term based on the coherence profile to the phase gap map; and determining a height profile for the test surface using information derived from the fit.
摘要翻译：一种方法，包括：提供相干轮廓和从测试表面的干涉测量数据导出的相位曲线; 计算相位差图，其中所述相位差图与所述相干分布和所述相位分布之间的差异相关; 将包括基于相干轮廓的术语的表达拟合到相位图中; 以及使用从所述拟合得到的信息来确定所述测试表面的高度分布。

10. 发明申请

WO03033994B1 MEASUREMENT OF COMPLEX SURFACE SHAPES USING A SPHERICAL WAVEFRONT 审中-公开
标题翻译：用球形波前测量复杂表面形状
公开(公告)号：WO03033994B1
公开(公告)日：2003-09-25
申请号：PCT/US0229254
申请日：2002-09-13
申请人： ZYGO CORP , DE GROOT PETER J , COLONNA DE LEGA XAVIER
发明人： DE GROOT PETER J , COLONNA DE LEGA XAVIER
IPC分类号： G01B9/02 , G01B11/24 , G01N21/45 , G01N21/95
CPC分类号： G01N21/9515 , G01B9/02039 , G01B9/02057 , G01B9/02072 , G01B9/0209 , G01B11/2441 , G01B11/306 , G01B2290/25
摘要： Conical surfaces (and other complex surface shapes) can be interferometrically characterized using a locally spherical measurement wavefront (e.g, spherical and aspherical wavefronts). In particular, complex surface shapes are measured relative to a measurement point datum. This is achieved by varying the radius of curvature of a virtual surface (152) corresponding to a theoretical test surface that would reflect a measurement wavefront to produce a constant optical path length difference (e.g., zero OPD) between the measurement and reference waveforms.
摘要翻译：锥形表面（和其他复杂的表面形状）可以使用局部球形测量波前（例如，球形和非球形波前）进行干涉测量。特别是，相对于测量点基准测量复杂的表面形状。这通过改变对应于理论测试表面的虚拟表面（152）的曲率半径来实现，该理论测试表面将反射测量波前以在测量波形和参考波形之间产生恒定的光程长度差（例如零OPD）。

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