会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 3. 发明申请
    • Fluid mixing and delivery system
    • 流体混合和输送系统
    • US20060243207A1
    • 2006-11-02
    • US11267579
    • 2005-11-07
    • Gregory JursichRajat AgrawalCyril Bourasseau
    • Gregory JursichRajat AgrawalCyril Bourasseau
    • C23C16/00
    • C23C16/45512
    • A gas mixing and delivery system includes a first gas supply vessel including a first gas stored at a first pressure, a second gas supply vessel including a second gas stored at a second pressure, and a mixing vessel connected to each of the first and second gas supply vessels. The system further includes a buffer tank connected to the mixing vessel to receive a gas mixture including the first and second gases delivered from the mixing vessel. The buffer tank is configured to connect with a process tool. The system is further configured to produce a gas mixture including the first and second gases by facilitating delivery of the first and second gases into the mixing vessel, mixing the first and second gases in the mixing vessel and delivering the gas mixture from the mixing vessel to the buffer tank via a forcing gas that is at a pressure greater than the first pressure.
    • 气体混合输送系统包括:第一气体供给容器,包括以第一压力存储的第一气体;第二气体供应容器,包括以第二压力存储的第二气体;以及混合容器,其连接到第一和第二气体 供应船只。 该系统还包括连接到混合容器的缓冲罐,以接收包括从混合容器输送的第一和第二气体的气体混合物。 缓冲罐配置为与加工工具连接。 该系统还被配置成通过促进将第一和第二气体输送到混合容器中来产生包括第一和第二气体的气体混合物,将混合容器中的第一和第二气体混合并将气体混合物从混合容器输送到 所述缓冲罐通过处于大于所述第一压力的压力的强制气体。